发明授权
US08895962B2 Silicon/germanium nanoparticle inks, laser pyrolysis reactors for the synthesis of nanoparticles and associated methods
有权
硅/锗纳米颗粒油墨,用于合成纳米颗粒的激光热解反应器及相关方法
- 专利标题: Silicon/germanium nanoparticle inks, laser pyrolysis reactors for the synthesis of nanoparticles and associated methods
- 专利标题(中): 硅/锗纳米颗粒油墨,用于合成纳米颗粒的激光热解反应器及相关方法
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申请号: US13070286申请日: 2011-03-23
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公开(公告)号: US08895962B2公开(公告)日: 2014-11-25
- 发明人: Shivkumar Chiruvolu , Igor Altman , Bernard M. Frey , Weidong Li , Guojun Liu , Robert B. Lynch , Gina Elizabeth Pengra-Leung , Uma Srinivasan
- 申请人: Shivkumar Chiruvolu , Igor Altman , Bernard M. Frey , Weidong Li , Guojun Liu , Robert B. Lynch , Gina Elizabeth Pengra-Leung , Uma Srinivasan
- 申请人地址: US CA Milpitas
- 专利权人: NanoGram Corporation
- 当前专利权人: NanoGram Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Dardi & Herbert, PLLC
- 代理商 Peter S. Dardi
- 主分类号: H01L51/40
- IPC分类号: H01L51/40 ; C09D7/12 ; C09D5/24 ; H01L21/02 ; C09D7/14 ; B82Y30/00 ; C09D11/52 ; C09D11/101 ; B01J19/12 ; H01L31/00 ; C08K3/08 ; C08K3/36 ; C08K9/02
摘要:
Laser pyrolysis reactor designs and corresponding reactant inlet nozzles are described to provide desirable particle quenching that is particularly suitable for the synthesis of elemental silicon particles. In particular, the nozzles can have a design to encourage nucleation and quenching with inert gas based on a significant flow of inert gas surrounding the reactant precursor flow and with a large inert entrainment flow effectively surrounding the reactant precursor and quench gas flows. Improved silicon nanoparticle inks are described that has silicon nanoparticles without any surface modification with organic compounds. The silicon ink properties can be engineered for particular printing applications, such as inkjet printing, gravure printing or screen printing. Appropriate processing methods are described to provide flexibility for ink designs without surface modifying the silicon nanoparticles.
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