MEASURING DEVICE AND MEASURING METHOD
    11.
    发明申请
    MEASURING DEVICE AND MEASURING METHOD 有权
    测量装置和测量方法

    公开(公告)号:US20160061742A1

    公开(公告)日:2016-03-03

    申请号:US14784764

    申请日:2014-04-15

    Abstract: A measuring device (10) and a measurement method measure a concentration of gaseous/aerosol components of a gas mixture. A reaction carrier (14) has a flow channel (42) defining a reaction chamber (46) having a optically detectable reaction material (48), that reacts with a gas mixture component or with a reaction product. The measuring device (12) includes a gas-conveying assembly (2) with a gas-conveying apparatus (28) conveying the gas mixture and a detection assembly (3), which has a lighting apparatus (37) for lighting the reaction chamber (46), an optical sensor (38) for sensing the optically detectable reaction, and an evaluating unit (4) evaluating sensor data and determining a concentration of the component of the gas mixture. The detection assembly (3) senses a speed of a reaction front (6) propagating in the flow direction in the reaction chamber (46) and determines a preliminary concentration from the speed of the reaction front (6).

    Abstract translation: 测量装置(10)和测量方法测量气体混合物的气体/气溶胶组分的浓度。 反应载体(14)具有限定具有光学可检测反应材料(48)的反应室(46)的流动通道(42),其与气体混合物组分或与反应产物反应。 测量装置(12)包括具有输送气体混合物的气体输送装置(28)和检测组件(3)的气体输送组件(2),该检测组件具有用于点亮反应室的照明装置(37) 46),用于感测可光学检测的反应的光学传感器(38),以及评估传感器数据和确定气体混合物的组分浓度的评估单元(4)。 检测组件(3)感测在反应室(46)中沿流动方向传播的反应前沿(6)的速度,并根据反应前沿(6)的速度确定初步浓度。

    Inspection device and inspection method
    12.
    发明授权
    Inspection device and inspection method 失效
    检验装置及检验方法

    公开(公告)号:US08314930B2

    公开(公告)日:2012-11-20

    申请号:US12941432

    申请日:2010-11-08

    Abstract: An inspection device for inspecting defects of an inspection object including a light source for irradiating a luminous flux to the inspection object; an optical system for guiding reflected light from the inspection object; a photoelectric image sensor having a plurality of photoelectric cells arranged, for converting the light guided to detection signals; a detection signal transfer unit having channels each constituted by a signal correction unit, a converter and an image formation unit, and corresponding to each of a plurality of regions formed by dividing the photoelectric image sensor, respectively; and an image synthesis unit for forming an image of the surface of the object by synthesizing partial images outputted; the inspection device inspecting defects of the object by processing the synthesized image; whereby it becomes possible to correct a detection signal from said photoelectric cell close to a predetermined reference target value.

    Abstract translation: 一种检查装置,用于检查包括用于向检查对象照射光通量的光源的检查对象的缺陷; 用于引导来自检查对象的反射光的光学系统; 光电图像传感器,其具有布置用于将被引导的光转换成检测信号的多个光电单元; 检测信号传送单元,其具有各自由信号校正单元,转换器和图像形成单元构成的信道,并且分别对应于通过划分光电图像传感器形成的多个区域中的每一个; 以及图像合成单元,通过合成输出的部分图像来形成对象的表面的图像; 检查装置通过处理合成图像来检查物体的缺陷; 从而可以将来自所述光电单元的检测信号校正为接近预定的基准目标值。

    Contamination-inspecting apparatus and detection circuit
    13.
    发明授权
    Contamination-inspecting apparatus and detection circuit 有权
    污染检查装置和检测电路

    公开(公告)号:US08035071B2

    公开(公告)日:2011-10-11

    申请号:US12116241

    申请日:2008-05-07

    CPC classification number: G01N21/9501 G01N21/94 G01N2201/1241

    Abstract: The detection part has: a subtraction module for calculating correction data from data of detection systems when a reference-voltage generation module applies a reference voltage to the detection systems; a data-holding module for holding the correction data; an addition module for making a correction of detection data; a comparison module for comparing the detection data with switching data; and a selector for switching data of the detection systems including data subjected to the correction according to the output of the comparison module.

    Abstract translation: 检测部具有:减法模块,用于当参考电压产生模块向检测系统施加参考电压时,从检测系统的数据计算校正数据; 用于保持校正数据的数据保持模块; 用于对检测数据进行校正的加法模块; 比较模块,用于将检测数据与切换数据进行比较; 以及选择器,用于根据比较模块的输出来切换包括经过校正的数据的检测系统的数据。

    System and methods for dynamic range extension using variable length integration time sampling
    14.
    发明授权
    System and methods for dynamic range extension using variable length integration time sampling 有权
    使用可变长度积分时间采样的动态范围扩展的系统和方法

    公开(公告)号:US07067791B2

    公开(公告)日:2006-06-27

    申请号:US11059740

    申请日:2005-02-17

    Abstract: A photo-detector generated signal is measured as a sample set comprising a long signal and a short signal. The short signal is scaled to the value of the long signal if the long signal exceeds a dynamic range associated with the photo detector. In one embodiment, the short signal is obtained during a short time interval that is at the approximate middle of a long time interval such that the short and long intervals share a common median time value. Given such symmetry, an approximately linear signal yields a proportionality parameter between the long and short signals thereby allowing the short signal to be scaled. The proportionality parameter facilitates determination of an integration independent component of the photo detector signal that should be removed from the measured long and short signals before scaling. A plurality of sample sets can also be processed such that each sample set overlaps with its neighboring sample set, thereby increasing the effective number of sample sets.

