公开(公告)号：US08895226B2

公开(公告)日：2014-11-25

申请号：US14223540

申请日：2014-03-24

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyun-Woo Kim ,  Hai-Sub Na ,  Chil-Hee Chung ,  Han-Ku Cho

IPC: G03F7/20 ,  G03F7/038 ,  G03F7/095 ,  G03F7/11 ,  G02B5/20 ,  G02B5/22

CPC classification number: G03F7/0388 ,  G02B5/208 ,  G02B5/22 ,  G03F7/095 ,  G03F7/11

Abstract: Provided are a coating composition for deep ultraviolet (DUV) filtering during an extreme ultraviolet (EUV) exposure, the coating composition including about 100 parts by weight of a solvent including a first solvent (the first solvent being an alcoholic solvent); and about 0.05 parts by weight to about 5 parts by weight of a coating polymer having a degree of absorption of about 50%/μm or greater with respect to 193-nm incident light.

Abstract translation: 提供了一种在极紫外（EUV）暴露期间用于深紫外（DUV）过滤的涂料组合物，该涂料组合物包括约100重量份的包含第一溶剂（第一溶剂为醇溶剂）的溶剂; 和约0.05重量份至约5重量份的相对于193纳米入射光的吸收度为约50％/μm或更大的涂层聚合物。

公开(公告)号：US11019385B2

公开(公告)日：2021-05-25

申请号：US15364567

申请日：2016-11-30

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyun-Woo Kim ,  Pirooz Chubak

IPC: H04N21/2668 ,  H04N21/8352 ,  G06Q30/02 ,  H04L12/26 ,  H04L29/08 ,  H04N21/234 ,  H04N21/25 ,  H04N21/258 ,  H04N21/2665 ,  H04N21/426 ,  H04N21/61 ,  H04N21/81 ,  H04N21/218 ,  H04N21/233

Abstract: A server for providing selected content to networked display devices is presented. The server includes a memory configured to store instructions. At least one processor is configured to execute the instructions to: receive television programming data and automatic content recognition data from a networked display device, and selectively link the networked display device to a viewing group based on the television programming data and automatic content recognition data. An advertisement engine is configured to provide an advertisement to the networked display device. The advertisement is selected based on the viewing group linked to the networked display device.

公开(公告)号：US09772555B2

公开(公告)日：2017-09-26

申请号：US15047659

申请日：2016-02-19

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Cheol-Hong Park ,  Sang-Yoon Woo ,  Cha-Won Koh ,  Hyun-Woo Kim ,  Sang-Min Park

IPC: G03F7/11 ,  G03F7/40 ,  G03F7/20 ,  H01L21/027 ,  H01L21/033 ,  G03F7/32 ,  H01L21/308 ,  H01L21/311 ,  H01L21/3213 ,  H01L21/768 ,  H01L27/108

CPC classification number: G03F7/20 ,  G03F7/091 ,  G03F7/11 ,  G03F7/32 ,  H01L21/0276 ,  H01L21/0335 ,  H01L21/0337 ,  H01L21/0338 ,  H01L21/3081 ,  H01L21/31144 ,  H01L21/32139 ,  H01L21/76802 ,  H01L27/10876

Abstract: In a method of forming a pattern, a lower coating layer and a photoresist layer are sequentially formed on an object layer. An exposure process may be performed such that the photoresist layer is divided into an exposed portion and a non-exposed portion. A portion of the lower coating layer overlapping or contacting the exposed portion is at least partially transformed into a polarity conversion portion that has a polarity substantially identical to that of the exposed portion. The non-exposed portion of the photoresist layer is selectively removed.

公开(公告)号：US09568821B2

公开(公告)日：2017-02-14

申请号：US14622306

申请日：2015-02-13

Applicant: Shin-Etsu Chemical Co., Ltd. ,  Samsung Electronics Co., Ltd.

