公开(公告)号：US11961851B2

公开(公告)日：2024-04-16

申请号：US17672574

申请日：2022-02-15

Applicant: Samsung Display Co., Ltd.

Inventor： Dong-min Lee ,  Ji-Hwan Kim ,  Jongoh Seo ,  Byung Soo So ,  Dong-Sung Lee ,  Jonghoon Choi

IPC: G02B27/14 ,  B23K26/53 ,  G02B27/12 ,  H01L21/02 ,  H01L27/12 ,  H01S3/00

CPC classification number: H01L27/1281 ,  B23K26/53 ,  G02B27/126 ,  H01L21/02675 ,  H01S3/005 ,  H01S3/0071 ,  H01L21/02532

Abstract: A laser apparatus includes a laser generator configured to generate a first laser beam proceeding along a first direction, and an inversion module configured to convert the first laser beam to a second laser beam proceeding along the first direction, the inversion module including a splitter configured to form a reflected laser beam by partially reflecting the first laser beam, and a transmitted laser beam by partially transmitting the first laser beam, and a prism configured to reflect the reflected laser beam.

公开(公告)号：US11407061B2

公开(公告)日：2022-08-09

申请号：US16698842

申请日：2019-11-27

Applicant: Samsung Display Co., Ltd.

Inventor： Dong-Sung Lee ,  Dong-min Lee ,  Jongoh Seo ,  Byung Soo So

IPC: B23K26/04 ,  B23K26/0622 ,  H01L21/02 ,  H01L21/20 ,  B23K101/40

Abstract: A laser crystallizing apparatus may include a laser light source, an optical system, and an optical module. The laser light source may generate a laser beam. The optical system may convert the laser beam into a line laser beam. The optical module may disperse energy of the line laser beam in a first direction for generating a dispersed line laser beam. The first direction may be perpendicular to a lengthwise direction of the optical module.

公开(公告)号：US11282872B2

公开(公告)日：2022-03-22

申请号：US16808157

申请日：2020-03-03

Applicant: Samsung Display Co., Ltd.

Inventor： Dong-Min Lee ,  Ji-Hwan Kim ,  Jongoh Seo ,  Byung Soo So ,  Dong-Sung Lee ,  Jonghoon Choi

IPC: G02B27/14 ,  H01L27/12 ,  H01L21/02 ,  B23K26/53 ,  H01S3/00 ,  G02B27/12

Abstract: A laser apparatus includes a laser generator configured to generate a first laser beam proceeding along a first direction, and an inversion module configured to convert the first laser beam to a second laser beam proceeding along the first direction, the inversion module including a splitter configured to form a reflected laser beam by partially reflecting the first laser beam, and a transmitted laser beam by partially transmitting the first laser beam, and a prism configured to reflect the reflected laser beam.

公开(公告)号：US11227764B2

公开(公告)日：2022-01-18

申请号：US16592087

申请日：2019-10-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hiroshi Okumura ,  Jongjun Baek ,  Dong-Sung Lee

IPC: H01L21/02 ,  H01L21/67

Abstract: A laser irradiation method includes a first scanning wherein a laser beam is scanned in a first region having a width in the X direction and a length in the Y direction by moving a laser irradiation area on the surface of the substrate along the Y direction using a spot laser beam, and a second scanning wherein laser beam is scanned in a second region having a width in the X direction and a length in the Y direction by moving a laser irradiation area on the surface of the substrate along the Y direction using the spot laser beam. A center of the second region is spaced apart from a center of the first region in the X direction.

公开(公告)号：US20200161389A1

公开(公告)日：2020-05-21

申请号：US16679656

申请日：2019-11-11

Applicant: Samsung Display Co., LTD.

Inventor： Dong-Sung Lee ,  Seo Jong Oh ,  Byung Soo So ,  Dong-min Lee

IPC: H01L27/32 ,  H01L21/02 ,  H01L29/786 ,  H01L29/66

Abstract: A method of manufacturing a polycrystalline silicon layer for a display device includes the steps of forming an amorphous silicon layer on a substrate, cleaning the amorphous silicon layer with hydrofluoric acid, rinsing the amorphous silicon layer with hydrogenated deionized water, and irradiating the amorphous silicon layer with a laser beam to form a polycrystalline silicon layer.

公开(公告)号：US10446638B2

公开(公告)日：2019-10-15

申请号：US16041968

申请日：2018-07-23

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jong Oh Seo ,  Byung Soo So ,  Dong-Min Lee ,  Dong-Sung Lee

IPC: H01L27/32 ,  H01L51/56 ,  H01L51/52 ,  G09G3/3266 ,  G09G3/3291

Abstract: An organic light emitting diode display includes a substrate, a scan line on the substrate to transfer a scan signal, a data line on the substrate to transfer a data signal, a switching transistor connected with the scan line and the data line, a driving transistor connected with the switching transistor, and an organic light emitting diode electrically connected to the driving transistor. The driving transistor may include a first semiconductor layer, the switching transistor may include a second semiconductor layer, and the first semiconductor layer may have a surface roughness that is greater than that of the second semiconductor layer.