公开(公告)号：US11629947B2

公开(公告)日：2023-04-18

申请号：US16625693

申请日：2018-07-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto ,  Yutaka Kuramoto ,  Katsumi Shibayama ,  Noburo Hosokawa

IPC: G01J3/02 ,  G01B9/02 ,  B81B3/00 ,  G01J3/10 ,  G01J3/14 ,  G01J3/45 ,  G02B7/182 ,  G02B26/08 ,  G02B27/14 ,  G01J3/453

Abstract: In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

公开(公告)号：US11598725B2

公开(公告)日：2023-03-07

申请号：US17734222

申请日：2022-05-02

Applicant: Verily Life Sciences LLC

Inventor： Supriyo Sinha ,  Charles Santori ,  Andrew Conrad

IPC: G01N21/64 ,  G02B21/00 ,  G02B21/16 ,  G02B21/36 ,  G01J3/02 ,  G01J3/10 ,  G01J3/14 ,  G01J3/28 ,  G01J3/44

Abstract: High-throughput hyperspectral imaging systems are provided. According to an aspect of the invention, a system includes an excitation light source; an objective that is configured to image excitation light onto the sample, such that the excitation light causes the sample to emit fluorescence light; a channel separator that is configured to separate the fluorescence light into a plurality of spatially dispersed spectral channels; and a sensor. The excitation light source includes a light source and a plurality of lenslet arrays. Each of the lenslet arrays is configured to receive light from the light source and to generate a pattern of light, and the patterns of light generated by the lenslet arrays are combined to form the excitation light. The objective is configured to simultaneously image each of the patterns of light to form a plurality of parallel lines or an array of circular spots at different depths of the sample.

公开(公告)号：US11579169B2

公开(公告)日：2023-02-14

申请号：US17478900

申请日：2021-09-18

Applicant: National Institute of Metrology, China

Inventor： Zhen-Dong Zhu ,  Si-Tian Gao ,  Wei Li

IPC: G01Q70/10 ,  G01J3/02 ,  G01J3/10 ,  G01J3/14 ,  G01J3/28 ,  G01J3/44 ,  G01J3/12

Abstract: The present disclosure provides a scanning probe, a method and an apparatus for manufacturing the scanning probe. The scanning probe includes a base and a micro-tip disposed on an end of the base, wherein at least a section of the micro-tip comprises a lateral surface with a concavely curved generatrix. In the method, an end of a probe precursor is immersed in a corrosive solution by having a length direction of the probe precursor inclined with a liquid surface of the corrosive solution. The probe precursor is corroded by the corrosive solution while a corrosion current of the corroding is monitored. The probe precursor is moved away from the corrosive solution after a magnitude of the corrosion current has a plunge. The apparatus includes a container containing the corrosive solution, and a driving device configured to move the probe precursor in the container through a fastener.

公开(公告)号：US20220412885A1

公开(公告)日：2022-12-29

申请号：US17781259

申请日：2019-12-27

Applicant: Hitachi High-Tech Corporation

Inventor： Mizuki MOHARA ,  Kei SHIMURA ,  Kenji AIKO

IPC: G01N21/3581 ,  G01J3/14 ,  G01J3/10 ,  G01J3/28 ,  G02F1/355

Abstract: This invention addresses the abovementioned problem, and the purpose of this invention is to provide a far-infrared spectroscopy device that uses an is-TPG method to generate far-infrared light, and is capable of efficiently detecting is-TPG light without a detection optical system being fine-tuned. Even if the far-infrared light incidence angles on an Si prism for detection are the same when far-infrared light having a first frequency is incident on a non-linear optical crystal for detection and when far-infrared light having a second frequency is incident on the non-linear optical crystal for detection, this far-infrared. spectroscopy device adjusts the incidence surface angle of pump light in relation to the non-linear optical crystal for detection such that the angle of the far-infrared light in relation to the pump light within the non-linear optical crystal for detection can be appropriately set for each far-infrared light frequency (see FIG. 1A).

公开(公告)号：US20220236239A1

公开(公告)日：2022-07-28

申请号：US17659136

申请日：2022-04-13

Applicant: Phoseon Technology, Inc.

Inventor： Shiou-jyh Ja

IPC: G01N30/74 ,  G01J3/51 ,  G02F1/37 ,  G01J3/02 ,  G01J3/10 ,  G01J3/14

Abstract: Methods and systems are provided for separating polarized UV light. In one example, a method may include passing polarized source light through a group of at least four prisms to collimate and separate a second-harmonic generation (SHG) beam from a pump beam. The separated SHG beam may then be further passed through a spatial filter to reduce spatial distribution.

