公开(公告)号：US20030132397A1

公开(公告)日：2003-07-17

申请号：US10197485

申请日：2002-07-18

发明人： Seung-Man Nam

IPC分类号： G01J001/00 ,  G01N021/00

CPC分类号： H01L21/67259 ,  H01L21/26586 ,  H01L21/68

摘要： An object alignment inspecting apparatus is used to prevent a channeling phenomenon form occurring in an ion implantation process. The apparatus includes a body having the shape of an object to be processed and a series of graduations extending along its outer peripheral edge, a center post protruding from the center of the body; and an indicator having a rotary member freely rotatably mounted to the post and extending from the post to the graduations. In use, the alignment angle inspecting apparatus is placed on the disc of ion implantation equipment that is used to support the object during the ion implantation process. The relative rotational position of the apparatus on the disc is read. This information is used to determine whether the object, when placed on the disc, will assume a relative rotational position which will not give rise to the channeling phenomenon. Also, the object alignment inspecting apparatus may have a plumb mechanism and graduations so that the slope of the disc can be determined as well. The slope of the disc can be adjusted based on the reading taken form the plumb mechanism so as to also ensure that the channeling phenomenon will not occur.

摘要翻译： 使用对象对准检查装置来防止在离子注入过程中发生的沟道现象形式。 该装置包括具有被加工物的形状的主体和沿着其外周边缘延伸的一系列刻度，从主体的中心突出的中心柱; 以及指示器，其具有可自由旋转地安装到柱上并从柱延伸到刻度的旋转构件。 在使用中，将对准角度检查装置放置在用于在离子注入过程中用于支撑物体的离子注入设备的盘上。 读取盘上装置的相对旋转位置。 该信息用于确定物体在放置在盘上时是否将呈现不会引起通道现象的相对旋转位置。 此外，物体对准检查装置可以具有铅垂机构和刻度，使得也可以确定盘的斜率。 可以根据从铅锤机构读取的读数来调节盘的斜率，以确保不会发生通道现象。

公开(公告)号：US20030127601A1

公开(公告)日：2003-07-10

申请号：US10043734

申请日：2002-01-09

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Chin-Kai Liu ,  Jun-Yean Chiou ,  Pei-Fen Chou ,  Han-Shun Lui

IPC分类号： H01L021/66 ,  G01J001/00 ,  G01T001/24 ,  G01R031/26

CPC分类号： H01L22/34 ,  H01L22/14

摘要： A method of forming a SIMS monitor device for determining a doping profile of a semiconductor device structure including providing a plurality of regularly repeating semiconductor structures including a doping profile to form a monitor device including at least one layer of the regularly repeating semiconductor structures; planarizing the monitor device through a thickness of the regularly repeating semiconductor structures to reveal a target surface overlying the doping profile to form a monitor pattern; and, sputtering the target surface over a sputtering area including the monitor pattern through a thickness thereof while simultaneously detecting and counting over a time interval at least one type of species ejected from the target surface according to a secondary ion mass spectroscopy procedure (SIMS).

摘要翻译： 一种形成用于确定半导体器件结构的掺杂分布的SIMS监视器件的方法，包括提供包括掺杂分布的多个规则重复的半导体结构，以形成包括至少一层规则重复的半导体结构的监测器件; 通过规则重复的半导体结构的厚度来平坦化监视器装置，以显示覆盖掺杂分布的目标表面以形成监视图案; 并且通过其厚度在包括监视器图案的溅射区域上溅射目标表面，同时根据二次离子质谱法（SIMS）从目标表面喷射的至少一种类型的物质同时检测和计数。

