公开(公告)号：US20080174322A1

公开(公告)日：2008-07-24

申请号：US11985740

申请日：2007-11-16

Applicant: Kenichi Kawai

Inventor： Kenichi Kawai

IPC: G01R27/08 ,  G11B5/127

CPC classification number: G11B5/3193 ,  B82Y10/00 ,  B82Y25/00 ,  G01R27/08 ,  G01R33/093 ,  G01R33/098 ,  G11B5/3906 ,  G11B5/3909 ,  G11B5/455 ,  H01F10/3254 ,  Y10T29/49036

Abstract: A method of measuring resistance of a tunnel magnetoresistive element having a first conductive layer, a resistive layer and a second conductive layer stacked on a substrate in this order. This magnetoresistive element has a pinned layer on one of the first and second low resistance layers, and a free layer on the other, and a barrier layer sandwiched between the pinned and free layers serving as the resistive layer. The method includes preparing a sample including in the following stacking order on the substrate a first low resistance layer having a low resistance, a thin film constituting the tunnel magnetoresistive element and having a constitution identical to the thin films formed of the first conductive, resistive, and second conductive layers and a second low resistance layer having a low resistance, and applying a resistance measurement probe to a surface of the sample to measure resistance of the thin film.

Abstract translation: 一种按照该顺序测量具有第一导电层，电阻层和第二导电层的隧道磁阻元件的电阻的方法。 该磁阻元件在第一和第二低电阻层中的一个上具有钉扎层，另一个上具有自由层，并且夹在用作电阻层的被钉扎层和自由层之间的阻挡层。 该方法包括以下列叠层顺序制备在基板上具有低电阻的第一低电阻层的薄膜，构成隧道磁阻元件的薄膜，其结构与由第一导电，电阻， 以及具有低电阻的第二导电层和第二低电阻层，并将电阻测量探针施加到样品的表面以测量薄膜的电阻。

公开(公告)号：US20070247753A1

公开(公告)日：2007-10-25

申请号：US11697979

申请日：2007-04-09

Applicant: Toru Takahashi ,  Kiyoshi Kobayashi

Inventor： Toru Takahashi ,  Kiyoshi Kobayashi

IPC: G11B5/147

CPC classification number: G11B5/3193 ,  G11B5/3169 ,  G11B5/3967 ,  Y10T29/49021 ,  Y10T29/49037

Abstract: A thin film magnetic head substrate includes a plurality of head element portions having read elements and write elements in rows. Adjacent head element portions interpose a read monitor element and a write monitor element that are used as element resistance monitors for the read element and the write element when a lapping process is performed to form a medium-facing surface on the head element portion. A common electrode terminal is connected with the read monitor element and the write monitor element. A pair of individual electrode terminals are each connected to the read monitor element and the write monitor element, respectively.

Abstract translation: 薄膜磁头基板包括具有行的读取元件和写入元件的多个头元件部分。 当执行研磨处理以在头元件部分上形成中等的表面时，相邻头元件部分插入用作读元件和写元件的元件电阻监视器的读监视元件和写监视元件。 公共电极端子与读取监视器元件和写入监视器元件连接。 一对单独的电极端子分别连接到读取监视器元件和写入监视器元件。

公开(公告)号：US20040095133A1

公开(公告)日：2004-05-20

申请号：US10298880

申请日：2002-11-18

Applicant: International Business Machines Corporation

Inventor： Vladimir Nikitin ,  Katalin Pentek

IPC: G01R033/12

CPC classification number: G01Q60/54 ,  G01Q10/06 ,  G01R33/0385 ,  G11B5/012 ,  G11B5/3103 ,  G11B5/3166 ,  G11B5/3173 ,  G11B5/3193 ,  G11B5/3909 ,  G11B5/455 ,  G11B2005/001 ,  G11B2005/0013 ,  G11B2005/0016 ,  G11B2005/3996

Abstract: A novel magnetic imaging microscope test system with high spatial (1-10 nm) and temporal (null1 ns) resolution of the magnetic field is disclosed, as well as the system application for characterization of read and write heads for magnetic recording. The test system includes a scanner assembly and a work piece holder for holding a work piece to be tested. The scanner assembly and the work piece holder are positionable relative to each other at very fine resolution during scanning. A probe arm is cantilevered from the scanner assembly to bring a probe head into close proximity to the work piece holder. The probe head is configured scan a work piece in contacting engagement therewith so that a magnetic device on the probe head magnetically interacts with a magnetic field generating or magnetic field sensing device on the work piece. A probe head for use in the test system and a related test method are also disclosed.

