公开(公告)号：US06825475B2

公开(公告)日：2004-11-30

申请号：US10247104

申请日：2002-09-19

Applicant: Igor Petrov ,  Igor Krivts ,  Zvika Rosenberg ,  Pavel Adamec

Inventor： Igor Petrov ,  Igor Krivts ,  Zvika Rosenberg ,  Pavel Adamec

IPC: H01J3710

CPC classification number: H01J37/1475

Abstract: A deflection system is presented for use in a lens arrangement of a charged particle beam column for inspecting a sample. The system comprises a magnetic deflector operable to create a magnetic field, and a pole piece assembly at least partly accommodated within the magnetic field. The pole piece assembly has a portion made of a soft magnetic material and is formed with an opening for a charged particle beam propagation therethrough. The deflection system allows for conducting the magnetic field created by the magnetic deflector through the pole piece assembly towards the opening in the pole piece assembly. This enables to increase the magnetic field value in the vicinity of the sample at the optical axis of the lens arrangement at a given electric current through the excitation coils of the magnetic deflector, without a need to increase a working distance.

Abstract translation: 呈现偏转系统用于带电粒子束柱的透镜布置，用于检查样品。 该系统包括可操作以产生磁场的磁偏转器和至少部分地容纳在磁场内的极片组件。 极片组件具有由软磁材料制成的部分，并且形成有用于带电粒子束传播的开口。 偏转系统允许通过磁极组件朝磁极组件的开口传导由磁偏转器产生的磁场。 这样就能够使透镜装置的光轴附近的样品在通过磁导流板的激励线圈的给定电流上增加磁场值，而不需要增加工作距离。

公开(公告)号：US06747279B2

公开(公告)日：2004-06-08

申请号：US10182437

申请日：2002-10-03

Applicant: Pavel Adamec

Inventor： Pavel Adamec

IPC: H01J3710

CPC classification number: H01J37/1471 ,  H01J37/141 ,  H01J37/28

Abstract: An improved objective lens for a charged particle beam device is constituted by, among other things, a magnetic lens that creates a first magnetic field for focussing the charged particle beam onto the specimen. Furthermore, a deflector is integrated into the magnetic lens by providing at least one additional coil arrangement that creates a second magnetic field used to deflect the charged particle beam. Thereby, the second magnetic field is guided through at least one of the pole pieces of the magnetic lens. The present invention also provides an improved column for a charged particle beam device including the improved objective lens.

Abstract translation: 用于带电粒子束装置的改进的物镜由除其他之外的磁性透镜构成，该磁透镜产生用于将带电粒子束聚焦到样本上的第一磁场。 此外，偏转器通过提供至少一个额外的线圈装置而被集成到磁性透镜中，该线圈装置产生用于偏转带电粒子束的第二磁场。 由此，第二磁场被引导通过磁性透镜的极片中的至少一个。 本发明还提供了一种用于包括改进的物镜的带电粒子束装置的改进的列。

公开(公告)号：US06452175B1

公开(公告)日：2002-09-17

申请号：US09293482

申请日：1999-04-15

Applicant: Pavel Adamec

Inventor： Pavel Adamec

IPC: H01J3720

CPC classification number: H01J37/1478 ,  H01J37/28 ,  H01J2237/1506

Abstract: A charged particle beam column comprises: a particle source; an objective lens; a pre-lens deflection unit for deflecting a beam of charged particles away from the optical axis on such a path that the combined action of the objective lens and the pre-lens deflection unit directs the beam of charged particles towards the optical axis to hit the specimen surface from a first direction; and an in-lens deflection unit arranged in the vicinity of the objective lens for redirecting the deflected beam of charged particles on such a path that the combined action of the objective lens and the in-lens deflection unit redirects the beam of charged particles towards the optical axis to hit the specimen surface under said large beam landing angle from a second direction substantially opposite to said first direction.

Abstract translation: 带电粒子束柱包括：粒子源; 物镜; 一个预透镜偏转单元，用于在物镜和预透镜偏转单元的组合作用将带电粒子束朝向光轴引导以撞击光轴之前将带电粒子束偏离光轴偏转的路径， 样品表面从第一个方向; 以及布置在物镜附近的镜片内偏转单元，用于将偏转的带电粒子束重定向到物镜和镜片间偏转单元的组合作用将带电粒子束朝向 光轴从与所述第一方向大致相反的第二方向在所述大光束着落角下撞击所述样品表面。

