公开(公告)号：US20130033705A1

公开(公告)日：2013-02-07

申请号：US13648124

申请日：2012-10-09

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Koichi TANIGUCHI ,  Masayuki OCHI ,  Shuichi CHIKAMATSU ,  Shigehisa NOZAWA

IPC: G01N21/956

CPC classification number: G01N21/9501 ,  G01N2021/8887 ,  G01N2021/8896 ,  G01N2201/1241

Abstract: An inspection device for inspecting defects of an inspection object including a light source for irradiating a luminous flux to the inspection object; an optical system for guiding reflected light from the inspection object; a photoelectric image sensor having a plurality of photoelectric cells arranged, for converting the light guided to detection signals; a detection signal transfer unit having channels each constituted by a signal correction unit, a converter and an image formation unit, and corresponding to each of a plurality of regions formed by dividing the photoelectric image sensor, respectively; and an image synthesis unit for forming an image of the surface of the object by synthesizing partial images outputted; the inspection device inspecting defects of the object by processing the synthesized image; whereby it becomes possible to correct a detection signal from said photoelectric cell close to a predetermined reference target value.

Abstract translation: 一种检查装置，用于检查包括用于向检查对象照射光通量的光源的检查对象的缺陷; 用于引导来自检查对象的反射光的光学系统; 光电图像传感器，其具有布置用于将被引导的光转换成检测信号的多个光电单元; 检测信号传送单元，其具有各自由信号校正单元，转换器和图像形成单元构成的信道，并且分别对应于通过划分光电图像传感器形成的多个区域中的每一个; 以及图像合成单元，用于通过合成输出的部分图像来形成对象的表面的图像; 检查装置通过处理合成图像来检查物体的缺陷; 从而可以将来自所述光电单元的检测信号校正为接近预定的基准目标值。