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    Particle path determination system
    14.
    发明授权
    Particle path determination system 失效
    粒径测定系统

    公开(公告)号：US5133602A

    公开(公告)日：1992-07-28

    申请号：US682752

    申请日：1991-04-08

    Applicant: John S. Batchelder ,  Donald M. DeCain ,  Philip C. D. Hobbs ,  Marc A. Taubenblatt

    Inventor： John S. Batchelder ,  Donald M. DeCain ,  Philip C. D. Hobbs ,  Marc A. Taubenblatt

    IPC: G01N15/14 ,  G01N15/02 ,  G01N21/21 ,  G01P11/00

    CPC classification number: G01N15/0205 ,  G01N2015/0238 ,  G01N2021/1759 ,  G01N2021/4792

    Abstract: A bright-field, particle position determining optical system is disclosed that uses both phase shift and extinction signals to determine particle trajectories. In a first embodiment, a pair of orthogonally polarized beams are positioned along an axis that intersects a particle's flow path at an acute angle. An optical system recombines the beams after they exit the flow path, the combined beams manifesting an elliptical polarization if a particle intersects one of the beams. Bright field detectors detect polarization components of the combined beam, provide a phase shift signal between the beam's orthogonal components and provide corresponding signals to a processor. The processor determines a signal asymmetry from the phase shift signal that is indicative of a particle's position in the flow path. Another embodiment of the invention examines a signal resulting from the beam's phase shift and determines a correction factor that is dependent upon the distance of the particle from the focal plane of the beams. Another embodiment employs a dithering system for cyclically moving one or more optical beams across a particle to further enable its trajectory or position to be determined.

    Abstract translation: 公开了使用相移和消光信号来确定粒子轨迹的明场，粒子位置确定光学系统。 在第一实施例中，一对正交偏振光束沿着与颗粒的流动通道以锐角相交的轴线定位。 光束在离开流路之后将光束重新组合，如果粒子与光束之一相交，那么组合光束表现出椭圆极化。 光场检测器检测组合光束的偏振分量，在光束的正交分量之间提供相移信号，并向处理器提供相应的信号。 处理器确定来自指示颗粒在流动路径中的位置的相移信号的信号不对称性。 本发明的另一个实施例检查由光束的相移产生的信号，并确定取决于粒子与光束的焦平面的距离的校正因子。 另一个实施例采用抖动系统来循环移动一个或多个光束穿过颗粒，以进一步确定其轨迹或位置。

    Generation of ionized air for semiconductor chips
    15.
    发明授权
    Generation of ionized air for semiconductor chips 失效
    生成半导体芯片的电离空气

    公开(公告)号：US5432670A

    公开(公告)日：1995-07-11

    申请号：US166509

    申请日：1993-12-13

    Applicant: John S. Batchelder ,  Vaughn P. Gross ,  Robert A. Gruver ,  Philip C. D. Hobbs ,  Kenneth D. Murray

    Inventor： John S. Batchelder ,  Vaughn P. Gross ,  Robert A. Gruver ,  Philip C. D. Hobbs ,  Kenneth D. Murray

    IPC: B01J19/00 ,  B01J19/12 ,  H01L21/00 ,  H01L21/304 ,  H05F3/06

    CPC classification number: H01L21/67028 ,  H05F3/06 ,  Y10S430/138 ,  Y10S438/909

    Abstract: Ionization of air without the use of corona discharge tips, thereby to avoid the generation of particulates from corrosion of the corona tips, is accomplished by use of a laser beam focussed to a small focal volume of intense electric field adjacent a semiconductor chip. The electric field is sufficiently intense to ionize air. In the manufacture of a semiconductor circuit chip, during those steps which are conducted in an air environment, opportunity exists to remove from a surface of a chip, or wafer, charge acquired during the manufacturing process. The ionized air is passed along the chip surface. Ions in the air discharge local regions of the chip surface which have become charged by steps of a manufacturing process. By way of further embodiment of the invention, the ionization may be produced by injection of molecules of water into the air, which molecules are subsequently ionized by a laser beam and directed toward the chip via a light shield with the aid of a magnetic field.

    Abstract translation: 通过使用聚焦于与半导体芯片相邻的强电场的小焦点体积的激光束来实现空气的离子化，而不使用电晕放电尖端，从而避免由于电晕尖端的腐蚀而产生微粒。 电场足够强以使空气电离。 在半导体电路芯片的制造中，在空气环境中进行的那些步骤中，存在从制造过程中获取的芯片或晶片的表面去除电荷的机会。 电离空气沿芯片表面通过。 芯片表面的空气放电局部区域中的离子通过制造过程的步骤而被充电。 通过本发明的进一步的实施方式，电离可以通过将水分子注入到空气中来产生，该分子随后通过激光束被电离，并借助于磁场通过光屏指向芯片。