Abstract translation: 公开了一种具有高空间（1-10nm）和时间（〜1ns）磁场分辨率的新型磁成像显微镜测试系统，以及用于表征磁记录读写头的系统应用。 测试系统包括扫描器组件和用于保持要测试的工件的工件保持器。 扫描仪组件和工件保持件可以在扫描期间以非常细的分辨率相对于彼此定位。 探头臂从扫描仪组件悬臂，使探针头靠近工件支架。 探针头被配置为扫描与其接触的工件，使得探针头上的磁性装置与工件上的磁场产生或磁场感测装置磁性地相互作用。 还公开了用于测试系统的探头和相关测试方法。

公开(公告)号：US20130135772A1

公开(公告)日：2013-05-30

申请号：US13306887

申请日：2011-11-29

Applicant: Yongchul Ahn ,  Xiaozhong Dang ,  Quang Le ,  Simon H. Liao

Inventor： Yongchul Ahn ,  Xiaozhong Dang ,  Quang Le ,  Simon H. Liao

IPC: G11B5/127 ,  C23F1/04

CPC classification number: G11B5/3909 ,  B82Y10/00 ,  G11B5/3163 ,  G11B5/3193 ,  G11B5/398 ,  G11B2005/3996 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

Abstract: A method for manufacturing a magnetic sensor that includes depositing a plurality of mask layers, then forming a stripe height defining mask over the sensor layers. A first ion milling is performed just sufficiently to remove portions of the free layer that are not protected by the stripe height defining mask, the first ion milling being terminated at the non-magnetic barrier or spacer layer. A dielectric layer is then deposited, preferably by ion beam deposition. A second ion milling is then performed to remove portions of the pinned layer structure that are not protected by the mask, the free layer being protected during the second ion milling by the dielectric layer.

Abstract translation: 一种用于制造磁传感器的方法，包括沉积多个掩模层，然后在传感器层上形成条纹高度限定掩模。 执行第一离子铣削足以除去未被条形高度限定掩模保护的自由层的部分，第一离子铣削在非磁性阻挡层或间隔层处终止。 然后优选通过离子束沉积沉积介电层。 然后执行第二离子铣削以去除未被掩模保护的钉扎层结构的部分，在通过介电层进行第二离子铣削期间保护自由层。

公开(公告)号：US07821744B2

公开(公告)日：2010-10-26

申请号：US11697979

申请日：2007-04-09

Applicant: Toru Takahashi ,  Kiyoshi Kobayashi

Inventor： Toru Takahashi ,  Kiyoshi Kobayashi

IPC: G11B5/29 ,  H04F31/00

CPC classification number: G11B5/3193 ,  G11B5/3169 ,  G11B5/3967 ,  Y10T29/49021 ,  Y10T29/49037

Abstract: A thin film magnetic head substrate includes a plurality of head element portions having read elements and write elements in rows. Adjacent head element portions interpose a read monitor element and a write monitor element that are used as element resistance monitors for the read element and the write element when a lapping process is performed to form a medium-facing surface on the head element portion. A common electrode terminal is connected with the read monitor element and the write monitor element. A pair of individual electrode terminals are each connected to the read monitor element and the write monitor element, respectively.

Abstract translation: 薄膜磁头基板包括具有行的读取元件和写入元件的多个头元件部分。 当执行研磨处理以在头元件部分上形成中等的表面时，相邻头元件部分插入用作读元件和写元件的元件电阻监视器的读监视元件和写监视元件。 公共电极端子与读取监视器元件和写入监视器元件连接。 一对单独的电极端子分别连接到读取监视器元件和写入监视器元件。

公开(公告)号：US20090211081A1

公开(公告)日：2009-08-27

申请号：US12036478

申请日：2008-02-25

Applicant: Thomas D. Boone, JR. ,  Glenn P. Gee ,  Paul A. Goddu ,  John P. Herber ,  Hicham M. Sougrati ,  Huey-Ming Tzeng

Inventor： Thomas D. Boone, JR. ,  Glenn P. Gee ,  Paul A. Goddu ,  John P. Herber ,  Hicham M. Sougrati ,  Huey-Ming Tzeng

