MEMS swtich with internal conductive path
    12.
    发明授权
    MEMS swtich with internal conductive path 有权
    具有内部导电通路的MEMS开关

    公开(公告)号:US09583294B2

    公开(公告)日:2017-02-28

    申请号:US14278362

    申请日:2014-05-15

    Abstract: A MEMS switch has a base formed from a substrate with a top surface and an insulator layer formed on at least a portion of the top surface. Bonding material secures a cap to the base to form an interior chamber. The cap effectively forms an exterior region of the base that is exterior to the interior chamber. The MEMS switch also has a movable member (in the interior chamber) having a member contact portion, an internal contact (also in the interior chamber), and an exterior contact at the exterior region of the base. The contact portion of the movable member is configured to alternatively contact the interior contact. A conductor at least partially within the insulator layer electrically connects the interior contact and the exterior contact. The conductor is spaced from and electrically isolated from the bonding material securing the cap to the base.

    Abstract translation: MEMS开关具有由具有顶表面的基底和形成在顶表面的至少一部分上的绝缘体形成的基底。 接合材料将盖固定到基部以形成内部室。 盖子有效地形成在内部室外部的基部的外部区域。 MEMS开关还具有可移动构件(在内部室中),其具有构件接触部分,内部接触件(也在内部腔室中)以及在基部的外部区域处的外部接触件。 可动构件的接触部分构造成交替地接触内部触点。 至少部分地在绝缘体层内的导体电连接内部触点和外部触点。 导体与将盖固定到基座的接合材料间隔开并与之电隔离。

    Method of and Apparatus for Protecting a Switch, Such as a MEMS Switch, and to a MEMS Switch Including Such a Protection Apparatus
    19.
    发明申请
    Method of and Apparatus for Protecting a Switch, Such as a MEMS Switch, and to a MEMS Switch Including Such a Protection Apparatus 审中-公开
    用于保护诸如MEMS开关的开关的方法和装置以及包括这种保护装置的MEMS开关

    公开(公告)号:US20160006241A1

    公开(公告)日:2016-01-07

    申请号:US14743396

    申请日:2015-06-18

    Abstract: A method of and apparatus for protecting a MEMS switch is provided. The method and apparatus improve the integrity of MEMS switches by reducing their vulnerability to current flow through them during switching of the MEMS switch between on and off or vice versa. The protection circuit provides for a parallel path, known as a shunt, around the MEMS component. However, components within the shunt circuit can themselves be removed from the shunt when they are not required. This improves the electrical performance of the shunt when the switch is supposed to be in an off state.

    Abstract translation: 提供了一种用于保护MEMS开关的方法和装置。 该方法和装置通过减少MEMS开关在开/关之间的切换期间通过它们的电流的脆弱性来提高MEMS开关的完整性,反之亦然。 保护电路提供围绕MEMS组件的并行路径,称为分流。 然而,分流电路中的组件本身可以在不需要时从分流器移除。 当开关应处于断开状态时,这可以提高分流器的电气性能。

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