公开(公告)号：US20030095247A1

公开(公告)日：2003-05-22

申请号：US10127434

申请日：2002-04-23

申请人： Mitsubishi Denki Kabushiki Kaisha

发明人： Shuji Nakao

IPC分类号： G01J001/00

CPC分类号： G03F7/706 ,  G03F1/44 ,  G03F1/50

摘要： A photomask for aberration measurement of the present invention comprises a substrate that allows exposure light to pass through, a plurality of aperture patterns for measurement that are formed on the top surface of substrate in a plurality of measurement pattern formation regions, a light blocking film that is formed in the measurement pattern formation regions on the rear surface of substrate and that has a rear surface aperture pattern for substantially differentiating the respective incident angles of the exposure light to plurality of aperture patterns for measurement and a plurality of reference patterns that is formed in a single, or in a plurality, of reference pattern formation region(s) on the top surface of substrate, wherein the rear surface of substrate in the reference pattern formation region(s) is formed so that the respective incident angles of the exposure light to plurality of reference patterns becomes the substantially the same.

摘要翻译： 本发明的像差测量用光掩模包括允许曝光光通过的基板，在多个测量图案形成区域中形成在基板的顶表面上的多个用于测量的孔径图案，遮光膜， 形成在基板后表面上的测量图案形成区域中，并且具有用于将曝光光的各个入射角度与多个测量用孔径图案基本上微分的后表面孔径图案，以及多个基准图案形成在 基板顶表面上的单个或多个参考图案形成区域，其中基准图形形成区域中的基板的后表面被形成为使得曝光光的各个入射角 到多个参考图案变得基本相同。

公开(公告)号：US20030047678A1

公开(公告)日：2003-03-13

申请号：US10059290

申请日：2002-01-31

申请人： FUJITSU LIMITED

发明人： Tsutomu Maruyama ,  Sumihiro Uchida ,  Kenichi Murakado ,  Hiroshi Kawase ,  Eiji Nameki ,  Hiroki Shimomae

IPC分类号： G01J001/00

CPC分类号： G01J5/04 ,  G01J5/02 ,  G01J5/025 ,  G01J5/026 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/084 ,  G01J5/0865 ,  G01J5/522 ,  H04N5/2251 ,  H04N5/2254 ,  H04N5/33 ,  H04N5/361 ,  H04N5/365

摘要： An infrared imaging device includes a board which is movable inside the infrared imaging device, plural kinds of magnification lenses, and plural kinds of infrared light radiation parts which radiate infrared lights having respective radiation temperatures, wherein the lenses and the infrared light radiation parts are situated on the board.

公开(公告)号：US20030020027A1

公开(公告)日：2003-01-30

申请号：US09915129

申请日：2001-07-25

申请人： Nordson Corporation

发明人： Nigel Julian Keith Danvers

IPC分类号： G01J001/00

CPC分类号： B05D3/067

摘要： An ultraviolet radiation generating system for treating an ultraviolet-reactive substance on a substrate. The system comprises a chamber having a wall, a plasma lamp mounted within the chamber in a confronting relationship with an interior surface of the wall, and a reflector positioned between the plasma lamp and the wall. When excited by energy from an excitation power source, the plasma lamp is capable of emitting radiation of infrared and ultraviolet wavelengths. The reflector is capable of reflecting ultraviolet radiation from the plasma lamp toward the substrate and transmitting infrared radiation such that the infrared radiation irradiates the interior surface of the wall. The interior surface is at least partially covered with an infrared-absorptive coating capable of absorbing infrared radiation incident thereon so that reflection therefrom is significantly reduced or eliminated. The reflector may be capable of absorbing infrared radiation that is reflected from the interior surface of the wall with optical paths directed toward a rear surface of the reflector.

摘要翻译： 一种用于在基板上处理紫外线反应物质的紫外线辐射发生系统。 该系统包括具有壁的腔室，以与壁的内表面面对的关系安装在腔室内的等离子体灯以及位于等离子体灯和壁之间的反射器。 当激发源自激发源的能量时，等离子体灯能够发射红外和紫外线的辐射。 反射器能够将来自等离子体灯的紫外线辐射反射到基板并透射红外辐射，使得红外线辐射照射到壁的内表面。 内表面至少部分地覆盖有能够吸收入射到其上的红外辐射的红外线吸收涂层，从而显着减少或消除其反射。 反射器可能能够吸收从壁的内表面反射的红外辐射，其中光路指向反射器的后表面。

公开(公告)号：US20020196890A1

公开(公告)日：2002-12-26

申请号：US09961299

申请日：2001-09-25

申请人： Hitachi, Ltd.