IPC: G11B5/127 ,  B24B49/10 ,  B24B49/04

CPC classification number: B24B37/042 ,  B24B49/04 ,  B24B49/10 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/3193 ,  Y10T29/49032 ,  Y10T29/49036 ,  Y10T29/49037 ,  Y10T29/49041 ,  Y10T29/49046

Abstract: Methods of lapping rows of recording heads are described after an air bearing surface (ABS) damascene process is performed. The ABS damascene process uses a selective etching process to form voids in the row of recording heads where conductive material forms a feature in the recording head, such as a wrap around shield. The conductive material is then deposited on the ABS of the row to fill the voids, and the row is lapped. According to methods provided herein, the resistance of one or more lapping guides in the row of recording heads is monitored to determine when the conductive material is removed by the lapping process. When the monitored resistance indicates that the conductive material is removed, the lapping process is stopped. The resistance across one or more lapping guides may also be used to control the lapping process to uniformly lap the conductive material from the ABS.

Abstract translation: 在执行空气轴承表面（ABS）镶嵌工艺之后描述研磨记录头行的方法。 ABS镶嵌工艺使用选择性蚀刻工艺在记录头的行中形成空隙，其中导电材料在记录头中形成特征，例如环绕护罩。 然后将导电材料沉积在该行的ABS上以填充空隙，并且研磨该列。 根据本文提供的方法，监测记录头行中的一个或多个研磨引导件的电阻，以确定通过研磨过程去除导电材料的时间。 当被监测的电阻表示导电材料被去除时，研磨过程停止。 跨越一个或多个研磨引导件的电阻也可用于控制研磨过程以均匀地从ABS吸收导电材料。

公开(公告)号：US20080217287A1

公开(公告)日：2008-09-11

申请号：US11683611

申请日：2007-03-08

Applicant: Hiroo SAWADA ,  Jun SHOUJI ,  Mitsuhiro KITAO ,  Eiji YAMADA

Inventor： Hiroo SAWADA ,  Jun SHOUJI ,  Mitsuhiro KITAO ,  Eiji YAMADA

IPC: B44C1/22

CPC classification number: G11B5/3116 ,  G11B5/3163 ,  G11B5/3193

Abstract: A method of manufacturing a thin-film magnetic head works a part to be worked to a target length by carrying out an etching process on an object to be worked using an etching apparatus. The method carries out a measuring process that measures a length before working of a part to be worked using a measuring apparatus and a calculation process that calculates the processing time of the etching process required to work the part to be worked from the length before working to the target length based on a first calculation result correcting parameter obtained in advance corresponding to the measuring apparatus, a second calculation result correcting parameter obtained in advance corresponding to a position of the part to be worked, a third calculation result correcting parameter obtained in advance corresponding to a value of a current supplied to an electrode of the etching apparatus during the etching process, a fourth calculation result correcting parameter obtained in advance corresponding to a total usage time of the electrode, the length before working, and the target length. The etching process is carried out on the object to be worked for the calculated processing time.

Abstract translation: 制造薄膜磁头的方法通过使用蚀刻装置对待加工物体进行蚀刻处理，将要加工的部分加工成目标长度。 该方法执行测量过程，该测量过程使用测量装置测量待加工零件的工作长度，以及计算过程，该计算过程计算从工作前的工作期间将待加工零件所需的蚀刻工艺的处理时间从 基于与测量装置相对应地预先获得的第一计算结果校正参数的目标长度，对应于待加工部位的位置预先获得的第二计算结果校正参数，预先获得的第三计算结果校正参数 相对于在蚀刻处理期间提供给蚀刻装置的电极的电流的值，对应于电极的总使用时间，加工前的长度和目标长度，预先获得的第四计算结果校正参数。 在计算出的处理时间内对被加工物进行蚀刻处理。

公开(公告)号：US07023204B2

公开(公告)日：2006-04-04

申请号：US10298880

申请日：2002-11-18

Applicant: Vladimir Nikitin ,  Katalin Pentek

Inventor： Vladimir Nikitin ,  Katalin Pentek

IPC: G01R33/12

CPC classification number: G01Q60/54 ,  G01Q10/06 ,  G01R33/0385 ,  G11B5/012 ,  G11B5/3103 ,  G11B5/3166 ,  G11B5/3173 ,  G11B5/3193 ,  G11B5/3909 ,  G11B5/455 ,  G11B2005/001 ,  G11B2005/0013 ,  G11B2005/0016 ,  G11B2005/3996