Inventor： Jun Hatakeyama ,  Hyun-Woo Kim

IPC: G03F7/20 ,  G03F7/004 ,  G03F7/095 ,  G03F7/32

CPC classification number: G03F7/0046 ,  G03F7/095 ,  G03F7/2002 ,  G03F7/325

Abstract: There is provided a patterning process that forms a negative pattern by developing using an organic solvent, using a resist top coat composition that not only reduces the effect from the environment on a resist film and effectively blocks OOB light, but also reduces the film loss of a resist pattern and the bridging between patterns, enhances the sensitivity of the resist film, and suppresses the emission of an outgas from the resist film. The patterning process includes the steps of forming a resist top coat on a photoresist film formed on a substrate, with the resist top coat using as a top base material a polymer having a repeating unit p of styrene having a 1,1,1,3,3,3-hexafluoro-2-propanol group, in which m is 1 or 2, and p is 0

Abstract translation: 提供通过使用有机溶剂显影形成负图案的图案化工艺，使用抗蚀剂面漆组合物，其不仅降低了抗蚀剂膜上的环境的影响并且有效地阻挡OOB光，而且还降低了膜损失 抗蚀剂图案和图案之间的桥接，增强了抗蚀剂膜的灵敏度，并且抑制了从抗蚀剂膜发出的气体。 图案化工艺包括以下步骤：在形成在基底上的光致抗蚀剂膜上形成抗蚀剂外涂层，其中抗蚀剂外涂层使用作为顶部基材的具有苯乙烯重复单元p的聚合物，其具有1,1,1,3 3,3-六氟-2-丙醇基，其中m为1或2，p为0

公开(公告)号：US09274428B2

公开(公告)日：2016-03-01

申请号：US14444169

申请日：2014-07-28

Applicant: Shin-Etsu Chemical Co., Ltd. ,  SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jun Hatakeyama ,  Hyun-Woo Kim

IPC: G03F7/11 ,  G03F7/039 ,  G03F7/32 ,  G03F7/30 ,  G03F7/20 ,  G03F7/09 ,  C08F214/18 ,  C08F232/08 ,  C08F212/08 ,  C08F12/20 ,  C08F12/24 ,  C09D125/18

CPC classification number: G03F7/11 ,  C08F12/20 ,  C08F12/24 ,  C08F212/08 ,  C08F214/182 ,  C08F214/186 ,  C08F232/08 ,  C09D125/18 ,  G03F7/0392 ,  G03F7/09 ,  G03F7/091 ,  G03F7/2037 ,  G03F7/2041 ,  G03F7/30 ,  G03F7/322 ,  C08F212/14

Abstract: A resist top coat composition includes a polymer including a base resin having a repeating unit p of styrene having a 1,1,1,3,3,3-hexafluoro-2-propanol group and a repeating unit q of acenaphthylene having chemical formula 1. R is hydrogen, hydroxyl. R1 is hydrogen, hydroxyl, linear or branched C1-C10-alkyl, cycloalkyl, acyloxy, alkoxycarbonyl, carboxyl, —OC(═O)R2. R2 is linear or branched C1-C10-alkyl, cycloalkyl or fluorinated alkyl. m is 1 or 2. p and q are positive numbers satisfying the expressions 0

Abstract translation: 抗蚀剂面漆组合物包括含有具有1,1,1,3,3,3-六氟-2-丙醇基的苯乙烯的重复单元p和具有化学式1的苊的重复单元q的基础树脂的聚合物 R是氢，羟基。 R 1是氢，羟基，直链或支链C 1 -C 10 - 烷基，环烷基，酰氧基，烷氧基羰基，羧基，-OC（= O）R 2。 R2是直链或支链C1-C10-烷基，环烷基或氟化烷基。 m为1或2. p和q为满足表达式0

公开(公告)号：US11515391B2

公开(公告)日：2022-11-29

申请号：US17070221

申请日：2020-10-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Krishna Kumar Bhuwalka ,  Seong-Je Kim ,  Jong-Chol Kim ,  Hyun-Woo Kim

IPC: H01L29/06 ,  H01L29/66 ,  H01L29/423 ,  B82Y10/00 ,  H01L29/775 ,  H01L29/10 ,  H01L29/786 ,  H01L21/8234

Abstract: A semiconductor device includes a plurality of channels, source/drain layers, and a gate structure. The channels are sequentially stacked on a substrate and are spaced apart from each other in a first direction perpendicular to a top surface of the substrate. The source/drain layers are connected to the channels and are at opposite sides of the channels in a second direction parallel to the top surface of the substrate. The gate structure encloses the channels. The channels have different lengths in the second direction and different thicknesses in the first direction.

