METHODS OF ESTIMATING POINT SPREAD FUNCTIONS IN ELECTRON-BEAM LITHOGRAPHY PROCESSES
    231.
    发明申请
    METHODS OF ESTIMATING POINT SPREAD FUNCTIONS IN ELECTRON-BEAM LITHOGRAPHY PROCESSES 审中-公开
    电子束光刻过程估计点扩展函数的方法

    公开(公告)号:US20120314198A1

    公开(公告)日:2012-12-13

    申请号:US13486064

    申请日:2012-06-01

    CPC classification number: H01J37/3174 B82Y10/00 B82Y40/00 H01J2237/31769

    Abstract: In a method of estimating a PSF in the electron-beam lithography process, a linear resist test pattern may be formed on a substrate. A line response function (LRF) may be determined using a cross-sectional profile of the linear resist test pattern. A development rate distribution in a first direction, the first direction may be substantially perpendicular to an extending direction of the linear resist test pattern, may be calculated using the LRF. A line spread function (LSF), which may represent an exposure distribution in the first direction, may be calculated using the development rate distribution. The PSF may be estimated using the LSF.

    Abstract translation: 在电子束光刻工艺中估计PSF的方法中,可以在衬底上形成线性抗蚀剂测试图案。 线路响应函数(LRF)可以使用线性抗蚀剂测试图案的横截面轮廓来确定。 可以使用LRF计算第一方向上的显影速率分布,第一方向可以基本上垂直于线性抗蚀剂测试图案的延伸方向。 可以使用开发速率分布来计算可以表示第一方向上的曝光分布的线扩展函数(LSF)。 可以使用LSF估计PSF。

    Pattern forming method
    232.
    发明授权
    Pattern forming method 有权
    图案形成方法

    公开(公告)号:US08329381B2

    公开(公告)日:2012-12-11

    申请号:US13399090

    申请日:2012-02-17

    Abstract: A pattern forming method includes providing a first mask with a first aperture, forming a first transfer pattern on a resist by irradiating a first electron beam through the first aperture, the first transfer pattern extending in a first direction and having a boundary along a circumference thereof, and the first electron beam having a cross section of a first square when emerging from the first aperture, and forming a second transfer pattern on the resist by irradiating a second electron beam through the first aperture, the second transfer pattern extending in the first direction and overlapping a portion the boundary of the first transfer pattern, and the second electron beam having a cross section of a second square when emerging from the first aperture.

    Abstract translation: 图案形成方法包括:提供具有第一孔的第一掩模,通过照射通过第一孔的第一电子束,在抗蚀剂上形成第一转印图案,第一转印图案沿着第一方向延伸并沿着其圆周具有边界 并且所述第一电子束在从所述第一孔出射时具有第一正方形的横截面,并且通过照射通过所述第一孔的第二电子束在所述抗蚀剂上形成第二转移图案,所述第二转移图案沿所述第一方向延伸 并且当从第一孔径出现时,与第一转印图案的边界的一部分重叠,并且第二电子束具有第二正方形的横截面。

    Lens drive device
    233.
    发明授权
    Lens drive device 有权
    镜头驱动装置

    公开(公告)号:US08310774B2

    公开(公告)日:2012-11-13

    申请号:US12988015

    申请日:2009-04-16

    Applicant: Sang Hee Lee

    Inventor: Sang Hee Lee

    CPC classification number: G03B3/10 G02B7/08 H02K41/0356 H04N5/2254

    Abstract: According to one embodiment, a lens drive device comprises: a housing; a yoke provided on the inside of the housing; a magnet secured to the yoke; a carrier which is located on the inside of the yoke and which is provided with a lens; a coil which is connected to the carrier and which interacts with the magnet; a spring for resiliently supporting the carrier; and a magnetic member connected to the carrier.

    Abstract translation: 根据一个实施例,透镜驱动装置包括:壳体; 设置在壳体内部的轭; 固定到轭的磁体; 位于轭的内侧并设置有透镜的载体; 线圈,其连接到载体并与磁体相互作用; 用于弹性支撑载体的弹簧; 以及连接到所述载体的磁性构件。

    Apparatus and method for mounting pellicle
    234.
    发明授权
    Apparatus and method for mounting pellicle 失效
    用于安装防护薄膜的装置和方法

    公开(公告)号:US08133640B2

    公开(公告)日:2012-03-13

    申请号:US12230473

    申请日:2008-08-29

    CPC classification number: G03F1/64 Y10T156/1744

    Abstract: An apparatus and a method for mounting a pellicle includes a pellicle compression plate formed to apply a plurality of particular pressures to a plurality of points or areas of a region of the reticle where a pellicle frame of the pellicle contacts a reticle.

