Pressure Transducer
    12.
    发明申请
    Pressure Transducer 审中-公开

    公开(公告)号:US20170336275A1

    公开(公告)日:2017-11-23

    申请号:US15416721

    申请日:2017-01-26

    IPC分类号: G01L1/26 G01K13/00

    摘要: A pressure transducer is disclosed. The pressure transducer includes an encapsulation structure provided with an accommodation space; a MEMS chip for detecting pressure signal accommodated in the accommodation space; an ASIC chip received in the accommodation space. The ASIC chip includes a signal processing module connected to MEMS chip for processing the pressure signal detected by the MEMS chip and outputting the processed pressure signal. The pressure transducer further includes a temperature detection module for detecting temperature signal and outputting the temperature signal.

    Silicon based capacitive microphone
    14.
    发明授权
    Silicon based capacitive microphone 有权
    硅基电容麦克风

    公开(公告)号:US08983107B2

    公开(公告)日:2015-03-17

    申请号:US13771138

    申请日:2013-02-20

    申请人: Guojun Liu

    发明人: Guojun Liu

    摘要: A silicon based capacitive microphone includes a printed circuit board, a shell mounted on the printed circuit board and forming a receiving space together with the printed board, a chamber support located on top of the printed circuit board and received in the receiving space, a transducer unit and a controlling chip respectively mounted on the chamber support, wherein the chamber support forms a first chamber together with the printed board, the chamber support includes an opening, the transducer unit is provided with a second chamber and covers the opening, the second chamber communicates with the first chamber via the opening.

    摘要翻译: 基于硅的电容式麦克风包括印刷电路板,安装在印刷电路板上的壳体以及与印刷电路板一起形成容纳空间,位于印刷电路板顶部并容纳在接收空间中的腔室支架,换能器 单元和分别安装在所述室支撑件上的控制芯片,其中所述室支撑件与所述印刷板一起形成第一室,所述室支撑件包括开口,所述换能器单元设置有第二室并且覆盖所述开口,所述第二室 通过开口与第一室连通。

    METHOD AND APPARATUS FOR SUBSTRATE PRECLEAN WITH HYDROGEN CONTAINING HIGH FREQUENCY RF PLASMA
    16.
    发明申请
    METHOD AND APPARATUS FOR SUBSTRATE PRECLEAN WITH HYDROGEN CONTAINING HIGH FREQUENCY RF PLASMA 审中-公开
    含氢高压RF等离子体的基板预处理方法及装置

    公开(公告)号:US20130330920A1

    公开(公告)日:2013-12-12

    申请号:US13490059

    申请日:2012-06-06

    IPC分类号: H01L21/283

    CPC分类号: H01L21/76814 H01L21/02063

    摘要: A high-frequency, hydrogen-based radio-frequency (RF) plasma is used to reduce a metal oxide and other contaminant disposed in an aperture that is formed in an ultra-low k dielectric material. Because the frequency of the plasma is at least about 40 MHz and the primary gas in the plasma is hydrogen, metal oxide can be advantageously removed without damaging the dielectric material.

    摘要翻译: 使用高频,氢基射频(RF)等离子体来减少设置在形成于超低k电介质材料的孔中的金属氧化物和其它污染物。 由于等离子体的频率为至少约40MHz,等离子体中的初级气体为氢,所以可以有利地除去金属氧化物而不损坏电介质材料。

    FLUORINE-CONTAINING MULTIFUNCTIONAL MICROSPHERES AND USES THEREOF
    17.
    发明申请
    FLUORINE-CONTAINING MULTIFUNCTIONAL MICROSPHERES AND USES THEREOF 审中-公开
    含氟的多功能微球及其用途

    公开(公告)号:US20120296029A1

    公开(公告)日:2012-11-22

    申请号:US13461404

    申请日:2012-05-01

    申请人: Guojun Liu Dean Xiong

    发明人: Guojun Liu Dean Xiong

    摘要: Fluorine-containing multifunctional microspheres and applications thereof are provided. There are provided multifunctional microspheres comprising polymer chains having a first portion and a second portion, wherein the first portion is anchored to the surface of the multifunctional microsphere via grafting, crosslinking or a combination thereof, and the second portion comprises at least one fluorinated group and at least one reactive functional group capable of forming a covalent bond with an adhesive, and uses thereof to prepare amphiphobic coatings on material surfaces. Also provided are multifunctional microspheres comprising two or more different types of such polymer chains, wherein the relative proportions of the different polymer chains may be tuned during preparation of the multifunctional microspheres.

