公开(公告)号：US07358651B2

公开(公告)日：2008-04-15

申请号：US11109108

申请日：2005-04-18

Applicant: Richard C. Ruby ,  Graham M. Flower ,  John D. Larson, III ,  Mark A. Unkrich

Inventor： Richard C. Ruby ,  Graham M. Flower ,  John D. Larson, III ,  Mark A. Unkrich

IPC: H01L41/08

CPC classification number: G01K11/265 ,  G01L1/165 ,  G01L9/0025 ,  H03H9/0542

Abstract: An apparatus and method for detecting a target environmental variable (TEV). A first film-bulk acoustic resonator (FBAR) oscillator that includes a first FBAR with a first response to the target environmental variable generates a first frequency. A second film-bulk acoustic resonator (FBAR) oscillator that includes a second FBAR with a second response to the target environmental variable generates a second frequency. A circuit that is coupled to the first FBAR oscillator and the second FBAR oscillator determines the target environmental variable (e.g., changes in the TEV) based on the first frequency and the second frequency.

Abstract translation: 一种用于检测目标环境变量（TEV）的装置和方法。 包括对目标环境变量具有第一响应的第一FBAR的第一薄膜体声波谐振器（FBAR）振荡器产生第一频率。 包括具有对目标环境变量的第二响应的第二FBAR的第二薄膜 - 体声波谐振器（FBAR）振荡器产生第二频率。 耦合到第一FBAR振荡器和第二FBAR振荡器的电路基于第一频率和第二频率来确定目标环境变量（例如，TEV的变化）。

公开(公告)号：US07038559B2

公开(公告)日：2006-05-02

申请号：US10785525

申请日：2004-02-23

Applicant: Richard C. Ruby ,  John D. Larson, III

Inventor： Richard C. Ruby ,  John D. Larson, III

IPC: H03H9/54 ,  H03H9/05 ,  H03H9/09

CPC classification number: H03H9/605 ,  H03H9/587 ,  H03H9/60 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155

Abstract: An apparatus including vertically separated acoustic resonators are disclosed. The apparatus includes a first acoustic resonator on a substrate and a second acoustic resonator vertically separated above the first acoustic resonator. Because the resonators are vertically separated above another, total area required to implement the resonators is reduced thereby savings in die size and cost are realized. The vertically separated resonators are supported by standoffs that are fabricated on the substrate, or on a resonator.

公开(公告)号：US06787048B2

公开(公告)日：2004-09-07

申请号：US09799202

申请日：2001-03-05

Applicant: Paul D. Bradley ,  Richard C. Ruby ,  John D. Larson, III

Inventor： Paul D. Bradley ,  Richard C. Ruby ,  John D. Larson, III

IPC: H01B1300

CPC classification number: H03H9/564 ,  H03H3/04 ,  H03H2003/0428 ,  H03H2003/0471 ,  H04R17/10

Abstract: A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. The resonator is fabricated on a substrate by fabricating a bottom electrode layer and a piezoelectric (PZ) layer over the bottom electrode layer. A selected portion of the PZ layer is partially etched. Then, a top electrode is fabricated over the selected portion of the PZ layer.

Abstract translation: 公开了一种用于制造谐振器，特别是薄膜体声波谐振器（FBAR）的方法和体现该方法的谐振器。 通过在底部电极层上制造底部电极层和压电（PZ）层，在衬底上制造谐振器。 部分蚀刻PZ层的选定部分。 然后，在PZ层的选定部分上制造顶部电极。

公开(公告)号：US06714102B2

公开(公告)日：2004-03-30

申请号：US09798496

申请日：2001-03-01

Applicant: Richard C. Ruby ,  Paul Bradley ,  Yury Oshmyansky ,  Domingo A. Figueredo

Inventor： Richard C. Ruby ,  Paul Bradley ,  Yury Oshmyansky ,  Domingo A. Figueredo

IPC: H03H900

CPC classification number: H03H3/02

Abstract: A method for fabricating an acoustic resonator, for example a Thin Film Bulk Acoustic Resonators (FBAR), on a substrate. A depression is etched and filled with sacrificial material. The FBAR is fabricated on the substrate spanning the depression, the FBAR having an etch hole. The depression may include etch channels in which case the FBAR may include etch holes aligned with the etch channels. A resonator resulting from the application of the technique is suspended in air and includes at least one etch hole and may include etch channels.