公开(公告)号：US10404639B2

公开(公告)日：2019-09-03

申请号：US15435730

申请日：2017-02-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Tae-Yong Moon ,  Tae-Jun Kim ,  Hyun-Woo Kim ,  Young-Seung Seo ,  Yeon-Ju Song ,  Hye-Won Oh ,  Sang-Jin Lee ,  Seong-Joon Cho ,  Hyun-Bum Ju ,  Jun-Kyu Park ,  In-Wook Song ,  Eun-Yeung Lee

IPC: H04L12/58 ,  H04L12/18 ,  G06Q10/10 ,  H04L29/06 ,  H04L29/08

Abstract: According to various example embodiments, a method for sharing a content group of an electronic device may include transmitting, to a server, information for a request to share a content group; receiving an input selecting at least one contact with which the content group is to be shared; transmitting information on the at least one contact to the server; and changing the content group to a shared state when information on the acceptance of sharing the content group from at least one external electronic device corresponding to the at least one contact is received from the server, wherein the content group is capable of being updated by the electronic device or the at least one external electronic device.

公开(公告)号：US20170208353A1

公开(公告)日：2017-07-20

申请号：US15364567

申请日：2016-11-30

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyun-Woo Kim ,  Pirooz Chubak

IPC: H04N21/2668 ,  H04L29/08 ,  G06Q30/02 ,  H04N21/81 ,  H04N21/234 ,  H04N21/426 ,  H04N21/258 ,  H04N21/61 ,  H04N21/2665 ,  H04N21/218 ,  H04N21/233 ,  H04L12/26 ,  H04N21/25

Abstract: A server for providing selected content to networked display devices is presented. The server includes a memory configured to store instructions. At least one processor is configured to execute the instructions to: receive television programming data and automatic content recognition data from a networked display device, and selectively link the networked display device to a viewing group based on the television programming data and automatic content recognition data. An advertisement engine is configured to provide an advertisement to the networked display device. The advertisement is selected based on the viewing group linked to the networked display device.

公开(公告)号：US09482953B2

公开(公告)日：2016-11-01

申请号：US14177278

申请日：2014-02-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Cha-Won Koh ,  Jeon-Il Lee ,  Su-Min Kim ,  Hyun-Woo Kim ,  Jin Park

IPC: G03B27/68 ,  G03F7/20 ,  G03F7/00

CPC classification number: G03F7/2022 ,  G03F7/0002

Abstract: A lithography apparatus and a method of using the same, the apparatus including a stage for accommodating a substrate that has a photoresist film thereon; a main unit on the stage, the main unit being configured to irradiate a projection beam to the photoresist film; and an electric field unit adjacent to the stage, the electric field unit being configured to apply an electric field to the photoresist film, wherein the electric field unit is configured to be turned on at a same time as or before irradiation of the projection beam, and is configured to be turned off at a same time as or after termination of the projection beam.

Abstract translation: 一种光刻设备及其使用方法，该设备包括：用于容纳其上具有光致抗蚀剂膜的基板的台; 主体单元，被配置为向光致抗蚀剂膜照射投影光束; 以及与所述载物台相邻的电场单元，所述电场单元被配置为向所述光致抗蚀剂膜施加电场，其中所述电场单元被配置为在所述投影束的照射之前或之前被接通， 并且被配置为在投影光束的终止之后的同时或者在其终止之后被关闭。

公开(公告)号：US20140052746A1

公开(公告)日：2014-02-20

申请号：US13966078

申请日：2013-08-13

Applicant: Samsung Electronics Co., Ltd

Inventor： Hyun-Woo Kim ,  Heon-Yong Lee

IPC: G06F17/30

CPC classification number: G06F16/43 ,  G06F3/0485 ,  G11B27/105 ,  G11B27/34

Abstract: An electronic device implements a method of searching for a location of a multimedia application of an electronic device. The method includes displaying a location search bar to search for a playback location of the multiple application, detecting a drag in a direction orthogonal to the location search bar, and displaying the location search bar corresponding to a duration in which the drag is detected in a full duration of the location search bar by changing a shape of the location search bar.

Abstract translation: 电子设备实现了搜索电子设备的多媒体应用的位置的方法。 所述方法包括显示位置搜索条以搜索所述多个应用的​​播放位置，检测与所述位置搜索条正交的方向上的拖动，以及显示与在所述多个应用中检测到所述拖动的持续时间相对应的位置搜索条 通过更改位置搜索栏的形状，定位搜索栏的完整持续时间。