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公开(公告)号：US09999356B2
公开(公告)日：2018-06-19
申请号：US14813783
申请日：2015-07-30
Applicant: Kabushiki Kaisha Toshiba
Inventor： Alexander Devin Giddings , Hideaki Fukuzawa , Yoshihiko Fuji , Hiromi Yuasa , Michiko Hara , Shuichi Murakami
CPC classification number: A61B5/021 , A61B5/02108 , G01B7/24 , G01L1/125
Abstract: A strain sensor element comprises a laminated film which has a magnetic free layer, a spacer layer, and a magnetic reference layer. The free layer has a variable magnetization direction and a out-of-plane magnetization direction. The reference layer has a variable magnetization direction which is pinned more strongly than the magnetization of the free layer. The spacer layer provided between the free layer and the reference layer. A pair of electrodes is provided with a plane of the laminated film. A substrate is provided with either of the pair electrodes and can be strained. The rotation angle of the magnetization of the free layer is different from the rotation angle of the magnetization of the reference layer when the substrate is distorted. Electrical resistance is changed depending on the magnetization angle between the free layer and the reference layer, which allows the element to operate as a strain sensor.
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公开(公告)号：US20180045752A1
公开(公告)日：2018-02-15
申请号：US15724385
申请日：2017-10-04
Applicant: Kabushiki Kaisha Toshiba
Inventor： Hideaki Fukuzawa , Michiko Hara , Yoshihiko Fuji , Yoshihiro Higashi , Shiori Kaji , Akio Hori , Tomohiko Nagata , Akiko Yuzawa , Akira Kikitsu
IPC: G01P15/105 , G01P15/08
CPC classification number: G01P15/105 , G01P15/0802 , G01P2015/0805
Abstract: According to one embodiment, an inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.
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公开(公告)号：US09841444B2
公开(公告)日：2017-12-12
申请号：US14574437
申请日：2014-12-18
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Hideaki Fukuzawa , Yoshihiko Fuji , Shiori Kaji , Yoshihiro Higashi
CPC classification number: G01R19/0092 , G01R33/093
Abstract: According to one embodiment, a current sensor includes a first sensor element and a power line. The first sensor element includes a first electrode, a second electrode, and a first stacked body. The first stacked body is provided between the first electrode and the second electrode. The first stacked body includes a first magnetic layer, a second magnetic layer and a first intermediate layer. The second magnetic layer is provided between the first magnetic layer and the second electrode. The first intermediate layer is provided between the first magnetic layer and the second magnetic layer. The first intermediate layer is nonmagnetic. A magnetization of the second magnetic layer changes according to a magnetic field generated by a current flowing through the power line. At least a portion of the second magnetic layer is amorphous.
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公开(公告)号：US09549261B2
公开(公告)日：2017-01-17
申请号：US14045153
申请日：2013-10-03
Applicant: Kabushiki Kaisha Toshiba
Inventor： Yoshihiro Higashi , Yoshihiko Fuji , Michiko Hara , Akiko Yuzawa , Shiori Kaji , Tomohiko Nagata , Akio Hori , Hideaki Fukuzawa
Abstract: According to one embodiment, a microphone package includes: a pressure sensing element including a film and a device; and a cover. The film generates strain in response to pressure. The device includes: a first electrode; a second electrode; and a first magnetic layer. The first magnetic layer is provided between the first electrode and the second electrode and has a first magnetization. The cover includes: an upper portion; and a side portion. The side portion is magnetic and provided depending on the first magnetization and the second magnetization.
Abstract translation: 根据一个实施例，麦克风封装包括：压力感测元件，包括膜和装置; 和封面。 该膜响应于压力而产生应变。 该装置包括：第一电极; 第二电极; 和第一磁性层。 第一磁性层设置在第一电极和第二电极之间并且具有第一磁化。 盖子包括：上部; 和侧部。 侧部是磁性的并根据第一磁化和第二磁化而提供。
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公开(公告)号：US20150338292A1
公开(公告)日：2015-11-26
申请号：US14813783
申请日：2015-07-30
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Alexander Devin Giddings , Hideaki Fukuzawa , Yoshihiko Fuji , Hiromi Yuasa , Mlchiko Hara , Shuichi Murakami
CPC classification number: A61B5/021 , A61B5/02108 , G01B7/24 , G01L1/125
Abstract: A strain sensor element comprises a laminated film which has a magnetic free layer, a spacer layer, and a magnetic reference layer. The free layer has a variable magnetization direction and a out-of-plane magnetization direction. The reference layer has a variable magnetization direction which is pinned more strongly than the magnetization of the free layer. The spacer layer provided between the free layer and the reference layer. A pair of electrodes is provided with a plane of the laminated film. A substrate is provided with either of the pair electrodes and can be strained. The rotation angle of the magnetization of the free layer is different from the rotation angle of the magnetization of the reference layer when the substrate is distorted. Electrical resistance is changed depending on the magnetization angle between the free layer and the reference layer, which allows the element to operate as a strain sensor.