    Abstract translation: 光检测器产生的信号被测量为包括长信号和短信号的样本集。 如果长信号超过与光电检测器相关联的动态范围,则短信号被缩放到长信号的值。 在一个实施例中,在短时间间隔内获得短信号,该短时间间隔在长时间间隔的大致中间处,使得短间隔和长间隔共享公共中值时间值。 给定这种对称性,近似线性的信号在长信号和短信号之间产生比例参数,从而允许短信号被缩放。 比例参数有助于确定光电探测器信号的积分独立分量,该分量在缩放之前应从测量的长信号和短信号中去除。 也可以处理多个样本集,使得每个样本集合与其相邻样本集重叠,从而增加样本集合的有效数量。

    Biopolymeric array scanners capable of automatic scale factor selection for a plurality of different dyes, and methods for making and using the same
    15.
    发明申请
    Biopolymeric array scanners capable of automatic scale factor selection for a plurality of different dyes, and methods for making and using the same 失效
    能够对多种不同染料进行自动比例因子选择的生物聚合物阵列扫描器及其制造和使用方法

    公开(公告)号:US20040121483A1

    公开(公告)日:2004-06-24

    申请号:US10328109

    申请日:2002-12-23

    CPC classification number: G01N21/6452 G01N21/6428 G01N2201/1241

    Abstract: Biopolymeric array scanners that are capable of automatically selecting a dye specific scale factor to employ for a plurality of different dyes, as wells as methods for making and using the same, are provided. In many embodiments, the actual dye specific scale factor automatically selected by the scanner is one that is equal to a preset nullmasternull scale factor, so that the scanner reads any supported dye using the same constant scale factor. The dye, specific scale factor selection is typically made by reference to a collection of nominal scale factors for each member of the plurality of dyes. In using the subject scanners, a user simply inputs the one or more dyes being used in a given array assay, and the scanner automatically reads the array using an automatically chosen dye specific scale factor for the selected dyes. Also provided are methods of obtaining collections of nominal scale factors and computer readable mediums comprising the same. The subject invention finds use in a variety of different applications, including both genomics and proteomics applications.

    Abstract translation: 提供了能够自动选择染料比例因子以用于多种不同染料的生物聚合物阵列扫描仪,作为制备和使用它们的方法的孔。 在许多实施例中,由扫描仪自动选择的实际染料特异性比例因子等于预设的“主”比例因子,使得扫描器使用相同的恒定比例因子读取任何支持的染料。 染料,比例因子选择通常参考多个染料中每个成员的标称比例因子的集合来进行。 在使用主题扫描仪时,用户只需输入在给定阵列测定中使用的一种或多种染料,并且扫描仪使用所选染料的自动选择的染料比例因子自动读取阵列。 还提供了获得标称比例因子的集合的方法以及包括其的计算机可读介质。 本发明可用于各种不同的应用,包括基因组学和蛋白质组学应用。

    System and methods for dynamic range extension using variable length integration time sampling
    16.
    发明申请
    System and methods for dynamic range extension using variable length integration time sampling 有权
    使用可变长度积分时间采样的动态范围扩展的系统和方法

    公开(公告)号:US20040069928A1

    公开(公告)日:2004-04-15

    申请号:US10271477

    申请日:2002-10-15

    Abstract: A photo-detector generated signal is measured as a sample set comprising a long signal and a short signal. The short signal is scaled to the value of the long signal if the long signal exceeds a dynamic range associated with the photo detector. In one embodiment, the short signal is obtained during a short time interval that is at the approximate middle of a long time interval such that the short and long intervals share a common median time value. Given such symmetry, an approximately linear signal yields a proportionality parameter between the long and short signals thereby allowing the short signal to be scaled. The proportionality parameter facilitates determination of an integration independent component of the photo detector signal that should be removed from the measured long and short signals before scaling. A plurality of sample sets can also be processed such that each sample set overlaps with its neighboring sample set, thereby increasing the effective number of sample sets.