公开(公告)号：US07928405B2

公开(公告)日：2011-04-19

申请号：US12181199

申请日：2008-07-28

Applicant: Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

Inventor： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

IPC: H01J1/50

CPC classification number: H01J37/141 ,  H01J2237/1405 ,  Y10T29/4902

Abstract: A lens assembly having a magnetic lens assembly for a charged particle beam system is provided. The lens assembly includes: a first pole piece having a connecting portion of the first pole piece and a gap portion of the first pole piece, a second pole piece having a connecting portion of the second pole piece and a gap portion of the second pole piece, wherein the first pole piece and the second pole piece provide a gap at the respective gap portions, a coil for exciting the magnetic lens assembly, a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece, wherein the pole pieces are connected with each other at the respective connecting portions and have a centering element receiving portion towards the respective gap portion ends of the pole pieces.

Abstract translation: 提供了一种具有用于带电粒子束系统的磁性透镜组件的透镜组件。 透镜组件包括：第一极片，其具有第一极靴的连接部分和第一极靴的间隙部分，第二极靴具有第二极靴的连接部分和第二极靴的间隙部分 ，其中所述第一极靴和所述第二极靴在相应的间隙部分处提供间隙，用于激发所述磁性透镜组件的线圈;定心元件，包括具有比所述第一材料和材料的材料更小的杨氏模量的材料 所述极片在相应的连接部分处彼此连接并且具有朝向所述极片的相应间隙部分端部的定心元件接收部分。

公开(公告)号：US07919749B2

公开(公告)日：2011-04-05

申请号：US12234453

申请日：2008-09-19

Applicant: Fang Zhou ,  Juergen Frosien ,  Pavel Adamec

Inventor： Fang Zhou ,  Juergen Frosien ,  Pavel Adamec

IPC: H01J37/244

CPC classification number: H01J37/05 ,  H01J37/073 ,  H01J37/153 ,  H01J2237/057 ,  H01J2237/06341 ,  H01J2237/1207 ,  H01J2237/1534 ,  H01J2237/28

Abstract: An electron beam apparatus and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam having an asymmetric first energy distribution is generated by means of an electron source. The primary electron beam is high-pass energy filtered using a retarding lens.

Abstract translation: 描述了一种用于提供能量过滤的一次电子束的电子束装置和方法。 其中，通过电子源产生具有不对称的第一能量分布的一次电子束。 一次电子束是使用延迟透镜进行高通能量滤波。

公开(公告)号：US07847267B2

公开(公告)日：2010-12-07

申请号：US10502104

申请日：2003-10-22

Applicant: Dror Shemesh ,  Pavel Adamec

Inventor： Dror Shemesh ,  Pavel Adamec

IPC: H01J37/244

CPC classification number: H01J37/244 ,  G01N23/2251 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2449 ,  H01J2237/24495 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

Abstract: A system and method for multi detector detection of electrons, the method includes the steps of directing a primary electron beam, through a column, to interact with an inspected object, directing, by introducing a substantial electrostatic field, electrons reflected or scattered from the inspected objects towards multiple interior detectors, whereas at least some of the directed electrons are reflected or scattered at small angle in relation to the inspected object; and receiving detection signals from at least one interior detector.

Abstract translation: 一种用于电子的多检测器检测的系统和方法，该方法包括以下步骤：通过列引导一次电子束与检测对象相互作用，通过引入实质的静电场来引导从检查的反射或散射的电子 物体朝向多个内部检测器，而至少一些定向电子相对于被检查物体以小角度反射或散射; 以及从至少一个内部检测器接收检测信号。

公开(公告)号：US07800062B2

公开(公告)日：2010-09-21

申请号：US10912792

申请日：2004-08-06

Applicant: Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas ,  Pavel Adamec ,  Yaron Gold

Inventor： Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas ,  Pavel Adamec ,  Yaron Gold

IPC: G01B15/04

CPC classification number: G01N23/22 ,  G01N23/203 ,  H01J37/1478 ,  H01J37/265 ,  H01J2237/202 ,  H01J2237/2611 ,  H01J2237/281

Abstract: The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.