发明人： Masashi Shimizu ,  Koichi Maki ,  Keiichiro Shibata ,  Masashi Oda ,  Naoki Kumagai ,  Hidetoshi Kanai

IPC分类号： G21C019/00 ,  G01J001/00

CPC分类号： G21C19/06

摘要： A dry radioactive substance storage facility stores spent fuel assemblies from nuclear power plants. The facility comprises a structure having a storage room storing storage tubes containing spent fuel assemblies. An air inlet duct defining an air inlet passage through which air is supplied into the storage room and an stack defining an air discharge passage through which air from the storage room is discharged outside are connected to the storage room. Radiation shielding members are disposed on the side of the air inlet duct and on the side of the stack, respectively, in the storage room to intercept radiation propagating toward the air inlet passage and the air discharge passage.

摘要翻译： 干放射性物质储存设备储存来自核电厂的乏燃料组件。 该设施包括具有储存室的结构，其存储含有乏燃料组件的储存管。 空气入口管道限定空气入口通道，空气通过该空气入口通道供应到储藏室中，以及一个排出通道的排出通道，通过该空气排出通道将来自储藏室的空气排出到外部的空间。 辐射屏蔽部件分别设置在进气管侧和堆叠侧的储藏室中，以拦截朝向进气通道和排气通道传播的辐射。

公开(公告)号：US20020195569A1

公开(公告)日：2002-12-26

申请号：US09891781

申请日：2001-06-26

发明人： John G. Seidel ,  Francis H. Ruddy ,  Abdul R. Dulloo ,  Thomas V. Congedo

IPC分类号： G01J001/00

CPC分类号： G21C17/108

摘要： A method of monitoring a nuclear reactor includes monitoring the nuclear reactor with a plurality of radiation sensors having spaced apart attachments to a radiation hard cable; providing signal processing equipment at each end of the cable for processing signals from the radiation sensors; establishing signal time intervals based upon differences in time of arrival of signals from the radiation sensors to the signal processing equipment at each end of the cable; producing a plurality of output signals each of which has an amplitude proportional to a difference in time of arrival of a signal to the signal processing equipment at each end of the cable; and rejecting output signals which have a difference in time of arrival outside of the signal time intervals.

摘要翻译： 监测核反应堆的方法包括用具有间隔开的附件到辐射硬电缆的多个辐射传感器监测核反应堆; 在电缆的每一端提供用于处理来自辐射传感器的信号的信号处理设备; 基于来自辐射传感器的信号到电缆每端处的信号处理设备的到达时间的差异建立信号时间间隔; 产生多个输出信号，每个输出信号具有与电缆的每端处的信号到信号处理设备的信号到达时间差成正比的振幅; 以及拒绝在信号时间间隔之外具有到达时间差的输出信号。

公开(公告)号：US20020179848A1

公开(公告)日：2002-12-05

申请号：US09872415

申请日：2001-06-02

发明人： Ilya Feygin

IPC分类号： G01J001/00

CPC分类号： G01N21/6452 ,  B01J2219/00427 ,  B01L3/0268 ,  B01L2300/0829 ,  B01L2400/0415 ,  B01L2400/0439 ,  B22F2998/00 ,  B22F2999/00 ,  C40B60/14 ,  G01N21/11 ,  G01N21/253 ,  G01N25/72 ,  G01N2001/317 ,  G01N2021/6482 ,  G01N2035/1034 ,  B22F3/115 ,  B22F9/08 ,  B22F2202/01

