公开(公告)号：US10479674B2

公开(公告)日：2019-11-19

申请号：US15639203

申请日：2017-06-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alfio Russo ,  Massimo Cataldo Mazzillo ,  Ferenc Nagy

IPC: G01H9/00 ,  B81C1/00 ,  G01H3/06

Abstract: A MEMS sensor has at least a movable element designed to oscillate at an oscillation frequency, and an integrated measuring system coupled to the movable element to provide a measure of the oscillation frequency. The measuring system has a light source to emit a light beam towards the movable element and a light detector to receive the light beam reflected back from the movable element, including a semiconductor photodiode array. In particular, the light detector is an integrated photomultiplier having an array of single photon avalanche diodes.

公开(公告)号：US09411049B2

公开(公告)日：2016-08-09

申请号：US14146175

申请日：2014-01-02

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Alfio Russo ,  Massimo Cataldo Mazzillo

IPC: G06M7/00 ,  G01J1/44 ,  G01C3/08 ,  G01S17/02 ,  G01S17/08

CPC classification number: G01S17/026 ,  G01J1/44 ,  G01S17/08

Abstract: A proximity sensor may include an array of Geiger mode avalanche photodiodes, each including an anode contact and a cathode contact. A common cathode contact may be coupled to the cathode contacts of the array to define a first connection lead at a back side of the array. A common anode collecting grid contact may be coupled to the anode contacts of the array to define a second connection lead of the array. Circuitry may be coupled with the first and second connection leads and configured to sense at least one of a dark current and a rate of current spikes generated in dark conditions, and generate an output signal representing an estimated distance of an object from the array upon the sensing.

Abstract translation: 接近传感器可以包括Geiger模式雪崩光电二极管阵列，每个包括阳极接触和阴极接触。 公共阴极接触件可以耦合到阵列的阴极触点，以在阵列的背面限定第一连接引线。 公共阳极集电栅极触点可以耦合到阵列的阳极触点以限定阵列的第二连接引线。 电路可以与第一和第二连接引线耦合并且被配置为感测暗电流和在黑暗条件下产生的电流尖峰的速率中的至少一个，并且产生表示物体在阵列上的估计距离的输出信号 感应。

公开(公告)号：US20150000402A1

公开(公告)日：2015-01-01

申请号：US14303522

申请日：2014-06-12

Applicant: STMicroelectronics S.r.l.

Inventor： Alfio Russo ,  Massimo Cataldo Mazzillo ,  Ferenc Nagy

IPC: G01C19/5712 ,  B81C1/00

CPC classification number: B81C1/0015 ,  B81C2203/075 ,  G01H3/06 ,  G01H9/00

Abstract: A MEMS sensor has at least a movable element designed to oscillate at an oscillation frequency, and an integrated measuring system coupled to the movable element to provide a measure of the oscillation frequency. The measuring system has a light source to emit a light beam towards the movable element and a light detector to receive the light beam reflected back from the movable element, including a semiconductor photodiode array. In particular, the light detector is an integrated photomultiplier having an array of single photon avalanche diodes.

Abstract translation: MEMS传感器至少具有设计成以振荡频率振荡的可移动元件，以及耦合到可移动元件的集成测量系统，以提供振荡频率的测量。 测量系统具有向可动元件发射光束的光源和用于接收从包括半导体光电二极管阵列的可移动元件反射回的光束的光检测器。 特别地，光检测器是具有单光子雪崩二极管阵列的集成光电倍增管。

公开(公告)号：US20140096606A1

公开(公告)日：2014-04-10

申请号：US14041180

申请日：2013-09-30

Applicant: STMicroelectronics S.r.l.

Inventor： Davide Giuseppe Patti ,  Alessandro Mascali ,  Alfio Russo

IPC: G01V7/08

CPC classification number: G01V7/08 ,  G01V7/00 ,  G01V7/04

Abstract: A semiconductor detector of gravitational waves of a first frequency may include an oscillator having a metal coated oscillating member over a metal coated semiconductor substrate to be subjected to a Casimir attraction force towards the semiconductor substrate. The oscillator may be configured to exert a force to counterbalance the Casimir attraction force causing the oscillating member oscillates with a main harmonic resonance frequency equal to the first frequency. A displacement sensor may be coupled to the substrate and oscillating member and configured to sense oscillations and to generate corresponding sense signals. A pass-band filter may be tuned to the main harmonic resonance frequency and configured to generate band-pass replica signals of the sense signals, and an airtight package may be configured to keep a vacuum between the oscillating member and the semiconductor substrate. An array of semiconductor detectors and a method of detecting gravitational waves are also disclosed.

