公开(公告)号：US20200035449A1

公开(公告)日：2020-01-30

申请号：US16436297

申请日：2019-06-10

Applicant: Hitachi High-Technologies Corporation

Inventor： Tomohito NAKANO ,  Toshiyuki YOKOSUKA ,  Yuko SASAKI ,  Minoru YAMAZAKI ,  Yuzuru MOCHIZUKI

IPC: H01J37/28 ,  G01N23/225 ,  H01J37/147

Abstract: A charged particle beam device includes an electron source which generates an electron beam, an objective lens which is applied with a coil current to converge the electron beam on a sample, a control unit which controls the current to be applied to the objective lens, a hysteresis characteristic storage unit which stores hysteresis characteristic information of the objective lens, a history information storage unit which stores history information related to the coil current, and an estimation unit which estimates a magnetic field generated by the objective lens on the basis of the coil current, the history information, and the hysteresis characteristic information.

公开(公告)号：US20160240348A1

公开(公告)日：2016-08-18

申请号：US15023936

申请日：2014-06-11

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Toshiyuki YOKOSUKA ,  Chahn LEE ,  Hideyuki KAZUMI ,  Hajime KAWANO ,  Shahedul HOQUE ,  Kumiko SHIMIZU ,  Hiroyuki TAKAHASHI

IPC: H01J37/28

CPC classification number: H01J37/28 ,  H01J37/147 ,  H01J37/20 ,  H01J37/22 ,  H01J2237/2803 ,  H01J2237/2806 ,  H01J2237/2817 ,  H01J2237/2826 ,  H01J2237/3045

Abstract: The scanning charged particle beam microscope according to the present invention is characterized in that, in acquiring an image of the FOV (field of view), interspaced beam irradiation points are set, and then, a deflector is controlled so that a charged particle beam scan is performed faster when the charged particle beam irradiates a position on the sample between each of the irradiation points than when the charged particle beam irradiates a position on the sample corresponding to each of the irradiation points (a position on the sample corresponding to each pixel detecting a signal). This allows the effects from a micro-domain electrification occurring within the FOV to be mitigated or controlled.

Abstract translation: 根据本发明的扫描带电粒子束显微镜的特征在于，在获取FOV（视场）的图像时，设置间隔射束照射点，然后控制偏转器，使得带电粒子束扫描 当带电粒子束照射到每个照射点之间的样品上的位置时，比相对于每个照射点的样品照射样品上的位置（对应于每个像素检测的样品上的位置）更快地执行 一个信号）。 这允许减轻或控制在FOV内发生的微域带电的影响。