    Abstract translation: 一种用于安装防护薄膜组件的装置和方法包括形成为对掩模版区域的多个点或区域施加多个特定压力的防护薄片组件压缩板,其中防护薄膜组件的防护薄膜框架接触掩模版。

    Method for Manufacturing Semiconductor Devices
    235.
    发明申请
    Method for Manufacturing Semiconductor Devices 有权
    半导体器件制造方法

    公开(公告)号:US20120047474A1

    公开(公告)日:2012-02-23

    申请号:US13192124

    申请日:2011-07-27

    Abstract: A method of manufacturing semiconductor devices is disclosed. The method includes determining fractured shots that do not overlap each other based on a final pattern; determining overlapping shots that are shots that overlap each other based on the final pattern; generating area difference data by comparing the areas of the overlapping shots and the fractured shots with each other; calculating a radiation influenced pattern based on the area difference data; and correcting the overlapping shots based on the radiation influenced pattern.

    Abstract translation: 公开了制造半导体器件的方法。 该方法包括基于最终模式确定彼此不重叠的断裂射击; 确定基于最终模式重叠的重叠拍摄; 通过比较重叠射击和断裂射击的面积来产生区域差异数据; 基于面积差异数据计算辐射影响模式; 并基于辐射影响模式校正重叠拍摄。

    Shield Cover For Braided Wire Shield
    236.
    发明申请
    Shield Cover For Braided Wire Shield 有权
    编织电线屏蔽罩

    公开(公告)号:US20120028500A1

    公开(公告)日:2012-02-02

    申请号:US13234693

    申请日:2011-09-16

    CPC classification number: H01R13/6593 H01R13/5812 H01R13/6471

    Abstract: A shield cover for a braided wire shield that is capable of securely fixing a braided wire to a shield member through a single pressing operation. The shield cover having a mating end, an inner casing, an outer cover housing. and a securing section. The inner casing positioned at an end opposite the mating end and having a shield receiving passageway. The outer cover housing positioned at the mating end of the shield cover and forming a connector receiving passageway being wider than the shield receiving passageway. The securing section extends from the inner casing toward the mating end and positioned apart from the outer cover housing.

    Abstract translation: 用于编织线屏蔽的屏蔽罩,其能够通过单次按压操作将编织线牢固地固定到屏蔽构件。 屏蔽盖具有配合端,内壳,外盖壳体。 和固定部分。 内壳体位于与配合端相对的端部并且具有屏蔽接收通道。 外盖壳体位于屏蔽盖的配合端并且形成比屏蔽接收通道更宽的连接器接收通道。 固定部分从内壳延伸到配合端并且与外盖壳体分开定位。

    Touch-screen display device and method thereof
    237.
    发明授权
    Touch-screen display device and method thereof 有权
    触摸屏显示装置及其方法

    公开(公告)号:US08106889B2

    公开(公告)日:2012-01-31

    申请号:US11538843

    申请日:2006-10-05

    CPC classification number: G06F3/0412

    Abstract: A touch-screen display device includes a display panel, a touch panel, and an adhesive member. The display panel has a peripheral area surrounding an effective area. The touch panel is separated from and faces the display panel. The adhesive member has an adhesive part disposed along the peripheral area and an airing portion disposed along a portion of the peripheral area. The adhesive part adheres the touch panel and the display panel together. The airing portion blocks a particle from entering into a space between the touch panel and the display panel, and inflows and outflows air from the exterior to the space. Therefore, the touch panel and the display panel are coupled by the adhesive member having an airing portion formed thereon, so that a display error may be prevented.

    Abstract translation: 触摸屏显示装置包括显示面板,触摸面板和粘合构件。 显示面板具有围绕有效区域的周边区域。 触摸屏与显示面板分离并面对显示面板。 粘合部件具有沿着周边区域设置的粘合部分和沿着周边区域的一部分设置的送风部分。 粘合剂部分将触摸面板和显示面板粘合在一起。 通气部分阻止颗粒进入触摸面板和显示面板之间的空间,并将空气从外部流入空间。 因此,触摸面板和显示面板通过其上形成有空气部分的粘合部件联接,从而可以防止显示错误。

    LIQUID CRYSTAL DISPLAY DEVICE
    240.
    发明申请
    LIQUID CRYSTAL DISPLAY DEVICE 有权
    液晶显示装置

    公开(公告)号:US20110187956A1

    公开(公告)日:2011-08-04

    申请号:US12915574

    申请日:2010-10-29

    CPC classification number: G02F1/1333

    Abstract: A liquid crystal display (LCD) including: a display panel; a backlight unit to radiate light to the display panel; a mold frame surrounding the backlight unit and supporting the display panel; a housing to receive the display panel, backlight unit, and mold frame; and a resin unit provided between the display panel and the housing. A receiving groove is formed below the resin unit, by sloped surfaces of the mold frame and side walls of the housing.

    Abstract translation: 一种液晶显示器(LCD),包括:显示面板; 背光单元,用于将光照射到显示面板; 围绕所述背光单元并支撑所述显示面板的模框; 用于接收显示面板,背光单元和模具框架的壳体; 以及设置在显示面板和壳体之间的树脂单元。 在树脂单元的下方,通过模架的倾斜表面和壳体的侧壁形成接收槽。

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