公开(公告)号：US09650710B2

公开(公告)日：2017-05-16

申请号：US14297105

申请日：2014-06-05

Applicant: Samsung Display Co., Ltd.

Inventor： Seung-Ho Choi ,  Yong-Suk Lee

IPC: C23C14/35 ,  H01J37/34 ,  C23C14/54 ,  H01L51/00 ,  C23C14/00 ,  H01J37/32

CPC classification number: C23C14/545 ,  C23C14/0042 ,  C23C14/544 ,  H01J37/32935 ,  H01J37/3405 ,  H01J37/347 ,  H01L51/0008

Abstract: One or more embodiments of the present invention relate to a sputtering device and a sputtering method. By using the sputtering device according to the present embodiment, characteristics of a deposition layer formed at the organic light emitting display apparatus may be improved, thereby improving electric characteristics and image quality of the organic light emitting display apparatus may be improved.

公开(公告)号：US20170016109A1

公开(公告)日：2017-01-19

申请号：US15277977

申请日：2016-09-27

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Yong-Suk Lee ,  Myung-Soo Huh ,  Cheol-Rae Jo ,  Sang-Hyuk Hong ,  Jeong-Ho Yi ,  Suk-Won Jung ,  Sun-Ho Kim ,  Mi-Ra An

IPC: C23C14/12 ,  C23C14/58 ,  C23C14/24 ,  C23C14/22

CPC classification number: C23C14/12 ,  C23C14/228 ,  C23C14/246 ,  C23C14/58 ,  C23C14/584

Abstract: A thin film depositing apparatus and a thin film deposition method using the apparatus. The thin film depositing apparatus includes a chamber configured to have a substrate mounted therein, an ejection unit configured to move in the chamber and to eject a deposition vapor to the substrate, and a source supply unit configured to supply a source of the deposition vapor to the ejection unit.

Abstract translation: 一种薄膜沉积设备和使用该设备的薄膜沉积方法。 该薄膜沉积设备包括：一个被配置为具有安装在其中的基板的腔室;喷射单元，被配置为在腔室中移动并将沉积蒸气喷射到基底;以及源供应单元，其构造成将沉积蒸气源供应到 喷射单元。

公开(公告)号：US20150200383A1

公开(公告)日：2015-07-16

申请号：US14297105

申请日：2014-06-05

Applicant: Samsung Display Co., Ltd.

Inventor： Seung-Ho Choi ,  Yong-Suk Lee

IPC: H01L51/56 ,  C23C14/54 ,  H01L51/00

CPC classification number: C23C14/545 ,  C23C14/0042 ,  C23C14/544 ,  H01J37/32935 ,  H01J37/3405 ,  H01J37/347 ,  H01L51/0008

Abstract: One or more embodiments of the present invention relate to a sputtering device and a sputtering method. By using the sputtering device according to the present embodiment, characteristics of a deposition layer formed at the organic light emitting display apparatus may be improved, thereby improving electric characteristics and image quality of the organic light emitting display apparatus may be improved.

Abstract translation: 本发明的一个或多个实施例涉及溅射装置和溅射方法。 通过使用根据本实施例的溅射装置，可以提高在有机发光显示装置上形成的沉积层的特性，从而可以提高有机发光显示装置的电特性和图像质量。

公开(公告)号：US20140302624A1

公开(公告)日：2014-10-09

申请号：US14012916

申请日：2013-08-28

Applicant: Samsung Display Co., ltd.

Inventor： Sun-Ho Kim ,  Myung-Soo Huh ,  Jeong-Ho Yi ,  Cheol-Rae Jo ,  Hyun-Woo Joo ,  Yong-Suk Lee

IPC: H01L21/56 ,  H01L51/00

CPC classification number: H01L21/56 ,  C23C14/24 ,  C23C14/564 ,  C23C16/4412 ,  H01L51/0008

Abstract: A deposition apparatus configured to perform a deposition process on a substrate, the deposition apparatus including a chamber having an exhaust opening in a surface, a deposition source in the chamber configured to eject one or more deposition materials toward the substrate, a cooling plate corresponding to an inner surface of the chamber, at which the exhaust opening is formed, a refrigerator contacting the cooling plate, and a pump coupled to the exhaust opening.

Abstract translation: 一种沉积装置，被配置为在基板上进行沉积处理，所述沉积装置包括：具有在表面中具有排气开口的室，所述室中的沉积源构造成朝向所述基板排出一个或多个沉积材料;对应于 形成有排气口的室的内表面，与冷却板接触的冰箱以及连接到排气口的泵。