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    Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
    12.
    发明授权
    Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures 有权
    通过调节和控制灯工作温度来减少热应力的方法和装置

    公开(公告)号：US09534848B2

    公开(公告)日：2017-01-03

    申请号：US13975945

    申请日：2013-08-26

    Applicant: KLA-Tencor Corporation

    Inventor： Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Erik Kim ,  Rudolf Brunner ,  Quang Giang ,  Lauren Wilson ,  Ken Gross ,  Ilya Bezel ,  Dan Scott ,  Younus Vora ,  Matthew Derstine ,  Cedric Lasfargues

    IPC: F21V29/00 ,  F28C3/04 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60 ,  F21V19/00

    CPC classification number: F28C3/04 ,  F21V19/00 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60

    Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

    Abstract translation: 流体输入歧管将注入的流体分布在灯泡的主体周围以将灯泡冷却到阈值以下。 喷射的流体还可以沿着灯泡的表面更均匀地分布热量以减少热应力。 流体输入歧管可以包括一个或多个翼型件，以引导基本上层流的流体沿着灯泡的表面，或者其可以包括多个流体喷射喷嘴，其被定向以产生基本上层流的流体流。 输出部分可以被配置为通过允许注入的流体在从灯泡吸收热量之后容易地逸出，或者通过施加负压以沿着灯泡的表面主动地吸取注入的流体并且远离，从而促进沿着灯泡表面的流体流动。

    Open Plasma Lamp for Forming a Light-Sustained Plasma
    13.
    发明申请
    Open Plasma Lamp for Forming a Light-Sustained Plasma 有权

    公开(公告)号：US20160163516A1

    公开(公告)日：2016-06-09

    申请号：US15043804

    申请日：2016-02-15

    Applicant: KLA-Tencor Corporation

    Inventor： Lauren Wilson ,  Anant Chimmalgi ,  Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Gildardo Delgado

    IPC: H01J37/32 ,  H01J65/04

    CPC classification number: H01J37/32339 ,  H01J37/32449 ,  H01J65/04

    Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.

    High Power Broadband Light Source
    14.
    发明申请
    High Power Broadband Light Source 有权
    大功率宽带光源

    公开(公告)号：US20150333471A1

    公开(公告)日：2015-11-19

    申请号：US14667235

    申请日：2015-03-24

    Applicant: KLA-Tencor Corporation

    Inventor： Anant Chimmalgi ,  Rahul Yadav ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Matthew Derstine

    IPC: H01S3/0915 ,  H01S3/00 ,  H05G2/00

    CPC classification number: H01S3/0915 ,  G02B6/2804 ,  G02B6/4296 ,  H01S3/0071 ,  H01S3/2383 ,  H05G2/008

    Abstract: A system for generating high power broadband light includes multiple light-sustained plasma light sources. Each one of the light-sustained sources includes a pumping source, a gas containment structure for containing gas and configured to receive pumping illumination from the pumping source and a parabolic reflector element arranged to collect at least a portion of the broadband radiation emitted by the generated plasma and form a collimated broadband radiation output. The system also including a set of optical elements configured to combine the collimated broadband outputs from the parabolic reflector elements of the multiple light-sustained plasma light sources into an aggregated broadband beam.

    Abstract translation: 用于产生高功率宽带光的系统包括多个光持续等离子体光源。 光源中的每一个包括泵送源，用于容纳气体并被配置为从泵浦源接收泵浦照明的气体容纳结构和抛物面反射器元件，抛物面反射器元件被布置成收集所产生的宽度辐射的至少一部分 等离子体并形成准直宽带辐射输出。 该系统还包括一组光学元件，其被配置为将来自多个光持久等离子体光源的抛物面反射器元件的准直宽带输出组合成聚集的宽带光束。

    Light Source with Nanostructured Antireflection Layer
    15.
    发明申请
    Light Source with Nanostructured Antireflection Layer 有权
    具有纳米结构抗反射层的光源

    公开(公告)号：US20150271905A1

    公开(公告)日：2015-09-24

    申请号：US14660849

    申请日：2015-03-17

    Applicant: KLA-Tencor Corporation

    Inventor： Sebaek Oh ,  Anant Chimmalgi ,  Rahul Yadav ,  Matthew Derstine ,  Ilya Bezel

    IPC: H05G2/00 ,  H01J65/00

    CPC classification number: H01J65/00 ,  H01J61/025 ,  H01J61/32 ,  H01J65/04

    Abstract: A laser-sustained plasma light source includes a plasma cell configured to contain a volume of gas. The plasma cell is configured to receive illumination from a pump laser in order to generate plasma within the volume of gas. The plasma emits broadband radiation. The plasma cell includes one or more transparent portions being at least partially transparent to at least a portion of illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The plasma cell also includes one or more nanostructured layers disposed on one or more surfaces of the one or more transparent portions of the plasma cell. The one or more nanostructure layers form a region of refractive index control across an interface between the one or more transparent portions of the plasma cell and an atmosphere.