Abstract translation: 一种用于在衬底上制造声共振器的方法，例如薄膜体声波谐振器（FBAR）。 蚀刻凹陷并填充牺牲材料。 FBAR制造在跨越凹陷的衬底上，FBAR具有蚀刻孔。 凹陷可以包括蚀刻通道，在这种情况下，FBAR可以包括与蚀刻通道对准的蚀刻孔。 由施加该技术产生的共振器悬浮在空气中并且包括至少一个蚀刻孔，并且可以包括蚀刻通道。

公开(公告)号：US06617249B2

公开(公告)日：2003-09-09

申请号：US09799148

申请日：2001-03-05

Applicant: Richard C. Ruby ,  John D. Larson, III ,  Paul D. Bradley

Inventor： Richard C. Ruby ,  John D. Larson, III ,  Paul D. Bradley

IPC: H01L21302

CPC classification number: H03H9/564 ,  H03H3/04 ,  H03H2003/0428 ,  H03H2003/0471 ,  Y10S438/926 ,  Y10S438/94 ,  Y10S438/942 ,  Y10S438/97 ,  Y10S438/976

Abstract: A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by introducing a mass loading top electrode layer. For a substrate having multiple resonators, the top mass loading electrode layer is introduced for only selected resonator to provide resonators having different resonance frequencies on the same substrate.

Abstract translation: 公开了一种用于制造谐振器，特别是薄膜体声波谐振器（FBAR）的方法和体现该方法的谐振器。 通过引入质量负载顶部电极层在基板上制造FBAR。 对于具有多个谐振器的衬底，仅为选定的谐振器引入顶部质量负载电极层，以在同一衬底上提供具有不同谐振频率的谐振器。

公开(公告)号：US06566979B2

公开(公告)日：2003-05-20

申请号：US09799153

申请日：2001-03-05

Applicant: John D. Larson, III ,  Richard C. Ruby ,  Paul D. Bradley

Inventor： John D. Larson, III ,  Richard C. Ruby ,  Paul D. Bradley

IPC: H03H956

CPC classification number: H03H9/564 ,  H03H3/04 ,  H03H2003/0428 ,  H03H2003/0471 ,  Y10T29/42

Abstract: A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. A resonator is fabricated on a substrate, and its top electrode 56 is oxidized to form a oxide layer 58. For a substrate having multiple resonators, the top electrode 56 of only selected resonator is oxidized to provide resonators having different resonance frequencies on the same substrate.

公开(公告)号：US06262637B1

公开(公告)日：2001-07-17

申请号：US09324618

申请日：1999-06-02

Applicant: Paul D. Bradley ,  John D. Larson, III ,  Richard C. Ruby

Inventor： Paul D. Bradley ,  John D. Larson, III ,  Richard C. Ruby

IPC: H03H954

CPC classification number: H03H9/568 ,  H03H9/706

Abstract: An FBAR-based duplexer that comprises a first port, a second port, a third port, a first band-pass filter connected between the first port and the third port and a series circuit connected between the second port and the third port. The first band-pass filter includes a first ladder circuit having shunt and series elements. Each of the elements of the first ladder circuit comprises a film bulk acoustic resonator (FBAR). The series circuit includes a 90° phase shifter in series with a second band-pass filter. The second band-pass filter includes a second ladder circuit having shunt and series elements. Each of the elements of the second ladder circuit comprises a film bulk acoustic resonator. A band-pass filter comprising shunt elements and series elements in which the series elements and the shunt elements are connected to form a ladder circuit, and each of the elements includes a film bulk acoustic resonator (FBAR).

Abstract translation: 一种基于FBAR的双工器，包括连接在第一端口和第三端口之间的第一端口，第二端口，第三端口，第一带通滤波器以及连接在第二端口和第三端口之间的串联电路。 第一带通滤波器包括具有并联和串联元件的第一梯形电路。 第一梯形电路的每个元件包括膜体声波谐振器（FBAR）。 串联电路包括与第二带通滤波器串联的90°移相器。 第二带通滤波器包括具有分路和串联元件的第二梯形电路。 第二梯形电路的每个元件包括膜体声波谐振器。 一种带通滤波器，包括并联元件和串联元件，其中串联元件和分流元件连接以形成梯形电路，并且每个元件包括膜体声波谐振器（FBAR）。

