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11.发明授权公开(公告)号：US09000370B2
公开(公告)日：2015-04-07
申请号：US14512672
申请日：2014-10-13
Applicant: Hermes Microvision Inc.
Inventor： Weiming Ren , Zhongwei Chen
CPC classification number: H01J37/026 , H01J37/14 , H01J37/261 , H01J37/28 , H01J2237/0045 , H01J2237/0262 , H01J2237/1405 , H01J2237/2801 , H01J2237/2803
Abstract: The present invention provides means and corresponding embodiments to control charge-up in an electron beam apparatus, which can eliminate the positive charges soon after being generated on the sample surface within a frame cycle of imaging scanning. The means are to let some or all of secondary electrons emitted from the sample surface return back to neutralize positive charges built up thereon so as to reach a charge balance within a limited time period. The embodiments use control electrodes to generate retarding fields to reflect some of secondary electrons with low kinetic energies back to the sample surface.
Abstract translation: 本发明提供了用于控制电子束装置中的充电的装置和相应的实施例，其可以在成像扫描的帧周期内在样品表面上产生后不久就消除正电荷。 该方法是使从样品表面发射的二次电子的一些或全部返回到中和积聚在其上的正电荷，从而在有限的时间段内达到电荷平衡。 这些实施例使用控制电极产生延迟场，以将具有低动能的一些二次电子反射回样品表面。
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12.发明授权公开(公告)号：US08835867B2
公开(公告)日：2014-09-16
申请号：US13741654
申请日：2013-01-15
Applicant: Hermes-Microvision, Inc.
Inventor： Zhongwei Chen , Weiming Ren , Xuedong Liu
CPC classification number: H01J3/22 , B82Y10/00 , B82Y40/00 , H01F7/0205 , H01J3/20 , H01J37/14 , H01J37/3177 , H01J2237/1415 , H05K9/00
Abstract: A cellular-type PD unit is proposed and a plurality of the cellular-type PD units is used in pairs in a multi-axis magnetic lens for focusing a plurality of charged beams. First type PD units or second type PD units (called as hybrid PD unit as well) can be applied to cellular-type PD units to flexibly construct sub-lenses. Furthermore, magnetic shielding plates with a plurality of through openings can be placed above and/or below the multi-axis magnetic lens to make magnetic flux leaking out of the multi-axis magnetic lens vanish away rapidly outside the magnetic shielding plates.
Abstract translation: 提出了一种蜂窝型PD单元，并且多个蜂窝型PD单元成对地用于多轴磁性透镜中以聚焦多个带电波束。 可以将第一类PD单元或第二类PD单元（也称为混合PD单元）应用于蜂窝型PD单元以灵活地构建子透镜。 此外，具有多个通孔的磁屏蔽板可以放置在多轴磁性透镜的上方和/或下方，以使从多轴磁性透镜泄漏的磁通在磁屏蔽板之外快速消失。
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公开(公告)号：US10109456B2
公开(公告)日：2018-10-23
申请号：US15633639
申请日：2017-06-26
Applicant: Hermes Microvision, Inc.
Inventor： Weiming Ren , Shuai Li , Xuedong Liu , Zhongwei Chen
IPC: H01J37/28 , H01J37/147 , H01J37/12
Abstract: A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.
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公开(公告)号：US09691588B2
公开(公告)日：2017-06-27
申请号：US15065342
申请日：2016-03-09
Applicant: Hermes Microvision, Inc.
Inventor： Weiming Ren , Shuai Li , Xuedong Liu , Zhongwei Chen
IPC: H01J37/28 , H01J37/147
CPC classification number: H01J37/28 , H01J37/12 , H01J37/1472 , H01J2237/04924 , H01J2237/083 , H01J2237/1205 , H01J2237/1516 , H01J2237/2817
Abstract: A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.
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公开(公告)号：US20170154756A1
公开(公告)日：2017-06-01
申请号：US15365145
申请日：2016-11-30
Applicant: Hermes Microvision Inc.