Abstract translation: 根据第一方面，本发明提供一种用带电粒子束检查样品的方法。 该方法提供了具有不同视角的样本的一个或多个图像，使得与样本的单个图像相比，可以访问大量关于样本的附加信息。 通过在两个图像之间倾斜光束并将样本移动到新位置来实现不同的视角（入射角），使得由光束的倾斜引起的光束的位移被补偿。 因此，当显示/记录第二图像时，在显示/记录第一图像的同时，光束扫描与其扫描的相同的区域。

公开(公告)号：US20100200748A1

公开(公告)日：2010-08-12

申请号：US12701463

申请日：2010-02-05

Applicant: Pavel ADAMEC ,  Helmut BANZHOF ,  Ivo LISKA

Inventor： Pavel ADAMEC ,  Helmut BANZHOF ,  Ivo LISKA

IPC: G01N23/22

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2446

Abstract: It is provided a charged particle beam device for inspecting a specimen, comprising a charged particle beam source adapted to generate a primary charged particle beam; an objective lens device adapted to direct the primary charged particle beam onto the specimen; and a detector device comprising one or more charged particle detectors adapted to detect a secondary charged particle beam generated by the primary charged particle beam at the specimen and passing through the objective lens device, the secondary charged particle beam comprising a first group of secondary charged particles starting from the specimen with high starting angles and a second group of secondary charged particles starting from the specimen with low starting angles; wherein at least one of the charged particle detectors is adapted to detect depending on the starting angles one group of the first and the second groups of secondary charged particles.

Abstract translation: 提供了一种用于检查样本的带电粒子束装置，包括适于产生初级带电粒子束的带电粒子束源; 适于将初级带电粒子束引导到样本上的物镜装置; 以及检测器装置，其包括一个或多个带电粒子检测器，其适于检测在所述样本处由所述初级带电粒子束产生的并通过所述物镜装置的次级带电粒子束，所述次级带电粒子束包括第一组次级带电粒子 从具有较高起始角度的样品开始，第二组二次带电粒子从起始角低的样品开始; 其中所述带电粒子检测器中的至少一个适于根据起始角度检测一组第一和第二组次级带电粒子。

公开(公告)号：US07638777B2

公开(公告)日：2009-12-29

申请号：US10564752

申请日：2004-05-17

Applicant: Hans-Peter Feuerbaum ,  Jürgen Frosien ,  Uli Hoffmann ,  Dieter Winkler ,  Pavel Adamec

Inventor： Hans-Peter Feuerbaum ,  Jürgen Frosien ,  Uli Hoffmann ,  Dieter Winkler ,  Pavel Adamec

IPC: H01J1/50

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3177 ,  H01J2237/047 ,  H01J2237/0635

Abstract: The present invention provides a charged particle beam device. The device comprises an emitter array for emitting a plurality of charged particle beams. The plurality of charged particle beams are imaged with a lens. An electrode unit is provided for accelerating the plurality of charged particle beams. The potential differences between a first potential of the emitter array, a second potential of the electrode unit, and a third potential of a specimen, are controlled by a first control unit and a second control unit. Thereby, the second potential is capable of accelerating the plurality of charged particle beams with respect to the first potential, and the third potential is capable of decelerating the plurality of charged particle beams with respect to the second potential.

Abstract translation: 本发明提供一种带电粒子束装置。 该装置包括用于发射多个带电粒子束的发射极阵列。 多个带电粒子束用透镜成像。 提供电极单元用于加速多个带电粒子束。 第一控制单元和第二控制单元控制发射极阵列的第一电位与电极单元的第二电位和第三电位之间的电位差。 因此，第二电位能够相对于第一电位加速多个带电粒子束，并且第三电位能够使多个带电粒子束相对于第二电位减速。

公开(公告)号：US20090200497A1

公开(公告)日：2009-08-13

申请号：US12366465

申请日：2009-02-05

Applicant: Pavel ADAMEC ,  Fang ZHOU

Inventor： Pavel ADAMEC ,  Fang ZHOU

IPC: G01J1/00 ,  H01J3/14 ,  G01D18/00

CPC classification number: H01J37/244 ,  H01J37/261 ,  H01J2237/2443 ,  H01J2237/24507 ,  H01J2237/2826

Abstract: A charged particle beam device is described. The charged particle beam device includes an emitter adapted for emitting a primary charged particle beam, a specimen location adapted for holding a specimen, from which secondary and/or backscattered charged particles are released on impingement of the primary charged particle beam, a detection unit adapted for detecting the secondary particles and/or secondary particles, and a beam guiding unit adapted for guiding the primary charged particle beam to the detection unit for impingement of a primary charged particle beam on the detection unit.

Abstract translation: 描述带电粒子束装置。 带电粒子束装置包括适于发射初级带电粒子束的发射器，适于保持试样的试样位置，从而从初级带电粒子束的冲击中释放辅助和/或反向散射的带电粒子，检测单元适于 用于检测二次粒子和/或二次粒子的光束引导单元，以及用于将初级带电粒子束引导到检测单元的光束引导单元，用于将一次带电粒子束撞击在检测单元上。