    Abstract translation: 激光维持等离子体光源包括被配置为容纳一定体积的气体的等离子体单元。 等离子体单元被配置为从泵浦激光器接收照明，以在气体体积内产生等离子体。 等离子体发射宽带辐射。 等离子体单元包括对来自泵浦激光器的至少一部分照明和由等离子体发射的宽带辐射的至少一部分至少部分透明的一个或多个透明部分。 等离子体单元还包括设置在等离子体单元的一个或多个透明部分的一个或多个表面上的一个或多个纳米结构层。 一个或多个纳米结构层在等离子体电池的一个或多个透明部分和气氛之间的界面上形成折射率控制的区域。

    Method and system for generating a light-sustained plasma in a flanged transmission element
    18.
    发明授权
    Method and system for generating a light-sustained plasma in a flanged transmission element 有权

    公开(公告)号：US09775226B1

    公开(公告)日：2017-09-26

    申请号：US14231196

    申请日：2014-03-31

    Applicant: KLA-Tencor Corporation

    Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine

    IPC: A61N5/06 ,  H05H1/24

    CPC classification number: H05H1/24 ,  H01J61/52 ,  H01J65/04

    Abstract: A system for forming a light-sustained plasma capable of emitting vacuum ultraviolet light includes an illumination source configured to generate illumination, a plasma cell including a transmission element having one or more openings, one or more flanges disposed at the openings of the transmission element and configured to enclose the internal volume of the transmission element in order to contain a volume of gas within the plasma cell. The system further includes a collector element arranged to focus the illumination from the illumination source into the volume of gas to generate a plasma within the volume of gas contained within the plasma cell. Further, the plasma emits broadband radiation including at least vacuum ultraviolet radiation. In addition, the transmission element of the plasma cell is transparent to the illumination generated by the illumination source and at least the vacuum ultraviolet radiation emitted by the plasma.

    Light source with nanostructured antireflection layer
    20.
    发明授权
    Light source with nanostructured antireflection layer 有权
    具有纳米结构抗反射层的光源

    公开(公告)号：US09530636B2

    公开(公告)日：2016-12-27

    申请号：US14660849

    申请日：2015-03-17

    Applicant: KLA-Tencor Corporation

    Inventor： Sebaek Oh ,  Anant Chimmalgi ,  Rahul Yadav ,  Matthew Derstine ,  Ilya Bezel

    IPC: H01J65/00 ,  H01J61/02 ,  H01J65/04 ,  H01J61/32

    CPC classification number: H01J65/00 ,  H01J61/025 ,  H01J61/32 ,  H01J65/04

    Abstract: A laser-sustained plasma light source includes a plasma cell configured to contain a volume of gas. The plasma cell is configured to receive illumination from a pump laser in order to generate plasma within the volume of gas. The plasma emits broadband radiation. The plasma cell includes one or more transparent portions being at least partially transparent to at least a portion of illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The plasma cell also includes one or more nanostructured layers disposed on one or more surfaces of the one or more transparent portions of the plasma cell. The one or more nanostructure layers form a region of refractive index control across an interface between the one or more transparent portions of the plasma cell and an atmosphere.

    Abstract translation: 激光维持等离子体光源包括被配置为容纳一定体积的气体的等离子体单元。 等离子体单元被配置为从泵浦激光器接收照明，以在气体体积内产生等离子体。 等离子体发射宽带辐射。 等离子体单元包括对来自泵浦激光器的至少一部分照明和由等离子体发射的宽带辐射的至少一部分至少部分透明的一个或多个透明部分。 等离子体单元还包括设置在等离子体单元的一个或多个透明部分的一个或多个表面上的一个或多个纳米结构层。 一个或多个纳米结构层在等离子体电池的一个或多个透明部分和气氛之间的界面上形成折射率控制的区域。

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