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    System and Method for Separation of Pump Light and Collected Light in a Laser Pumped Light Source
    11.
    发明申请
    System and Method for Separation of Pump Light and Collected Light in a Laser Pumped Light Source 审中-公开

    公开(公告)号：US20170315369A1

    公开(公告)日：2017-11-02

    申请号：US15651968

    申请日：2017-07-17

    Applicant: KLA-Tencor Corporation

    Inventor： Anatoly Shchemelinin ,  Ilya Bezel ,  Matthew Panzer ,  Eugene Shifrin

    IPC: G02B27/10

    CPC classification number: G02B27/1006

    Abstract: A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.

    System and Method for Imaging a Sample with an Illumination Source Modified by a Spatial Selective Wavelength Filter
    12.
    发明申请
    System and Method for Imaging a Sample with an Illumination Source Modified by a Spatial Selective Wavelength Filter 审中-公开
    用空间选择波长滤波器修改的照明源成像样品的系统和方法

    公开(公告)号：US20170059490A1

    公开(公告)日：2017-03-02

    申请号：US14839338

    申请日：2015-08-28

    Applicant: KLA-Tencor Corporation

    Inventor： Wei Zhao ,  Kenneth P. Gross ,  Ilya Bezel ,  Matthew Panzer

    IPC: G01N21/88 ,  H05G2/00

    CPC classification number: H05G2/008 ,  G01J3/0208 ,  G01J3/12 ,  G01J3/14 ,  G01J3/18 ,  G01J2003/1213 ,  G01J2003/1286 ,  G01N21/9501 ,  G01N21/956 ,  G02B5/203 ,  G02B26/0833 ,  G03F7/7065

    Abstract: A system for illuminating a sample with a spectrally filtered illumination source includes an illumination source configured to generate a beam of illumination having a first set of wavelengths. In addition, the system includes a wavelength filtering sub-system, a sample stage, an illumination sub-system, a detector, and an objective to focus illumination from the surface of one or more samples and focus the collected illumination to the detector. Further, the wavelength filtering sub-system includes one or more first dispersive elements positioned to introduce spatial dispersion into the beam, a spatial filter element, and one or more dispersive elements positioned to remove spatial dispersion from the beam. The spatial filter element is further positioned to pass at least a portion of the beam including a second set of wavelengths, wherein the second set of wavelengths is a subset of the first set of wavelengths.

    Abstract translation: 用频谱滤波的照明源照射样本的系统包括被配置为产生具有第一组波长的照明束的照明源。 此外，该系统包括波长滤波子系统，样本台，照明子系统，检测器和用于聚焦来自一个或多个样本的表面的照明并将所收集的照明聚焦到检测器的目的。 此外，波长滤波子系统包括定位成将空间色散引入光束中的一个或多个第一色散元件，空间滤光元件以及定位成从光束去除空间色散的一个或多个色散元件。 空间滤波器元件还被定位成使包括第二组波长的波束的至少一部分通过，其中第二组波长是第一组波长的子集。

    Continuous-Wave Laser-Sustained Plasma Illumination Source
    14.
    发明申请
    Continuous-Wave Laser-Sustained Plasma Illumination Source 审中-公开

    公开(公告)号：US20190115203A1

    公开(公告)日：2019-04-18

    申请号：US16231048

    申请日：2018-12-21

    Applicant: KLA-Tencor Corporation

    Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin ,  Matthew Panzer

    IPC: H01J65/04

    CPC classification number: H01J65/04 ,  H05G2/008

    Abstract: An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.

    System and method for separation of pump light and collected light in a laser pumped light source
    16.
    发明授权
    System and method for separation of pump light and collected light in a laser pumped light source 有权

    公开(公告)号：US09709811B2

    公开(公告)日：2017-07-18

    申请号：US14459095

    申请日：2014-08-13

    Applicant: KLA-Tencor Corporation

    Inventor： Anatoly Shchemelinin ,  Ilya Bezel ,  Matthew Panzer ,  Eugene Shifrin

    IPC: G02B27/10

    CPC classification number: G02B27/1006

    Abstract: A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.

    Broadband Light Source Including Transparent Portion with High Hydroxide Content
    18.
    发明申请
    Broadband Light Source Including Transparent Portion with High Hydroxide Content 审中-公开
    宽带光源包括具有高氢氧化物含量的透明部分

    公开(公告)号：US20150357179A1

    公开(公告)日：2015-12-10

    申请号：US14699781

    申请日：2015-04-29

    Applicant: KLA-Tencor Corporation

    Inventor： Lauren Wilson ,  Anant Chimmalgi ,  Matthew Panzer ,  Ilya Bezel

    IPC: H01J61/30 ,  H05G2/00 ,  H01J65/04

    CPC classification number: H01J61/302 ,  H01J61/025 ,  H01J65/04 ,  H05G2/008

    Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.

    Abstract translation: 激光维持等离子体光源包括等离子体灯，其构造成容纳一定体积的气体并且从泵浦激光器接收照明以产生等离子体。 等离子体灯包括对来自泵浦激光器的照明透明的一个或多个透明部分和由等离子体发射的宽带辐射的至少一部分。 一个或多个透明部分由具有高于700ppm的高氢氧化物含量的透明材料形成。

    System and Method for Separation of Pump Light and Collected Light in a Laser Pumped Light Source
    19.
    发明申请
    System and Method for Separation of Pump Light and Collected Light in a Laser Pumped Light Source 有权
    在激光泵浦光源中分离泵浦光和收集的光的系统和方法

    公开(公告)号：US20150049778A1

    公开(公告)日：2015-02-19

    申请号：US14459095

    申请日：2014-08-13

    Applicant: KLA-Tencor Corporation

    Inventor： Anatoly Shchemelinin ,  Ilya Bezel ,  Matthew Panzer ,  Eugene Shifrin

    IPC: H01S3/097

    CPC classification number: G02B27/1006

    Abstract: A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.

    Abstract translation: 用于分离等离子体泵浦光和收集的宽带光的系统包括被配置为产生包括至少第一波长的泵浦照明的泵浦源，用于容纳一定体积气体的气体容纳元件，被配置为将来自泵浦源的泵浦照明 进入气体体积以在气体体积内产生等离子体，其中等离子体发射包括至少第二波长的宽带辐射和位于收集器的反射表面和泵浦源之间的照明分离棱镜元件，并布置成在空间上分离 所述泵浦照明包括第一波长和发射的宽带辐射，其包括从等离子体发射的至少第二波长。

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