    Model generation system having closed-loop extrusion nozzle positioning
    16.
    发明授权
    Model generation system having closed-loop extrusion nozzle positioning 失效
    具有闭环挤出喷嘴定位的模型生成系统

    公开(公告)号：US5402351A

    公开(公告)日：1995-03-28

    申请号：US183512

    申请日：1994-01-18

    Applicant: John S. Batchelder ,  Huntington W. Curtis ,  Douglas S. Goodman ,  Franklin Gracer ,  Robert R. Jackson ,  George M. Koppelman ,  John D. Mackay

    Inventor： John S. Batchelder ,  Huntington W. Curtis ,  Douglas S. Goodman ,  Franklin Gracer ,  Robert R. Jackson ,  George M. Koppelman ,  John D. Mackay

    IPC: B29C41/36 ,  B29C67/00 ,  G05B19/4099 ,  G06F17/50 ,  G06F15/46

    CPC classification number: B29C67/0055 ,  B29C41/36 ,  B29C47/0866 ,  B29C67/0092 ,  G05B19/4099 ,  B29C47/0019 ,  G05B2219/37572 ,  G05B2219/49015 ,  Y02P90/265

    Abstract: Disclosed are methods and apparatus for fabricating a three-dimensional object in accordance with a computer-generated definition of the object that is stored within a memory. A method includes the steps of (a) evaluating the stored definition of the object to locate any un-supported features of the object; in response to locating an un-supported feature, (b) defining a support structure for the un-supported feature; (c) generating a fabrication tool movement list expressive of movements required by a fabrication tool to fabricate the object and any defined support structures; and (d) translating the fabrication tool in accordance with the generated fabrication tool movement list to fabricate the object and any defined support structures. The step of translating includes the steps of, generating a feedback signal that is indicative of at least one characteristic of a most recently fabricated portion of the object; and monitoring the feedback signal to detect a deviation of at least a location of the most recently fabricated portion of the object from a corresponding location as expressed in the associated portion of the fabrication tool movement list. Also disclosed are methods and apparatus for anti-aliasing aliased surface features of the object, representing the object definition in a vector format, generating a bit-mapped representation of the object, and an analysis of the definition of the object to identify and subsequently compensate for a region of the object that has a potential to retain heat during fabrication.

    Abstract translation: 公开了根据计算机生成的存储在存储器内的对象的定义来制造三维物体的方法和装置。 一种方法包括以下步骤：（a）评估存储的对象的定义以定位对象的任何不支持的特征; 响应于定位未支撑的特征，（b）为所述不支持的特征定义支撑结构; （c）产生制造工具运动列表，其表达制造工具所需的运动以制造物体和任何限定的支撑结构; 以及（d）根据生成的制造工具移动列表翻译制造工具以制造物体和任何定义的支撑结构。 转换步骤包括以下步骤：产生指示物体的最近制造的部分的至少一个特征的反馈信号; 以及监视所述反馈信号以检测所述物体的最近制造的部分的至少一个位置与所述制造工具运动列表的相关联部分中表示的对应位置的偏差。 还公开了用于消除对象的混叠表面特征的方法和装置，以矢量格式表示对象定义，生成对象的位映射表示，以及对对象的定义的分析以识别和随后的补偿 对于在制造期间具有保持热量的潜力的物体的区域。

    Optical submicron aerosol particle detector
    18.
    发明授权
    Optical submicron aerosol particle detector 失效
    光学亚微米气溶胶颗粒检测器

    公开(公告)号：US5192870A

    公开(公告)日：1993-03-09

    申请号：US820709

    申请日：1992-01-14

    Applicant: John S. Batchelder ,  Donald M. DeCain ,  Philip C. D. Hobbs

    Inventor： John S. Batchelder ,  Donald M. DeCain ,  Philip C. D. Hobbs

    IPC: G01N15/10 ,  G01N15/02 ,  G01N15/14 ,  G01N21/21 ,  G01N21/47 ,  G01N21/94

    CPC classification number: G01N15/0205 ,  G01N21/94 ,  G01N15/1434 ,  G01N2015/0238 ,  G01N2015/145

    Abstract: A particle detector that determines the presence of particles in an enclosed volume includes a laser that directs a coherent optical beam to a beam splitter that produces first and second divergent beams. An optical system images the point of origin of the two divergent beams within the beam splitter into the enclosed volume, whereby the first and second beams are caused to intersect and interfere at an inspection region within the volume. A detector is positioned adjacent the volume and is responsive to light scattered from one of the beams, as a result of a particle passing through the inspection region, to produce an electrical signal indicative of the intensity of the scattered light. A signal processor analyzes the electrical signals and to determine the presence of the particle. An embodiment of the invention includes an acousto-optic modulator to enable one of the beams to be frequency shifted from the other beam so as to enable the presence of a carrier signal on which a particle's Doppler frequency is modulated. Another embodiment relies upon the Doppler modulation of a reflected optical beam to create an interference pattern at a detector.

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