Inventor： Weiming Ren , Xuedong Liu , Xuerang Hu , Zhongwei Chen
IPC: H01J37/28 , H01J37/14 , H01J37/153 , H01J37/244 , H01J37/20
CPC classification number: H01J37/28 , H01J37/14 , H01J37/141 , H01J37/153 , H01J37/20 , H01J37/244 , H01J37/292 , H01J2237/0453 , H01J2237/1532 , H01J2237/24465 , H01J2237/24592 , H01J2237/2806 , H01J2237/2817
Abstract: A secondary projection imaging system in a multi-beam apparatus is proposed, which makes the secondary electron detection with high collection efficiency and low cross-talk. The system employs one zoom lens, one projection lens and one anti-scanning deflection unit. The zoom lens and the projection lens respectively perform the zoom function and the anti-rotating function to remain the total imaging magnification and the total image rotation with respect to the landing energies and/or the currents of the plural primary beamlets. The anti-scanning deflection unit performs the anti-scanning function to eliminate the dynamic image displacement due to the deflection scanning of the plural primary beamlets.
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Patent Agency Ranking
公开(公告)号：US20160035533A1
公开(公告)日：2016-02-04
申请号：US14800098
申请日：2015-07-15
Applicant: Hermes Microvision Inc.
Inventor： Weiming Ren , Joe Wang , Shuai Li , Zhongwei Chen
CPC classification number: H01J37/05 , H01J37/10 , H01J37/12 , H01J37/244 , H01J37/263 , H01J37/28 , H01J2237/057 , H01J2237/12 , H01J2237/14
Abstract: This invention provides two methods for improving performance of an energy-discrimination detection device with an energy filter of reflective type for a charged particle beam. The first method employs a beam-adjusting means to improve the energy-discrimination power, and the second method uses an electron-multiplication means to enhance the image signal without noise raise. A LVSEM with such an improved energy-discrimination detection device can provide variant high-contrast images of interested features on a specimen surface for multiple application purposes.
Abstract translation: 本发明提供了两种用于利用带电粒子束的反射型能量滤波器来改善能量鉴别检测装置的性能的方法。 第一种方法采用光束调节装置来提高能量鉴别能力，第二种方法使用电子倍增装置来增强图像信号而没有噪声提高。 具有这种改进的能量鉴别检测装置的LVSEM可以在样本表面上提供用于多种应用目的的感兴趣特征的变体高对比度图像。
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17.发明申请公开(公告)号：US20150179384A1
公开(公告)日：2015-06-25
申请号：US14572052
申请日：2014-12-16
Applicant: Hermes-Microvision, Inc.
Inventor： Zhongwei Chen , Weiming Ren , Xuerang Hu , Xuedong Liu
IPC: H01J3/20
CPC classification number: H01J3/20 , H01J37/141 , H01J37/143 , H01J2237/1405 , Y10T29/49075
Abstract: A multi-axis magnetic lens with stable performance in focusing a plurality of charged particle beams is provided. The multi-axis magnetic lens comprises a plurality of magnetic dub-lens modules. On the one hand, the multi-axis magnetic lens employs an annular permanent-magnet unit to provide a basic and stable magnetic flux to the plurality of magnetic sub-lens modules. One the other hand, the multi-axis magnetic lens uses a plurality of subsidiary coils to provide additional and adjustable magnetic flux to the plurality of magnetic sub-lens modules respectively. The invention also proposes a method to turn off or adjust the basic and stable magnetic flux for some applications. Hence, this invention will benefit the applications which need to execute in a long time period while keeping a high stabilization in performance.
Abstract translation: 提供了一种在聚焦多个带电粒子束时具有稳定性能的多轴磁性透镜。 多轴磁性透镜包括多个磁性复数透镜模块。 一方面，多轴磁性透镜采用环形永磁体单元，以向多个磁性子透镜模块提供基本稳定的磁通量。 另一方面，多轴磁性透镜使用多个辅助线圈来分别向多个磁性子透镜模块提供附加和可调节的磁通量。 本发明还提出了在一些应用中关闭或调节基本和稳定磁通的方法。 因此，本发明将有益于需要在长时间内执行的应用，同时保持高性能稳定性。
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18.发明申请公开(公告)号：US20150060665A1
公开(公告)日：2015-03-05
申请号：US14512672
申请日：2014-10-13
Applicant: Hermes Microvision Inc.