Abstract: A novel magnetic imaging microscope test system with high spatial (1–10 nm) and temporal (˜1 ns) resolution of the magnetic field is disclosed, as well as the system application for characterization of read and write heads for magnetic recording. The test system includes a scanner assembly and a work piece holder for holding a work piece to be tested. The scanner assembly and the work piece holder are positionable relative to each other at very fine resolution during scanning. A probe arm is cantilevered from the scanner assembly to bring a probe head into close proximity to the work piece holder. The probe head is configured scan a work piece in contacting engagement therewith so that a magnetic device on the probe head magnetically interacts with a magnetic field generating or magnetic field sensing device on the work piece. A probe head for use in the test system and a related test method are also disclosed.

Abstract translation: 公开了一种具有高空间（1-10nm）和时间（〜1ns）磁场分辨率的新型磁成像显微镜测试系统，以及用于表征磁记录读写头的系统应用。 测试系统包括扫描器组件和用于保持要测试的工件的工件保持器。 扫描仪组件和工件保持件可以在扫描期间以非常细的分辨率相对于彼此定位。 探头臂从扫描仪组件悬臂，使探针头靠近工件支架。 探针头被配置为扫描与其接触的工件，使得探针头上的磁性装置与工件上的磁场产生或磁场感测装置磁性地相互作用。 还公开了用于测试系统的探头和相关测试方法。

公开(公告)号：US20040129877A1

公开(公告)日：2004-07-08

申请号：US10345696

申请日：2003-01-16

Inventor： Marian Mankos ,  David A. Soltz ,  Harald F. Hess

IPC: G01N023/225 ,  G11B009/10

CPC classification number: G11B5/455 ,  G01N23/2251 ,  G11B5/012 ,  G11B5/09 ,  G11B5/1272 ,  G11B5/3166 ,  G11B5/3193 ,  G11B27/36 ,  G11B2220/20

Abstract: One embodiment disclosed relates to a method for inspecting or reviewing a magnetized specimen using an automated inspection apparatus. The method includes generating a beam of incident electrons using an electron source, biasing the specimen with respect to the electron source such that the incident electrons decelerate as a surface of the specimen is approached, and illuminating a portion of the specimen at a tilt with the beam of incident electrons. The specimen is moved under the incident beam of electrons using a movable stage of the inspection apparatus. Scattered electrons are detected to form image data of the specimen showing distinct contrast between regions of different magnetization. The movement of the specimen under the beam of incident electrons may be continuous, and data for multiple image pixels may be acquired in parallel using a time delay integrating detector.

Abstract translation: 所公开的一个实施例涉及使用自动检查装置检查或检查磁化试样的方法。 该方法包括使用电子源产生入射电子束，使样本相对于电子源偏置，使得入射的电子随着试样的表面而减速，并且以一定的倾斜度照射一部分试样 入射电子束。 使用检查装置的可移动台，使试样在电子的入射光束下移动。 检测到分散的电子以形成不同磁化强度的区域之间显示不同对比度的样本的图像数据。 在入射电子束下的样本的移动可以是连续的，并且可以使用时间延迟积分检测器并行获取多个图像像素的数据。

公开(公告)号：US06759654B1

公开(公告)日：2004-07-06

申请号：US10345696

申请日：2003-01-16

Applicant: Marian Mankos ,  David A. Soltz ,  Harald F. Hess

Inventor： Marian Mankos ,  David A. Soltz ,  Harald F. Hess

IPC: G01N23225

CPC classification number: G11B5/455 ,  G01N23/2251 ,  G11B5/012 ,  G11B5/09 ,  G11B5/1272 ,  G11B5/3166 ,  G11B5/3193 ,  G11B27/36 ,  G11B2220/20

Abstract: One embodiment disclosed relates to a method for inspecting or reviewing a magnetized specimen using an automated inspection apparatus. The method includes generating a beam of incident electrons using an electron source, biasing the specimen with respect to the electron source such that the incident electrons decelerate as a surface of the specimen is approached, and illuminating a portion of the specimen at a tilt with the beam of incident electrons. The specimen is moved under the incident beam of electrons using a movable stage of the inspection apparatus. Scattered electrons are detected to form image data of the specimen showing distinct contrast between regions of different magnetization. The movement of the specimen under the beam of incident electrons may be continuous, and data for multiple image pixels may be acquired in parallel using a time delay integrating detector.