    摘要翻译: 提供含氟多功能微球及其应用。 提供了包含具有第一部分和第二部分的聚合物链的多功能微球,其中第一部分通过接枝,交联或其组合锚定到多官能微球的表面,第二部分包含至少一个氟化基团和 至少一个能够与粘合剂形成共价键的反应性官能团,以及其用于在材料表面上制备两性涂层的用途。 还提供了包含两种或更多种不同类型的这种聚合物链的多功能微球,其中可以在制备多功能微球期间调节不同聚合物链的相对比例。

    Chemical sensor and coating for same
    18.
    发明授权
    Chemical sensor and coating for same 失效
    化学传感器和涂层相同

    公开(公告)号:US06237397B1

    公开(公告)日:2001-05-29

    申请号:US09413628

    申请日:1999-10-06

    IPC分类号: G01N2902

    摘要: An acoustic wave based-chemical sensor containing a crystal substrate and a coating of small particulate matter is disclosed. The small particulate matter can be graphite particles. Transducers are connected to the crystal substrate to generate an alternating potential across the crystal substrate, which in turn causes the crystal to resonate due to the converse piezoelectric effect. The coating absorbs the analyte, thus changing the mass of the sensor, and accordingly changing its resonant frequency. The transducers detect this change in resonant frequency to indicate that the analyte is present. The use of small particulate matter results in a coating having a large surface area which facilitates mass uptake of large amounts of VOCs, improved acoustic properties even with relatively thick coatings, and a high operational temperature range.

    摘要翻译: 公开了一种包含晶体衬底和小颗粒物质涂层的基于声波的化学传感器。 小颗粒物可以是石墨颗粒。 传感器连接到晶体衬底以在晶体衬底之间产生交替电位,这又导致晶体由于相反的压电效应而谐振。 涂层吸收分析物,从而改变传感器的质量,从而改变其共振频率。 传感器检测谐振频率的这种变化,以表明分析物存在。 使用小的颗粒物质可形成具有大表面积的涂层,其有利于大量挥发性有机物的吸收,甚至在相对较厚的涂层和较高的操作温度范围内也改善了声学性能。

    MEMS microphone device
    19.
    发明授权

    公开(公告)号:US09699538B2

    公开(公告)日:2017-07-04

    申请号:US14832735

    申请日:2015-08-21

    IPC分类号: H04R1/08 H04R1/04

    摘要: A micro-electro-mechanical system (MEMS) microphone device is provided in the present disclosure. The MEMS microphone device includes a circuit board, an electromagnetic shielding cover mounted on the circuit board to define an accommodating space, electronic components received in the accommodating space and electrically connected to the circuit board, and a metal shielding member disposed between the electronic components and the electromagnetic shielding cover. The electromagnetic shielding cover has an inner surface and an outer surface; and at least one of the inner surface and the outer surface is provided with a first metal shielding layer. At least one of the electromagnetic shielding cover and the metal shielding member is electrically connected to the circuit board.

    MEMS microphone device
    20.
    发明授权
    MEMS microphone device 有权
    MEMS麦克风设备

    公开(公告)号:US09510109B2

    公开(公告)日:2016-11-29

    申请号:US14832590

    申请日:2015-08-21

    IPC分类号: H04R25/00 H04R19/04

    摘要: A micro-electro-mechanical system (MEMS) microphone device is provided in the present disclosure. The MEMS microphone device includes a first electromagnetic shielding cover defining a first accommodating space; a second electromagnetic shielding cover received in the first accommodating space and defining a second accommodating space; a MEMS chip and an application specific integrated circuit (ASIC) chip received in the second accommodating space. The first electromagnetic shielding cover and the second electromagnetic shielding cover cooperatively provide dual electromagnetic shielding protection for the MEMS chip and the ASIC chip.

    摘要翻译: 在本公开中提供了微机电系统(MEMS)麦克风装置。 MEMS麦克风装置包括限定第一容纳空间的第一电磁屏蔽罩; 第二电磁屏蔽盖,容纳在所述第一容纳空间中并限定第二容纳空间; MEMS芯片和专用集成电路(ASIC)芯片接收在第二容纳空间中。 第一电磁屏蔽罩和第二电磁屏蔽罩协同提供MEMS芯片和ASIC芯片的双电磁屏蔽保护。