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    MEMS Swtich with Internal Conductive Path
    1.
    发明申请
    MEMS Swtich with Internal Conductive Path 有权
    具有内部导电路径的MEMS Swtich

    公开(公告)号：US20150311021A1

    公开(公告)日：2015-10-29

    申请号：US14278362

    申请日：2014-05-15

    申请人： Analog Devices Global

    发明人： Check F. Lee ,  Raymond C. Goggin ,  Padraig L. Fitzgerald ,  Bernard P. Stenson ,  Mark Schirmer ,  Jo-ey Wong

    IPC分类号： H01H59/00 ,  B81B7/00 ,  B81C1/00

    CPC分类号： H01H59/0009 ,  B81B7/007 ,  B81C1/00341 ,  H01H1/0036 ,  H01H2001/0084

    摘要： A MEMS switch has a base formed from a substrate with a top surface and an insulator layer formed on at least a portion of the top surface. Bonding material secures a cap to the base to form an interior chamber. The cap effectively forms an exterior region of the base that is exterior to the interior chamber. The MEMS switch also has a movable member (in the interior chamber) having a member contact portion, an internal contact (also in the interior chamber), and an exterior contact at the exterior region of the base. The contact portion of the movable member is configured to alternatively contact the interior contact. A conductor at least partially within the insulator layer electrically connects the interior contact and the exterior contact. The conductor is spaced from and electrically isolated from the bonding material securing the cap to the base.

    摘要翻译： MEMS开关具有由具有顶表面的基底和形成在顶表面的至少一部分上的绝缘体形成的基底。 接合材料将盖固定到基部以形成内部室。 盖子有效地形成在内部室外部的基部的外部区域。 MEMS开关还具有可移动构件（在内部室中），其具有构件接触部分，内部接触件（也在内部腔室中）以及在基部的外部区域处的外部接触件。 可动构件的接触部分构造成交替地接触内部触点。 至少部分地在绝缘体层内的导体电连接内部触点和外部触点。 导体与将盖固定到基座的接合材料间隔开并与之电隔离。

    MEMS Device with Constant Capacitance
    4.
    发明申请
    MEMS Device with Constant Capacitance 有权
    具有恒定电容的MEMS器件

    公开(公告)号：US20150235779A1

    公开(公告)日：2015-08-20

    申请号：US14182839

    申请日：2014-02-18

    申请人： Analog Devices Global

    发明人： Check F. Lee ,  Raymond C. Goggin ,  Padraig L. Fitzgerald

    IPC分类号： H01H1/00 ,  B81C1/00 ,  H01H59/00 ,  B81B7/00

    CPC分类号： H01H1/0036 ,  B81B7/0064 ,  B81B2201/014 ,  B81B2207/03 ,  B81B2207/07 ,  B81B2207/115 ,  B81C1/00698 ,  B81C2201/0171 ,  B81C2203/075 ,  H01H59/0009 ,  H01P1/127

    摘要： A MEMS apparatus has a substrate, an input node, an output node, and a MEMS switch between the input node and the output node. The switch selectively connects the input node and the output node, which are electrically isolated when the switch is open. The apparatus also has an input doped region in the substrate and an output doped region in the substrate. The input doped region and output doped region are electrically isolated through the substrate—i.e., the resistance between them inhibits non-negligible current flows between the two doped regions. The input doped region forms an input capacitance with the input node, while the output doped region forms an output capacitance with the output node.

    摘要翻译： MEMS装置在输入节点和输出节点之间具有衬底，输入节点，输出节点和MEMS开关。 开关选择性地连接输入节点和输出节点，当开关打开时，输出节点和输出节点电隔离。 该装置还具有衬底中的输入掺杂区域和衬底中的输出掺杂区域。 输入掺杂区域和输出掺杂区域通过衬底电隔离，即它们之间的电阻在两个掺杂区域之间抑制不可忽略的电流。 输入掺杂区域与输入节点形成输入电容，而输出掺杂区域与输出节点形成输出电容。

    MEMS swtich with internal conductive path
    6.
    发明授权
    MEMS swtich with internal conductive path 有权
    具有内部导电通路的MEMS开关

    公开(公告)号：US09583294B2

    公开(公告)日：2017-02-28

    申请号：US14278362

    申请日：2014-05-15

    申请人： Analog Devices Global

    发明人： Check F. Lee ,  Raymond C. Goggin ,  Padraig L. Fitzgerald ,  Bernard P. Stenson ,  Mark Schirmer ,  Jo-ey Wong

    IPC分类号： H01H57/00 ,  H01H59/00 ,  B81B7/00 ,  B81C1/00 ,  H01H1/00

    CPC分类号： H01H59/0009 ,  B81B7/007 ,  B81C1/00341 ,  H01H1/0036 ,  H01H2001/0084

    摘要： A MEMS switch has a base formed from a substrate with a top surface and an insulator layer formed on at least a portion of the top surface. Bonding material secures a cap to the base to form an interior chamber. The cap effectively forms an exterior region of the base that is exterior to the interior chamber. The MEMS switch also has a movable member (in the interior chamber) having a member contact portion, an internal contact (also in the interior chamber), and an exterior contact at the exterior region of the base. The contact portion of the movable member is configured to alternatively contact the interior contact. A conductor at least partially within the insulator layer electrically connects the interior contact and the exterior contact. The conductor is spaced from and electrically isolated from the bonding material securing the cap to the base.

    摘要翻译： MEMS开关具有由具有顶表面的基底和形成在顶表面的至少一部分上的绝缘体形成的基底。 接合材料将盖固定到基部以形成内部室。 盖子有效地形成在内部室外部的基部的外部区域。 MEMS开关还具有可移动构件（在内部室中），其具有构件接触部分，内部接触件（也在内部腔室中）以及在基部的外部区域处的外部接触件。 可动构件的接触部分构造成交替地接触内部触点。 至少部分地在绝缘体层内的导体电连接内部触点和外部触点。 导体与将盖固定到基座的接合材料间隔开并与之电隔离。