Abstract translation: 应变传感器元件包括具有无磁性层，间隔层和磁性参考层的层压膜。 自由层具有可变的磁化方向和面外磁化方向。 参考层具有可变的磁化方向，该自由层的磁化强度比自由层的磁化强。 间隔层设置在自由层和参考层之间。 一对电极设置有层叠膜的平面。 基板设置有对电极中的任一个并且可以变形。 当衬底失真时，自由层的磁化的旋转角度与参考层的磁化的旋转角度不同。 电阻根据自由层和参考层之间的磁化角度而改变，这允许元件作为应变传感器工作。
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Patent Agency Ranking
公开(公告)号：US09066661B2
公开(公告)日：2015-06-30
申请号：US14219878
申请日：2014-03-19
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Alexander Devin Giddings , Hideaki Fukuzawa , Yoshihiko Fuji , Hiromi Yuasa , Mlchiko Hara , Shuichi Murakami
CPC classification number: A61B5/021 , A61B5/02108 , G01B7/24 , G01L1/125
Abstract: A strain sensor element comprises a laminated film which has a magnetic free layer, a spacer layer, and a magnetic reference layer. The free layer has a variable magnetization direction and a out-of-plane magnetization direction. The reference layer has a variable magnetization direction which is pinned more strongly than the magnetization of the free layer. The spacer layer provided between the free layer and the reference layer. A pair of electrodes is provided with a plane of the laminated film. A substrate is provided with either of the pair electrodes and can be strained. The rotation angle of the magnetization of the free layer is different from the rotation angle of the magnetization of the reference layer when the substrate is distorted. Electrical resistance is changed depending on the magnetization angle between the free layer and the reference layer, which allows the element to operate as a strain sensor.
Abstract translation: 应变传感器元件包括具有无磁性层，间隔层和磁性参考层的层压膜。 自由层具有可变的磁化方向和面外磁化方向。 参考层具有可变的磁化方向，该自由层的磁化强度比自由层的磁化强。 间隔层设置在自由层和参考层之间。 一对电极设置有层叠膜的平面。 基板设置有对电极中的任一个并且可以变形。 当衬底失真时，自由层的磁化的旋转角度与参考层的磁化的旋转角度不同。 电阻根据自由层和参考层之间的磁化角度而改变，这允许元件作为应变传感器工作。
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公开(公告)号：US11916027B2
公开(公告)日：2024-02-27
申请号：US17016631
申请日：2020-09-10
Inventor： Yoshihiko Fuji , Ryohei Nega , Tatsuya Ohguro , Takanobu Kamakura
CPC classification number: H01L23/645 , H01F27/2804 , H01L28/10 , H01F2027/2809
Abstract: According to one embodiment, an isolator includes first and second electrodes, first and second insulating portions, and a first dielectric portion. The first insulating portion is provided on the first electrode. The second electrode is provided on the first insulating portion. The second insulating portion is provided around the second electrode along a first plane perpendicular to a first direction. The second insulating portion contacts the second electrode. The first dielectric portion is provided between the first and second insulating portions. At least a portion of the first dielectric portion contacts the second electrode and is positioned around the second electrode along the first plane. A distance between a lower end of the second electrode and a first interface between the first dielectric portion and the second insulating portion is less than a distance between the first interface and an upper end of the second electrode.
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公开(公告)号：US20220173208A1
公开(公告)日：2022-06-02
申请号：US17677610
申请日：2022-02-22
Inventor： Akira Ishiguro , Ryohei Nega , Yoshihiko Fuji
Abstract: An isolator includes a first electrode; a first insulating portion on the first electrode; a second electrode on the first insulating portion; a second insulating portion around the second electrode; and a first dielectric portion on the second electrode and the second insulating portion. The second insulating portion is provided along a first plane perpendicular to a first direction from the first electrode toward the second electrode. The second electrode including a bottom surface facing the first insulating portion, an upper surface facing the first dielectric portion, a first side surface connected to the bottom surface, and a second side surface connected to the upper surface and the first side surface. The upper surface is wider than the bottom surface in a second direction along the first plane. The first side surface is tilted with respect to the bottom surface and the second side surface.
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公开(公告)号：US20210296265A1
公开(公告)日：2021-09-23
申请号：US17016631
申请日：2020-09-10
Inventor： Yoshihiko Fuji , Ryohei Nega , Tatsuya Ohguro , Takanobu Kamakura
Abstract: According to one embodiment, an isolator includes first and second electrodes, first and second insulating portions, and a first dielectric portion. The first insulating portion is provided on the first electrode. The second electrode is provided on the first insulating portion. The second insulating portion is provided around the second electrode along a first plane perpendicular to a first direction. The second insulating portion contacts the second electrode. The first dielectric portion is provided between the first and second insulating portions. At least a portion of the first dielectric portion contacts the second electrode and is positioned around the second electrode along the first plane. A distance between a lower end of the second electrode and a first interface between the first dielectric portion and the second insulating portion is less than a distance between the first interface and an upper end of the second electrode.
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公开(公告)号：US10651371B2
公开(公告)日：2020-05-12
申请号：US15699813
申请日：2017-09-08
Applicant: Kabushiki Kaisha Toshiba
Inventor： Kazuaki Okamoto , Yoshihiko Fuji , Yoshihiro Higashi , Michiko Hara , Shiori Kaji
Abstract: According to an embodiment, a magnetic element includes a first layer, a first magnetic layer, a second magnetic layer, a first nonmagnetic layer, a second layer, and a third magnetic layer. The first layer includes ruthenium. The second magnetic layer is provided between the first layer and the first magnetic layer. The first nonmagnetic layer provided between the first magnetic layer and the second magnetic layer. The second layer includes tantalum. The second layer contacts the first layer and is provided between the first layer and the second magnetic layer. A lattice plane spacing of the second layer in a first direction is not less than 0.23 nm and not more than 0.25 nm. The first direction is from the first layer toward the first magnetic layer. The third magnetic layer includes manganese. The third magnetic layer is provided between the second layer and the second magnetic layer.
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