摘要： An apparatus comprising a reagent atomization and delivery system. In one embodiment, a reagent atomization and delivery system includes an atomizer that uniformly and simultaneously delivers a spray of atomized reagent toward a plurality of reagent receiving sites on a specimen plate. The reagent atomization and delivery system is advantageously used in conjunction with an imaging system (e.g., visible-spectrum, infrared-spectrum, etc.). Specifically, once the atomized reagent is dispensed, it triggers chemical/physiological reactions that are then advantageously subjected to imaging analysis (e.g., visible-spectrum imaging, infrared spectrum imaging, etc.).

摘要翻译： 一种包括试剂雾化和递送系统的装置。 在一个实施方案中，试剂雾化和递送系统包括雾化器，其均匀地并且同时地将雾化试剂的喷雾朝向样品板上的多个试剂接收部位传送。 试剂雾化和递送系统有利地与成像系统（例如可见光谱，红外光谱等）结合使用。 具体地说，一旦分配了雾化试剂，就会触发化学/生理反应，然后有利地进行成像分析（例如可见光谱成像，红外光谱成像等）。

公开(公告)号：US20020175299A1

公开(公告)日：2002-11-28

申请号：US10097771

申请日：2002-03-14

申请人： GEN Maintenance Technology Inc.

发明人： Takashi Kanie ,  Nobuo Yamamura

IPC分类号： G01J001/00

CPC分类号： C09D175/16 ,  B05D3/067 ,  C08L2312/00 ,  C09D133/14

摘要： An ultraviolet irradiation apparatus for curing an ultraviolet curable coating agent applied to a substrate, by irradiating an ultraviolet light to the ultraviolet curable coating agent, which includes a low-pressure mercury lamp as a light source. According to the present invention, the problems associated with the use of an ultraviolet irradiation apparatus, whose light source is a high-pressure mercury lamp, can be solved, such as the need of a high voltage power source, degradation of quality, potential hazard to operators and the like. The present invention also provides a method of forming a cured coating film having the same properties as achieved by the use of a high-pressure mercury lamp, such as resistance to stain, adhesion to substrate and the like. This method requires a shorter time for curing of a unit area of the film as compared to the use of a high-pressure mercury lamp (100 V type). Accordingly, the present invention is particularly useful for floor surfaces of gymnasiums, classrooms, department stores, offices, stores, showrooms and the like.

摘要翻译： 一种紫外线照射装置，用于通过向包含低压汞灯作为光源的紫外线固化涂层剂照射紫外线来固化施加到基板上的紫外线固化涂层剂。 根据本发明，可以解决与使用其光源为高压汞灯的紫外线照射装置相关的问题，例如需要高压电源，质量劣化，潜在危害 到运营商等。 本发明还提供一种形成固化涂膜的方法，其具有与通过使用高压汞灯实现的性质相同的性质，例如耐污染性，与基材的粘附性等。 与使用高压汞灯（100V型）相比，该方法需要较短的时间来固化膜的单位面积。 因此，本发明对于体育馆，教室，百货公司，办公室，商店，陈列室等的地面特别有用。

公开(公告)号：US20020167655A1

公开(公告)日：2002-11-14

申请号：US09842146

申请日：2001-04-26

发明人： Melvin H. Friedman ,  John M. Hall

IPC分类号： G01J001/00

CPC分类号： G01S7/4814

摘要： An apparatus and technique for sensor signal to noise ratio enhancement obtained by co-adding multiple identical images on an electro-optical sensor focal plane. An apparatus and technique for multiple laser source projection onto a target by use of laser diode arrays which are collimated and then diverted to simultaneously illuminate a target.

摘要翻译： 一种用于通过在电光传感器焦平面上共同添加多个相同图像而获得的用于传感器信噪比增强的装置和技术。 通过使用被准直然后转向同时照射目标的激光二极管阵列将多个激光源投影到目标上的装置和技术。