    Abstract translation: 光检测器产生的信号被测量为包括长信号和短信号的样本集。 如果长信号超过与光电检测器相关联的动态范围,则短信号被缩放到长信号的值。 在一个实施例中,在短时间间隔内获得短信号,该短时间间隔在长时间间隔的大致中间处,使得短间隔和长间隔共享公共中值时间值。 给定这种对称性,近似线性的信号在长信号和短信号之间产生比例参数,从而允许短信号被缩放。 比例参数有助于确定光电探测器信号的积分独立分量,该分量在缩放之前应从测量的长信号和短信号中去除。 也可以处理多个样本集,使得每个样本集合与其相邻样本集重叠,从而增加样本集合的有效数量。

    INSPECTION DEVICE AND INSPECTION METHOD
    18.
    发明申请
    INSPECTION DEVICE AND INSPECTION METHOD 审中-公开
    检查装置和检查方法

    公开(公告)号:US20130033705A1

    公开(公告)日:2013-02-07

    申请号:US13648124

    申请日:2012-10-09

    Abstract: An inspection device for inspecting defects of an inspection object including a light source for irradiating a luminous flux to the inspection object; an optical system for guiding reflected light from the inspection object; a photoelectric image sensor having a plurality of photoelectric cells arranged, for converting the light guided to detection signals; a detection signal transfer unit having channels each constituted by a signal correction unit, a converter and an image formation unit, and corresponding to each of a plurality of regions formed by dividing the photoelectric image sensor, respectively; and an image synthesis unit for forming an image of the surface of the object by synthesizing partial images outputted; the inspection device inspecting defects of the object by processing the synthesized image; whereby it becomes possible to correct a detection signal from said photoelectric cell close to a predetermined reference target value.

    Abstract translation: 一种检查装置,用于检查包括用于向检查对象照射光通量的光源的检查对象的缺陷; 用于引导来自检查对象的反射光的光学系统; 光电图像传感器,其具有布置用于将被引导的光转换成检测信号的多个光电单元; 检测信号传送单元,其具有各自由信号校正单元,转换器和图像形成单元构成的信道,并且分别对应于通过划分光电图像传感器形成的多个区域中的每一个; 以及图像合成单元,用于通过合成输出的部分图像来形成对象的表面的图像; 检查装置通过处理合成图像来检查物体的缺陷; 从而可以将来自所述光电单元的检测信号校正为接近预定的基准目标值。

    Dynamic Illumination in Optical Inspection Systems
    19.
    发明申请
    Dynamic Illumination in Optical Inspection Systems 有权
    光学检测系统中的动态照明

    公开(公告)号:US20090323052A1

    公开(公告)日:2009-12-31

    申请号:US12145708

    申请日:2008-06-25

    Abstract: An optical inspection system or tool can be configured to inspect objects using dynamic illumination where one or more characteristics of the illumination is/are adjusted to meet the inspection needs of different areas. For example, the illumination intensity may be increased or decreased as the tool inspects areas of memory and periphery features in a wafer die. In some embodiments, the adjustment can be based on data obtained during a pre-inspection setup sequence in which images taken based on illumination with varying characteristics are evaluated for suitability in the remainder of the inspection process.

    Abstract translation: 光学检查系统或工具可以被配置为使用动态照明来检查物体,其中调整照明的一个或多个特征以满足不同区域的检查需要。 例如,当工具检查晶片管芯中的存储器区域和外围特征时,可以增加或减小照明强度。 在一些实施例中,调整可以基于在预检查设置顺序期间获得的数据,其中基于具有变化特性的照明拍摄的图像被评估为在检查过程的其余部分中的适用性。

    INSPECTION DEVICE AND INSPECTION METHOD
    20.
    发明申请
    INSPECTION DEVICE AND INSPECTION METHOD 有权
    检查装置和检查方法

    公开(公告)号:US20080297779A1

    公开(公告)日:2008-12-04

    申请号:US12130488

    申请日:2008-05-30

    Abstract: An inspection device for inspecting defects of an inspection object including a light source for irradiating a luminous flux to the inspection object; an optical system for guiding reflected light from the inspection object; a photoelectric image sensor having a plurality of photoelectric cells arranged, for converting the light guided to detection signals; a detection signal transfer unit having channels each constituted by a signal correction unit, a converter and an image formation unit, and corresponding to each of a plurality of regions formed by dividing the photoelectric image sensor, respectively; and an image synthesis unit for forming an image of the surface of the object by synthesizing partial images outputted; the inspection device inspecting defects of the object by processing the synthesized image; whereby it becomes possible to correct a detection signal from said photoelectric cell close to a predetermined reference target value.

    Abstract translation: 一种检查装置,用于检查包括用于向检查对象照射光通量的光源的检查对象的缺陷; 用于引导来自检查对象的反射光的光学系统; 光电图像传感器,其具有布置用于将被引导的光转换成检测信号的多个光电单元; 检测信号传送单元,其具有各自由信号校正单元,转换器和图像形成单元构成的信道,并且分别对应于通过划分光电图像传感器形成的多个区域中的每一个; 以及图像合成单元,用于通过合成输出的部分图像来形成对象的表面的图像; 检查装置通过处理合成图像来检查物体的缺陷; 从而可以将来自所述光电单元的检测信号校正为接近预定的基准目标值。

Patent Agency Ranking