Five Axis Compensated Rotating Stage
    16.
    发明申请
    Five Axis Compensated Rotating Stage 有权
    五轴补偿旋转台

    公开(公告)号:US20080309276A1

    公开(公告)日:2008-12-18

    申请号:US11764486

    申请日:2007-06-18

    申请人: Ying Xu

    发明人: Ying Xu

    IPC分类号: G05B19/25 G05D3/20

    摘要: A rotating stage assembly performs high precision rotational angle and position error correction by continuous sensing and correcting motor stage assembly errors. It performs these corrections, to adjust for motor environmental and operational errors by sensing and correcting using five sensors placed to measure the adjustments of five corresponding actuators, which adjust the entire motor rotating stage and rotary motor assembly relative to a reference frame.

    摘要翻译: 旋转台组件通过连续检测和校正电机台组件误差来执行高精度旋转角度和位置误差校正。 它执行这些校正,以通过使用五个传感器进行感测和校正来调整电机环境和操作误差,这五个传感器用于测量五个相应致动器的调整,该五个传感器相对于参考系调整整个电机旋转台和旋转电机组件。