公开(公告)号：US5446811A

公开(公告)日：1995-08-29

申请号：US212543

申请日：1994-03-14

Applicant: Leslie A. Field ,  Richard C. Ruby

Inventor： Leslie A. Field ,  Richard C. Ruby

IPC: G02B26/08 ,  G02B6/35 ,  G02B6/26

CPC classification number: G02B6/3508 ,  G02B6/3576 ,  G02B6/3552 ,  G02B6/3584 ,  H01H2001/0068

Abstract: A micromachined device for selectively switching an optical fiber between a first and a second position includes a working leg that undergoes a greater degree of thermal expansion than a second leg with the conduction of an electrical current through the two legs. In a preferred embodiment, the working leg has a cross-sectional area that is less than that of the second leg, thereby presenting a greater electrical resistance to the current flow. The legs are each fixed to a substrate at first ends and are interconnected at second ends that are free to move relative to the substrate. The difference in electrical resistance provides a differential in thermal expansion, as the working leg lengthens to a greater degree than the second leg. The working leg deforms the second leg and the optical fiber is pressed into a second position until current flow is terminated. In another embodiment, the differential in thermal expansion is created by ensuring that the second leg has less thermal isolation from the substrate than the thermal isolation of the working leg from the substrate.

Abstract translation: 用于在第一位置和第二位置之间选择性地切换光纤的微机械加工装置包括经过两条腿的电流传导而经受比第二腿部更大程度的热膨胀的工作腿部。 在优选实施例中，工作腿的横截面积小于第二腿的横截面积，从而对电流呈现更大的电阻。 腿在第一端各自固定到基底，并且在相对于基底自由移动的第二端处互连。 电阻的差异提供了热膨胀的差异，因为工作腿比第二条腿更大程度地延长。 工作腿使第二腿变形，并将光纤压入第二位置，直到电流流动终止。 在另一个实施例中，热膨胀差异是通过确保第二支腿与工作支脚与基板的热隔离相比具有比基板更小的热隔离来产生的。

公开(公告)号：US09479139B2

公开(公告)日：2016-10-25

申请号：US12769791

申请日：2010-04-29

Applicant: Richard C. Ruby ,  Wei Pang ,  Qiang Zou ,  Donald Lee

Inventor： Richard C. Ruby ,  Wei Pang ,  Qiang Zou ,  Donald Lee

IPC: H01L41/08 ,  H03H9/13 ,  H03H3/04 ,  H03H9/02 ,  H03H9/17

CPC classification number: H03H9/131 ,  H03H3/04 ,  H03H9/02102 ,  H03H9/173 ,  H03H9/175

Abstract: An acoustic resonator device includes a composite first electrode on a substrate, a piezoelectric layer on the composite electrode, and a second electrode on the piezoelectric layer. The first electrode includes a buried temperature compensating layer having a positive temperature coefficient. The piezoelectric layer has a negative temperature coefficient, and thus the positive temperature coefficient of the temperature compensating layer offsets at least a portion of the negative temperature coefficient of the piezoelectric layer.

公开(公告)号：US09154103B2

公开(公告)日：2015-10-06

申请号：US13361724

申请日：2012-01-30

Applicant: Richard C. Ruby

Inventor： Richard C. Ruby

IPC: H03H9/54 ,  H03H3/02 ,  H03H9/08 ,  H03H9/02

CPC classification number: H03H9/172 ,  H03H3/02 ,  H03H9/02102 ,  H03H9/08 ,  H03H9/54

Abstract: An acoustic resonator device includes an annular acoustic resonator, a heater coil and a heat sensor. The annular acoustic resonator is positioned over a trench formed in a substrate of the acoustic resonator device. The heater coil is disposed around a perimeter of the annular acoustic resonator, the heater coil including a resistor configured to receive a heater current. The heat sensor is configured to adjust the heater current in response to a temperature of the heater coil.

Abstract translation: 声谐振器装置包括环形声谐振器，加热器线圈和热传感器。 环形声谐振器位于形成在声谐振器装置的衬底中的沟槽之上。 加热器线圈围绕环形声谐振器的周边设置，加热器线圈包括被配置为接收加热器电流的电阻器。 热传感器被配置为响应于加热器线圈的温度来调节加热器电流。