Inventor： Weiming Ren , Zhongwei Chen
CPC classification number: H01J37/026 , H01J37/14 , H01J37/261 , H01J37/28 , H01J2237/0045 , H01J2237/0262 , H01J2237/1405 , H01J2237/2801 , H01J2237/2803
Abstract: The present invention provides means and corresponding embodiments to control charge-up in an electron beam apparatus, which can eliminate the positive charges soon after being generated on the sample surface within a frame cycle of imaging scanning. The means are to let some or all of secondary electrons emitted from the sample surface return back to neutralize positive charges built up thereon so as to reach a charge balance within a limited time period. The embodiments use control electrodes to generate retarding fields to reflect some of secondary electrons with low kinetic energies back to the sample surface.
Abstract translation: 本发明提供了用于控制电子束装置中的充电的装置和相应的实施例，其可以在成像扫描的帧周期内在样品表面上产生后不久就消除正电荷。 该方法是使从样品表面发射的二次电子的一些或全部返回到中和积聚在其上的正电荷，从而在有限的时间段内达到电荷平衡。 这些实施例使用控制电极产生延迟场，以将具有低动能的一些二次电子反射回样品表面。
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19.发明授权公开(公告)号：US08907281B2
公开(公告)日：2014-12-09
申请号：US14081465
申请日：2013-11-15
Applicant: Hermes Microvision, Inc.
Inventor： Weiming Ren , Zhongwei Chen
CPC classification number: H01J37/026 , H01J37/14 , H01J37/261 , H01J37/28 , H01J2237/0045 , H01J2237/0262 , H01J2237/1405 , H01J2237/2801 , H01J2237/2803
Abstract: The present invention provides means and corresponding embodiments to control charge-up in an electron beam apparatus, which can eliminate the positive charges soon after being generated on the sample surface within a frame cycle of imaging scanning. The means are to let some or all of secondary electrons emitted from the sample surface return back to neutralize positive charges built up thereon so as to reach a charge balance within a limited time period. The embodiments use control electrodes to generate retarding fields to reflect some of secondary electrons with low kinetic energies back to the sample surface.
Abstract translation: 本发明提供了用于控制电子束装置中的充电的装置和相应的实施例，其可以在成像扫描的帧周期内在样品表面上产生后不久就消除正电荷。 该方法是使从样品表面发射的二次电子的一些或全部返回到中和积聚在其上的正电荷，从而在有限的时间段内达到电荷平衡。 这些实施例使用控制电极产生延迟场，以将具有低动能的一些二次电子反射回样品表面。
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20.发明授权公开(公告)号：US08791425B2
公开(公告)日：2014-07-29
申请号：US13895452
申请日：2013-05-16
Applicant: Hermes Microvision, Inc.
Inventor： Weiming Ren , Zongwei Chen
CPC classification number: H01J37/14 , B82Y10/00 , B82Y40/00 , H01J3/20 , H01J37/141 , H01J37/145 , H01J37/3177 , H01J2237/1035 , H01J2237/1415 , H01J2237/31774
Abstract: The present invention provides two ways to form a special permeability discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.
Abstract translation: 本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的磁导率不连续单元的两种方式，其具有更简单的构造或在诸如材料选择和机械结构的制造中具有更大的灵活性。 因此，针对各种应用提出了几种类型的多轴磁性透镜。 一种用于一般应用，例如多轴磁聚焦透镜或多轴磁转移透镜，另一种类型是可以要求较低磁动势的多轴磁性非浸没物镜，另一种类型是 可以产生较小像差的多轴磁浸物镜。 由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟 对样品照射
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