公开(公告)号：US10369752B2

公开(公告)日：2019-08-06

申请号：US15138903

申请日：2016-04-26

Applicant: ASML Netherlands B.V.

Inventor： Seyed Iman Mossavat ,  Adriaan Johan Van Leest

IPC: G06F7/66 ,  B29C67/00 ,  G03F7/20 ,  G05B19/4099 ,  B29C64/386 ,  B33Y50/02

Abstract: Disclosed are a method, computer program and associated apparatuses for metrology. The method includes acquiring inspection data comprising a plurality of inspection data elements, each inspection data element having been obtained by inspection of a corresponding target structure formed using a lithographic process; and performing an unsupervised cluster analysis on said inspection data, thereby partitioning said inspection data into a plurality of clusters in accordance with a metric. In an embodiment, a cluster representative can be identified for each cluster. The cluster representative may be reconstructed and the reconstruction used to approximate the other members of the cluster.

公开(公告)号：US20190129313A1

公开(公告)日：2019-05-02

申请号：US16163751

申请日：2018-10-18

Applicant: ASML NETHERLANDS B.V.

Inventor： Alexandru ONOSE ,  Seyed Iman Mossavat ,  Thomas Theeuwes

IPC: G03F7/20

CPC classification number: G03F7/70508 ,  G03F7/705 ,  G03F7/70608 ,  G03F7/70633 ,  G03F7/70666

Abstract: Methods and apparatus for estimating an unknown value of at least one of a plurality of sets of data, each set of data including a plurality of values indicative of radiation diffracted and/or reflected and/or scattered by one or more features fabricated in or on a substrate, wherein the plurality of sets of data include at least one known value, and wherein at least one of the plurality of sets of data includes an unknown value, the apparatus including a processor to estimate the unknown value of the at least one set of data based on: the known values of the plurality of sets of data, a first condition between two or more values within a set of data of the plurality of sets of data, and a second condition between two or more values being part of different sets of data of the plurality of the sets of data.

公开(公告)号：US09760018B2

公开(公告)日：2017-09-12

申请号：US14906898

申请日：2014-08-05

Applicant: ASML Netherlands B.V.

Inventor： Seyed Iman Mossavat ,  Hugo Augustinus Joseph Cramer ,  Willem Jan Grootjans ,  Adriaan Johan Van Leest

IPC: G01B11/04 ,  G01N21/00 ,  G03B27/32 ,  G03B27/74 ,  G03F7/20 ,  G01N21/956 ,  G03F9/00

CPC classification number: G03F7/705 ,  G01N21/956 ,  G01N21/95607 ,  G03F7/70625 ,  G03F9/7092

Abstract: Methods and inspection apparatus and computer program products for assessing a quality of reconstruction of a value of a parameter of interest of a structure, which may be applied for example in metrology of microscopic structures. It is important the reconstruction provides a value of a parameter of interest (e.g. a CD) of the structure which is accurate as the reconstructed value is used to monitor and/or control a lithographic process. This is a way of assessing a quality of reconstruction (803) of a value of a parameter of interest of a structure which does not require the use of a scanning electron microscope, by predicting (804) values of the parameter of interest of structures using reconstructed values of parameters of structures, and by comparing (805) the predicted values of the parameter of interest and the reconstructed values of the parameter of interest.