Abstract translation: 第一频率的重力波的半导体检测器可以包括在金属涂覆的半导体衬底上具有金属涂覆的振荡元件的振荡器，以经受对半导体衬底的卡西米尔吸引力。 振荡器可以被配置为施加力以平衡卡西米尔吸引力，导致振荡部件以等于第一频率的主谐波谐振频率振荡。 位移传感器可以耦合到衬底和振荡构件并且被配置为感测振荡并产生相应的感测信号。 可以将通带滤波器调谐到主谐波谐振频率并被配置为产生感测信号的带通复制信号，并且气密封装可以被配置为在振荡构件和半导体衬底之间保持真空。 还公开了一种半导体检测器阵列和一种检测引力波的方法。

公开(公告)号：US11469177B2

公开(公告)日：2022-10-11

申请号：US17036312

申请日：2020-09-29

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Francesco Patane′ ,  Alfio Russo

IPC: H01L23/525 ,  H01H85/02 ,  H02H3/02 ,  H01L29/78 ,  H01L29/16 ,  H01L23/62 ,  H01L27/02

Abstract: An electronic device includes: a control terminal, which extends on a first face of a substrate; a first conduction terminal, which extends in the substrate at the first face of the substrate; a first insulating layer interposed between the control terminal and the first conduction terminal; a conductive path, which can be biased at a biasing voltage; and a protection element, coupled to the control terminal and to the conductive path, which forms an electrical connection between the control terminal and the conductive path and is designed to melt, and thus interrupt electrical connection, in the presence of a leakage current higher than a critical threshold between the control terminal and the first conduction terminal through the first insulating layer.

公开(公告)号：US09725308B2

公开(公告)日：2017-08-08

申请号：US14303522

申请日：2014-06-12

Applicant: STMicroelectronics S.r.l.

Inventor： Alfio Russo ,  Massimo Cataldo Mazzillo ,  Ferenc Nagy

IPC: G01H9/00 ,  B81C1/00 ,  G01H3/06

CPC classification number: B81C1/0015 ,  B81C2203/075 ,  G01H3/06 ,  G01H9/00

Abstract: A MEMS sensor has at least a movable element designed to oscillate at an oscillation frequency, and an integrated measuring system coupled to the movable element to provide a measure of the oscillation frequency. The measuring system has a light source to emit a light beam towards the movable element and a light detector to receive the light beam reflected back from the movable element, including a semiconductor photodiode array. In particular, the light detector is an integrated photomultiplier having an array of single photon avalanche diodes.

公开(公告)号：US09671351B2

公开(公告)日：2017-06-06

申请号：US14659038

申请日：2015-03-16

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Massimo Cataldo Mazzillo ,  Alfio Russo

IPC: G01N21/85 ,  G01N21/31 ,  G01N21/05 ,  H01L31/18 ,  H01L31/0216 ,  G01N21/61 ,  H01L31/00 ,  G01N21/33

CPC classification number: H01L27/1443 ,  G01M15/108 ,  G01N21/05 ,  G01N21/31 ,  G01N21/314 ,  G01N21/33 ,  G01N21/61 ,  G01N21/85 ,  G01N2021/3137 ,  G01N2021/8578 ,  G01N2201/0612 ,  H01L31/00 ,  H01L31/02162 ,  H01L31/0312 ,  H01L31/1035 ,  H01L31/1037 ,  H01L31/108 ,  H01L31/18 ,  H01L31/1812 ,  Y02E10/50

Abstract: An optical device for detecting a first chemical species and a second chemical species contained in a specimen, which includes: a first optical sensor, which may be optically coupled to an optical source through the specimen and is sensitive to radiation having a wavelength comprised in a first range of wavelengths; and a second optical sensor, which may be optically coupled to the optical source through the specimen and is sensitive to radiation having a wavelength comprised in a second range of wavelengths, different from the first range of wavelengths.

公开(公告)号：US09349904B2

公开(公告)日：2016-05-24

申请号：US13925577

申请日：2013-06-24

Applicant: STMicroelectronics S.r.l.

Inventor： Alfio Russo ,  Giuseppina Valvo

IPC: G01N21/05 ,  H01L31/18 ,  G01N21/64 ,  H01L31/107 ,  B01L3/00

CPC classification number: H01L31/18 ,  B01L3/5027 ,  G01N21/05 ,  G01N21/6454 ,  H01L31/107

Abstract: A photodetector including: a photodiode having a body made of semiconductor material delimited by a first surface, the body forming a first electrode region; a dielectric region, set on top of the first surface and delimited by a second surface; at least one channel extending within the dielectric region, starting from the second surface; and a first metallization, which is set on top of the second surface and is in electrical contact with the first electrode region.

Abstract translation: 一种光检测器，包括：光电二极管，具有由第一表面限定的半导体材料制成的主体，所述主体形成第一电极区; 介电区域，设置在第一表面的顶部并由第二表面限定; 从所述第二表面开始的至少一个在所述电介质区域内延伸的通道; 以及第一金属化，其被设置在第二表面的顶部并与第一电极区域电接触。