Abstract:
A conical diffraction grazing incidence spectroscope for performing wavelength scanning by rotating a diffraction grating about an axis set parallel to groves in a grazing surface of the grating.
Abstract:
An optical system and method comprising a diffraction grating which rotates about its surface normal to change the magnitude of the wavelength diffracted to an image location. At grazing incidence, such a rotation is determined to maintain the diffracted image in focus over a wide range in scanned wavelength. Monochromator and spectrometer embodiments include plane and curved surface gratings with both classical and varied-spaced groove patterns, and a variety of illumination geometries. In the simplest case, a grazing incidence monochromator is constructed in which a self-focusing classical spherical grating scans the value in wavelength which is transmitted between fixed slits located on the Rowland circle of the grating. The diffracted image remains in perfect focus over two octaves in wavelength at high efficiency, with both entrance and exit slits fixed in position, and the radiation aperture is constant.
Abstract:
A plane diffraction grating based on surface normal rotation according to the present invention is designed so that the profile of the grooves at a radial area is determined depending on a rotational position of the area about a rotational center defined as a foot of the rotational axis on the surface of the plane diffraction grating. An optical system such as a spectrometer or a monochromator according to the present invention uses such a plane diffraction grating, and requires a special arrangement. The optical system includes: a plane diffraction grating as described above; a mechanism for rotating the plane diffraction grating about the rotational axis; an incidence optical system for casting a converging beam of light on a point of the surface of the plane diffraction grating, where the point is set apart from the rotational center. As the diffraction grating is rotated about the rotational center, the point on which the incident converging beam of light is cast rotates about the rotation center, where the diffracting condition is optimized anywhere around the rotational center or for any scanning wavelength. The surface of the plane diffraction grating can be covered with a multiple-layer coating to improve diffraction efficiency. When such a multiple-layer is coated, the unit thickness of the multiple-layer coating at an area is also determined depending on the rotational position of the area about the rotational center.
Abstract:
A division-of-amplitude photopolarimeter based on conical grating diffraction includes a diffraction grating and at least four photodetectors. An incident light beam is directed at the grating at an oblique incidence angle .PHI. and the grating grooves are inclined at an arbitrary angle .alpha. with respect to the plane of incidence. Each of the photodetectors is positioned to intercept one of the diffracted orders and may be an area array detector if spectropolarimetry use is desired. Polarizing means may be inserted in the paths of one or more of the diffracted orders. A division-of-amplitude photopolarimeter based on planar grating diffraction includes a diffraction grating and at least four photodetectors; the grating is placed in the conventional spectrometer orientation with its grating grooves perpendicular to the plane of incidence. Each of the photodetectors is positioned to intercept one of the diffracted orders, all of which lie in the plane of incidence and may be a linear array detector if spectropolarimetry use is desired. Polarizers are inserted in the paths of at least two of the diffracted orders between the grating and the detectors.
Abstract:
Various vacuum ultraviolet monochromators embodying a rotatable diffraction grating and fixed entrance and exit slits, and working at a predetermined magnification are disclosed which provide improved optical performances by a correction of the odd terms of the wavefront aberration. In one group of instruments the fixed angle 2.theta. between the entrance and the exit beams is 90.degree. and the magnification 1. In another group, grazing incidence instruments are considered, 2.theta. being equal to 166.degree..
Abstract:
Spectrometric gratings formed by holographic techniques are disclosed. The gratings are employed in monochromator mounts of the type in which fixed entrance and exit slits are combined with simple rotation of the grating to scan the spectral range of interest, the angles of incidence and diffraction and the positions of the slits being so related that the mounts are characterized by improved optical performance due to phase balancing and improved focussing properties according both to geometrical and diffraction theories. The parameters involved in the holographic formation of the gratings, specifically the angularities and positions of the point sources forming the holographic image of the grating lines, are specifically related to the characteristics of the mount as to improve further their optical characteristics, particularly with respect to mounts either employing "normal" (i.e., relatively small) angles of incidence with large grating apertures or employing grazing incidence (i.e., for use in the far ultraviolet region).
Abstract:
Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures over a broad range of angles of incidence (AOI), azimuth angles, or both, are presented herein. Spectra including two or more sub-ranges of angles of incidence, azimuth angles, or both, are simultaneously measured over different sensor areas at high throughput. Collected light is linearly dispersed across different photosensitive areas of one or more detectors according to wavelength for each subrange of AOIs, azimuth angles, or both. Each different photosensitive area is arranged on the one or more detectors to perform a separate spectroscopic measurement for each different range of AOIs, azimuth angles, or both. In this manner, a broad range of AOIs, azimuth angles, or both, are detected with high signal to noise ratio, simultaneously. This approach enables high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.
Abstract:
A Sagnac interferometer can include a beamsplitter arranged to receive an input beam of light of a design wavelength, to split the input beam of light into first and second beams that counter propagate around an optical path, and to recombine the first and second beams into an output beam of light. The optical path can include at least one diffraction grating that is arranged to satisfy an effective Littrow geometry.