公开(公告)号：US20210293624A1

公开(公告)日：2021-09-23

申请号：US17339067

申请日：2021-06-04

Applicant: Rapid Phenotyping Pty Limited

Inventor： Selene Rodd-Routley

IPC: G01J3/453 ,  G01J3/14 ,  G01J9/02

Abstract: Embodiments are disclosed relating to a refractively-scanning interferometer comprising an aperture that receives an incident light beam at a receiving angle, a beam splitter configured to split the incident light beam into a first beam and a second beam, a first and a second reflector arranged to reflect the first beam and second beam, respectively, towards a combining optical element, and a refractive Optical Path Difference (rOPD) assembly interposed between the beam splitter and the first reflector, wherein the rOPD Assembly refracts the first light beam an even number of times with induced phase discrepancy being a vector sum of a first phase discrepancy induced by a first refraction and a second phase discrepancy induced by a second refraction, the rOPD Assembly being configured such that the first phase discrepancy is substantially opposite in direction to the second phase discrepancy, a portion of the first and second phase discrepancies cancelling one another out to decrease magnitude of the phase discrepancy.

公开(公告)号：US20210239527A1

公开(公告)日：2021-08-05

申请号：US17235410

申请日：2021-04-20

Applicant: OREGON HEALTH & SCIENCE UNIVERSITY

Inventor： Joe Gray ,  Summer Dowell ,  Xiaolin Nan ,  Steven Jacques ,  Don Kania

IPC: G01J3/02 ,  G01J3/14 ,  G01N21/64 ,  G01N21/84 ,  G02B21/16 ,  G02B21/18 ,  G02B27/58

Abstract: Devices, systems, reagents, and methods for the performance of multi-spectrum super resolution microscopy are disclosed.

公开(公告)号：US10996109B1

公开(公告)日：2021-05-04

申请号：US16655983

申请日：2019-10-17

Applicant: LightMachinery Inc.

Inventor： Hubert Jean-Ruel ,  Jesse Dean ,  John H. Hunter ,  Ian J. Miller ,  Edward S. Williams

IPC: G01J3/26 ,  G01J3/02 ,  G01J3/18 ,  G02B5/20 ,  G01J3/14

Abstract: Conventional etalon based spectrometers have either a limited range of evaluation wavelengths or require continuous scanning of the etalon. Conventional etalon based spectrometers also have limited contrast between the peak transmission of a frequency on resonance and the minimum transmission of a frequency off resonance. An improved optical spectrometer includes a cylindrical lens configured to converge the input beam of light in only one direction, whereby the input beam of light is focused along a focal line. Accordingly, a first etalon receives the input beam of light, and transmits a series of sub-beams, each sub-beam transmitted at a different angle from the normal, and each sub-beam including multiple frequencies based on the FSR, whereby a secondary dispersive element receives each sub-beam, and disperses each sub-beam into individual frequencies. Ideally, a second etalon receives and transmits the sub-beams with increased contrast, and a second thickness of the second etalon is substantially identical to the first thickness of the first etalon.

公开(公告)号：US20210018440A1

公开(公告)日：2021-01-21

申请号：US17062191

申请日：2020-10-02

Applicant: Verily Life Sciences LLC

Inventor： Supriyo Sinha ,  Charles Santori ,  Andrew Conrad

IPC: G01N21/64 ,  G02B21/00 ,  G01J3/02 ,  G02B21/16 ,  G01J3/10 ,  G02B21/36 ,  G01J3/14 ,  G01J3/28 ,  G01J3/44

Abstract: High-throughput hyperspectral imaging systems are provided. According to an aspect of the invention, a system includes an excitation light source; an objective that is configured to image excitation light onto the sample, such that the excitation light causes the sample to emit fluorescence light; a channel separator that is configured to separate the fluorescence light into a plurality of spatially dispersed spectral channels; and a sensor. The excitation light source includes a light source and a plurality of lenslet arrays. Each of the lenslet arrays is configured to receive light from the light source and to generate a pattern of light, and the patterns of light generated by the lenslet arrays are combined to form the excitation light. The objective is configured to simultaneously image each of the patterns of light to form a plurality of parallel lines or an array of circular spots at different depths of the sample.

公开(公告)号：US20210011302A1

公开(公告)日：2021-01-14

申请号：US17034132

申请日：2020-09-28

Applicant: Cymer, LLC

Inventor： Eric Anders Mason

IPC: G02B27/42 ,  G01J3/06 ,  G01J3/14 ,  G01J3/18 ,  G03F7/20 ,  H01S3/08 ,  G02B26/00 ,  H01L21/027 ,  H01S3/00 ,  H01S3/23

Abstract: A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.