Invention Grant
- Patent Title: Contamination-inspecting apparatus and detection circuit
- Patent Title (中): 污染检查装置和检测电路
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Application No.: US12116241Application Date: 2008-05-07
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Publication No.: US08035071B2Publication Date: 2011-10-11
- Inventor: Masami Makuuchi , Ritsurou Orihashi , Masayoshi Takahashi , Wen Li , Kengo Imagawa , Takahiro Jingu
- Applicant: Masami Makuuchi , Ritsurou Orihashi , Masayoshi Takahashi , Wen Li , Kengo Imagawa , Takahiro Jingu
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2007-124082 20070509
- Main IPC: G01N21/88
- IPC: G01N21/88
Abstract:
The detection part has: a subtraction module for calculating correction data from data of detection systems when a reference-voltage generation module applies a reference voltage to the detection systems; a data-holding module for holding the correction data; an addition module for making a correction of detection data; a comparison module for comparing the detection data with switching data; and a selector for switching data of the detection systems including data subjected to the correction according to the output of the comparison module.
Public/Granted literature
- US20080278717A1 CONTAMINATION-INSPECTING APPARATUS AND DETECTION CIRCUIT Public/Granted day:2008-11-13
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