Abstract:
In a method of estimating a PSF in the electron-beam lithography process, a linear resist test pattern may be formed on a substrate. A line response function (LRF) may be determined using a cross-sectional profile of the linear resist test pattern. A development rate distribution in a first direction, the first direction may be substantially perpendicular to an extending direction of the linear resist test pattern, may be calculated using the LRF. A line spread function (LSF), which may represent an exposure distribution in the first direction, may be calculated using the development rate distribution. The PSF may be estimated using the LSF.
Abstract:
A pattern forming method includes providing a first mask with a first aperture, forming a first transfer pattern on a resist by irradiating a first electron beam through the first aperture, the first transfer pattern extending in a first direction and having a boundary along a circumference thereof, and the first electron beam having a cross section of a first square when emerging from the first aperture, and forming a second transfer pattern on the resist by irradiating a second electron beam through the first aperture, the second transfer pattern extending in the first direction and overlapping a portion the boundary of the first transfer pattern, and the second electron beam having a cross section of a second square when emerging from the first aperture.
Abstract:
According to one embodiment, a lens drive device comprises: a housing; a yoke provided on the inside of the housing; a magnet secured to the yoke; a carrier which is located on the inside of the yoke and which is provided with a lens; a coil which is connected to the carrier and which interacts with the magnet; a spring for resiliently supporting the carrier; and a magnetic member connected to the carrier.
Abstract:
An apparatus and a method for mounting a pellicle includes a pellicle compression plate formed to apply a plurality of particular pressures to a plurality of points or areas of a region of the reticle where a pellicle frame of the pellicle contacts a reticle.
Abstract:
A method of manufacturing semiconductor devices is disclosed. The method includes determining fractured shots that do not overlap each other based on a final pattern; determining overlapping shots that are shots that overlap each other based on the final pattern; generating area difference data by comparing the areas of the overlapping shots and the fractured shots with each other; calculating a radiation influenced pattern based on the area difference data; and correcting the overlapping shots based on the radiation influenced pattern.
Abstract:
A shield cover for a braided wire shield that is capable of securely fixing a braided wire to a shield member through a single pressing operation. The shield cover having a mating end, an inner casing, an outer cover housing. and a securing section. The inner casing positioned at an end opposite the mating end and having a shield receiving passageway. The outer cover housing positioned at the mating end of the shield cover and forming a connector receiving passageway being wider than the shield receiving passageway. The securing section extends from the inner casing toward the mating end and positioned apart from the outer cover housing.
Abstract:
A touch-screen display device includes a display panel, a touch panel, and an adhesive member. The display panel has a peripheral area surrounding an effective area. The touch panel is separated from and faces the display panel. The adhesive member has an adhesive part disposed along the peripheral area and an airing portion disposed along a portion of the peripheral area. The adhesive part adheres the touch panel and the display panel together. The airing portion blocks a particle from entering into a space between the touch panel and the display panel, and inflows and outflows air from the exterior to the space. Therefore, the touch panel and the display panel are coupled by the adhesive member having an airing portion formed thereon, so that a display error may be prevented.
Abstract:
A method for providing a list of contents and a display apparatus applying the same are provided. The method displays images corresponding to a plurality of items included in a specific category of contents. If one of the displayed images is selected, a list of contents included in the item corresponding to the selected image is displayed. Accordingly, a user can easily identify what the item represents by viewing the image corresponding to the item.
Abstract:
A method and an apparatus are provided, which can display a map that includes a position corresponding to position information in the form of a bird's eye view having perspective views and display an image on an upper portion of the map that is displayed in the form of a bird's eye view to correspond to the position information when the image including the position information is displayed on the map.
Abstract:
A liquid crystal display (LCD) including: a display panel; a backlight unit to radiate light to the display panel; a mold frame surrounding the backlight unit and supporting the display panel; a housing to receive the display panel, backlight unit, and mold frame; and a resin unit provided between the display panel and the housing. A receiving groove is formed below the resin unit, by sloped surfaces of the mold frame and side walls of the housing.