公开(公告)号：US20180077754A1

公开(公告)日：2018-03-15

申请号：US15703316

申请日：2017-09-13

Applicant: SCREEN HOLDINGS CO., LTD.

Inventor： Yoshio ITO

IPC: H05B3/00 ,  H01L21/67 ,  H05B1/02 ,  G01J5/00 ,  G01J5/04

CPC classification number: H05B3/0047 ,  G01J5/0007 ,  G01J5/041 ,  G01J5/0865 ,  G01J5/602 ,  G01J2005/0055 ,  G01J2005/604 ,  H01L21/67115 ,  H01L21/67248 ,  H01L21/68707 ,  H05B1/0233 ,  H05B3/009

Abstract: An atmosphere of ammonia that absorbs infrared light in a wavelength band overlapping with the measurement wavelength band of a radiation thermometer is formed in a chamber in which a semiconductor wafer is thermally treated. A filter that selectively transmits infrared light having a wavelength not overlapping with the absorption wavelength band of ammonia is installed between an optical lens system and a detector of the radiation thermometer to avoid influence of the infrared light absorption by ammonia. A conversion table corresponding to the installed filter is selected from a plurality of conversion tables representing a correlation between energy of infrared light incident on the radiation thermometer and temperature of a black body, and is used at the radiation thermometer. Accordingly, the temperature of the semiconductor wafer can be accurately measured in the atmosphere of ammonia.

公开(公告)号：US09816863B1

公开(公告)日：2017-11-14

申请号：US14497996

申请日：2014-09-26

Applicant: Exelis Inc.

Inventor： Christopher E Lietzke ,  Ronald J Glumb

IPC: G01W1/10 ,  G01J5/00 ,  G01J5/50 ,  G01B11/06 ,  G01C11/06

CPC classification number: G01J5/007 ,  G01B11/0608 ,  G01C11/06 ,  G01J5/505 ,  G01J5/602 ,  G01J2005/0077 ,  G01J2005/0085 ,  G01J2005/604 ,  G01W1/00 ,  G01W1/10

Abstract: Techniques are provided for an image processing device to receive image information comprising image data for a plurality of mid-wave infrared region (MWIR) channels, where the image data is obtained during a first imaging period and during a second imaging period temporally different from the first imaging period. A plurality of sets of atmospheric wind vectors are calculated using differences between image data obtained during the first imaging period and the image data obtained during the second imaging period for corresponding sets of MWIR channels. An altitude is assigned to the plurality of atmospheric wind vectors in each set based on a brightness temperature of each wind vector and a pre-computed atmospheric temperature profile to generate a set of two-dimensional wind fields comprising one two-dimensional wind field for each set of MWIR channels.

公开(公告)号：US09404804B1

公开(公告)日：2016-08-02

申请号：US14677419

申请日：2015-04-02

Applicant: Palo Alto Research Center Incorporated

Inventor： Victor Liu ,  Bernard D. Casse ,  Julie A. Bert ,  Armin R. Volkel

IPC: H01L25/00 ,  G01J5/00 ,  H04N5/33 ,  G01J5/24 ,  G01J5/08 ,  G01J5/02 ,  G01J5/20

CPC classification number: G01J5/0014 ,  G01J5/02 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/046 ,  G01J5/0809 ,  G01J5/0853 ,  G01J5/20 ,  G01J5/24 ,  G01J5/602 ,  G01J2005/0077 ,  G01J2005/202 ,  G01J2005/604 ,  H04N5/33

Abstract: A thermal sensor includes an array of pixels, each having a membrane mounted on legs over a reflector, forming a Fabry-Pérot cavity. Each membrane includes an infrared (IR) absorbing material that defines multiple spaced-apart openings separated by micron-level distances that decrease thermal capacity and increase IR absorption of the membrane. Regular pitch distances between adjacent openings provides narrowband IR absorption, with pitch distances below 7.1 μm facilitating the detection of IR radiation wavelengths below 7.5 μm. Multispectral thermal imaging is achieved by arranging the pixels in repeated groups (superpixels), where each superpixel detects the same set of IR radiation wavelengths. Thermal imaging devices include thermal sensors, IR lenses and device control circuitry arranged in a camera-like manner. A methane leak detection system utilizes two multispectral imaging devices positioned to image a wellhead from two directions, and a system controller that generates spatial and spectral information describing methane plumes using the image data.

