Abstract:
Disclosed are a graphene-ceramic hybrid coating layer formed from a graphene-ceramic hybrid sol solution including graphene (RGO: reduced graphene oxide) and a ceramic sol, wherein the graphene content in the graphene-ceramic hybrid coating layer is about 0.001 wt % to about 1.8 wt % based on the total weight of the graphene-ceramic hybrid coating layer, and a method for preparing the same.
Abstract:
The present invention relates to a method for growing a gallium oxide single crystal and an apparatus for growing a single crystal, and according to one aspect of the present invention, the method includes providing a gallium oxide raw material in a crucible containing iridium, injecting carbon dioxide so that a preset carbon dioxide partial pressure is formed to suppress the loss of iridium, melting the gallium oxide raw material provided in the crucible, and producing a gallium oxide single crystal from the melt.
Abstract:
Disclosed are an alpha gallium oxide thin-film structure having high conductivity obtained using selective area growth in a HVPE growth manner, and a method for manufacturing the same, in which a nitride-based nitride film pattern is formed on an alpha gallium oxide thin-film so as to expose only a selected area thereof, and re-growth is performed only on the partially exposed area thereof, thereby forming a high-quality patterned alpha gallium oxide re-growth pattern.
Abstract:
An antiferroelectric and a method for manufacturing an antiferroelectric are disclosed herein. The antiferroelectric may have high permittivity and breakdown voltage by having a PbxLa1-x([Zr1-YSnY]ZTi1-Z) composition. The manufacturing of the antiferroelectric may be performed through appropriate mixing and dysprosium addition.
Abstract:
A high permittivity antiferroelectric composition and a manufacturing method thereof aim to provide an antiferroelectric, which has a PbxLa1-x([Zr1-YSnY]ZTi1-Z) composition, is sintered at low temperatures, and has a high density and a high permittivity.
Abstract:
The present invention relates to a method of forming a plasma resistant oxyfluoride coating layer, including: mounting a substrate on a substrate holder provided in a chamber; causing an electron beam scanned from an electron gun to be incident on an oxide evaporation source accommodated in a first crucible, and heating, melting, and vaporizing the oxide evaporation source as the electron beam is incident on the oxide evaporation source; vaporizing a fluoride accommodated in a second crucible; and advancing an evaporation gas generated from the oxide evaporation source and a fluorine-containing gas generated from the fluoride toward the substrate, and reacting the evaporation gas generated from the oxide evaporation source and the fluorine-containing gas generated from the fluoride to deposit an oxyfluoride on the substrate. According to the present invention, it is possible to form a dense and stable oxyfluoride coating layer having excellent plasma resistance, suppressed generation of contaminant particles, and no cracks.
Abstract:
The present invention relates to plasma-resistant glass containing 32-52 mol % of SiO2, 5-15 mol % of Al2O3, 30-35 mol % of CaO, and 0.1-15 mol % of CaF2 as chemical components, and a manufacturing method thereof. According to the present invention, a glass stability index KH is 2.0 or higher, and a plasma-resistant characteristic of an etch rate of lower than 10 nm/min for a mixed plasma of fluorine and argon (Ar) is exhibited.
Abstract:
Disclosed is a method of manufacturing a gallium oxide thin film for a power semiconductor using a dopant activation technology that maximizes dopant activation effect and rearrangement effect of lattice in a grown epitaxial at the same time by performing in-situ annealing in a growth condition of a nitrogen atmosphere at the same time as the growth of a doped layer is finished.
Abstract:
The present invention relates to a collection apparatus for collecting particulate matter generated due to friction between a rotor and a brake pad in a brake system of a transport facility, the collection apparatus including a first collector configured to surround a portion of an outer side surface of the rotor, an upper collector configured to surround a portion of an outer peripheral surface of the rotor, and a second collector configured to surround a portion of an inner side surface of the rotor, wherein the first collector and the second collector are made of porous ceramic foam. According to the present invention, particulate matter generated due to friction between a rotor and a brake pad in a brake system of a transport facility can be efficiently collected, and by reducing the amount of particulate matter generated when braking a transport facility, air pollution can be prevented.
Abstract:
The present invention provides a method for manufacturing a composite carbonate in a semi-dry manner by using combustion ash and, more specifically, provides a method for manufacturing a composite carbonate in a semi-dry manner by using combustion ash, the method comprising a step of adding a small amount of water to combustion ash containing calcium ions in an atmosphere of carbon dioxide. According to the present invention, carbon mineralization is carried out in a semi-dry manner by the manufacturing method, so that the composite carbonate can be efficiently produced. In addition, the composite carbonate can be utilized as a component for a concrete composition.