Abstract translation: 热传感器包括像素阵列，每个像素具有安装在反射器上的腿上的膜，形成法布里 - 珀罗腔。 每个膜包括红外（IR）吸收材料，其限定由微米级距离分开的多个间隔开的开口，其降低热容量并增加膜的IR吸收。 相邻开口之间的常规间距距离提供窄带IR吸收，间距距离低于7.1μm，有助于检测低于7.5μm的IR辐射波长。 通过将重复组（超像素）中的像素排列成多个光谱热成像，其中每个超像素检测相同的一组IR辐射波长。 热成像设备包括以相机方式布置的热传感器，IR透镜和设备控制电路。 甲烷泄漏检测系统利用定位成从两个方向对井口进行成像的两个多光谱成像装置，以及使用该图像数据产生描述甲烷羽流的空间和光谱信息的系统控制器。

公开(公告)号：US4952811A

公开(公告)日：1990-08-28

申请号：US369403

申请日：1989-06-21

Applicant: C. Thomas Elliott

Inventor： C. Thomas Elliott

IPC: G01J5/28 ,  G01J5/60 ,  H01L31/0296 ,  H01L31/103 ,  H01L33/00 ,  H01L33/28 ,  H01L33/34 ,  H01S5/06

CPC classification number: H01L33/34 ,  G01J5/28 ,  H01L31/02966 ,  H01L31/1032 ,  H01L33/0008 ,  H01L33/28 ,  H01S5/0607 ,  G01J2005/283 ,  G01J2005/604

Abstract: A tunable infrared detector employing a vanishing band gap semimetal material which is provided with an induced band gap by a magnetic field to allow intrinsic semiconductor type infrared detection capabilities. The semimetal material may thus operate as a semiconductor type detector with a wavelength sensitivity corresponding to the induced band gap in a preferred embodiment of a diode structure. Preferred semimetal materials include Hg.sub.1-x Cd.sub.x Te, x

Abstract translation: 使用消失带隙半金属材料的可调谐红外检测器，其通过磁场提供感应带隙以允许本征半导体型红外检测能力。 因此，在二极管结构的优选实施例中，半金属材料可以作为具有对应于感应带隙的波长灵敏度的半导体型检测器来操作。 优选的半金属材料包括Hg1-xCdxTe，x <0.15，HgCdSe，BiSb，α-Sn，HgMgTe，HgMnTe，HgZnTe，HgMnSe，HgMgSe和HgZnSe。 磁场在半金属材料中产生与磁场强度成比例的带隙，允许可调谐的检测截止波长。 对于5至10特斯拉的施加磁场，对于x约0.15的Hg1-xCdxTe合金，波长检测截止值将在20-50微米的范围内。 也可以采用类似的方法通过使用磁场来诱导期望的带隙然后以发光二极管或半导体激光器类型的结构来操作结构来产生期望波长的红外能量。

公开(公告)号：US4779977A

公开(公告)日：1988-10-25

申请号：US798211

申请日：1985-11-14

Applicant: John D. Rowland ,  Ernesto Suarez-Gonzalez

Inventor： John D. Rowland ,  Ernesto Suarez-Gonzalez

IPC: G01J5/02 ,  G01J3/12 ,  G01J5/08 ,  G01J5/60 ,  G01J5/18

CPC classification number: G01J5/08 ,  G01J5/0821 ,  G01J5/60 ,  G01J2003/1226 ,  G01J2005/604

Abstract: A high optical efficiency dual spectra pyrometer for measuring the temperature of a target includes an optical guide for collecting and guiding a target optical beam to a detection module which comprises an interference filter and photodetectors adjustably positioned to provide efficient coupling of the target optical beam thereto. The pyrometer additionally includes a signal processor which receives the signals from the photodetectors, as well as signals indicative of an estimated fireball equivalent black body temperature and the spectral width difference between the two detector signals, and provides a compensated temperature signal.

Abstract translation: 用于测量目标温度的高光学效率双光谱高温计包括用于收集并将目标光束引导到检测模块的光导，所述检测模块包括干涉滤光器和可调整地定位的光电检测器，以提供目标光束与其的有效耦合。 高温计还包括接收来自光电检测器的信号的信号处理器，以及指示估计的火球等效黑体温度和两个检测器信号之间的光谱宽度差的信号，并提供经补偿的温度信号。