Electron holography system
    11.
    发明授权
    Electron holography system 有权
    电子全息系统

    公开(公告)号:US07791023B2

    公开(公告)日:2010-09-07

    申请号:US11746096

    申请日:2007-05-09

    IPC分类号: G01N23/00 G21K7/00

    摘要: In electron holography observation using a transmission electron microscope, searching of conditions of an electron optical condition which are necessary for realizing a requested spatial resolution is sophisticated and for persons unaccustomed to operation of the electron microscope, the observation is time consuming work. In addition to the fundamental electron microscope proper, an input unit for inputting a spatial resolution requested in the holography observation, a calculation unit for calculating positions of electron biprism and specimen necessary for realizing the requested spatial resolution from the inputted value and parameters characteristic of the device and mechanisms for moving the two positions for realizing the obtained calculation results are provided.

    摘要翻译: 在使用透射电子显微镜的电子全息观察中,为了实现所要求的空间分辨率而需要搜索电子光学条件的条件是复杂的,对于不习惯电子显微镜操作的人,观察是耗时的工作。 除了基本电子显微镜本身之外,输入单元用于输入在全息图观察中要求的空间分辨率,计算单元,用于根据输入的值和参数特性来计算实现所请求的空间分辨率所需的电子双棱镜和样本的位置 提供了用于移动两个位置以实现所获得的计算结果的装置和机构。

    ELECTRON BEAM DEVICE
    13.
    发明申请
    ELECTRON BEAM DEVICE 有权
    电子束装置

    公开(公告)号:US20090206256A1

    公开(公告)日:2009-08-20

    申请号:US12324937

    申请日:2008-11-28

    IPC分类号: G01N23/00 A61N5/00

    摘要: A multi-biprism electron interferometer is configured so as to arrange a plurality of biprisms in an imaging optical system of a specimen. This generally requires a plurality of ports for the electron biprisms in a magnifying optical system from an objective lens onward and also requires electromagnetic lenses, which are combined with the respective electron biprisms and operated in association therewith, to provide the interference optical system with a degree of freedom. As a result, not only the electron biprism ports but also electromagnetic lenses need to be additionally configured in the imaging optical system of a conventional electron microscope so as to display the performance as the multi-biprism electron interferometer. The present invention arranges an upper electron biprism upstream of the specimen in the traveling direction of the electron beam and forms an image of the electron biprism on the specimen (object plane) using an imaging action of a pre-field of the objective lens. A double-biprism interference optical system is constructed of a lower electron biprism disposed downstream of the objective lens up to the first image plane of the specimen. No new electromagnetic lens needs to be added in this optical system.

    摘要翻译: 多双棱镜电子干涉仪被配置为在样本的成像光学系统中布置多个双棱镜。 这通常需要用于来自物镜的放大光学系统中的电子双棱镜的多个端口,并且还需要电磁透镜,其与相应的电子双棱镜组合并且与其相关联地操作,以提供具有一定程度的干涉光学系统 的自由。 结果,不仅需要在常规电子显微镜的成像光学系统中另外配置电子双棱镜端口,而且还需要电磁透镜,以显示作为多双棱镜电子干涉仪的性能。 本发明在电子束的行进方向上将样品上游的上电子双棱镜布置,并使用物镜的前场的成像动作在样本(物体面)上形成电子双棱镜的图像。 双二棱镜干涉光学系统由设置在物镜的下游直到样品的第一像面的较低电子双棱镜构成。 在该光学系统中不需要添加新的电磁透镜。

    Transmission electron microscope
    14.
    发明授权
    Transmission electron microscope 失效
    透射电子显微镜

    公开(公告)号:US07319225B2

    公开(公告)日:2008-01-15

    申请号:US11356169

    申请日:2006-02-17

    IPC分类号: G01N23/00

    摘要: A transmission electron microscope has a means for inputting a spatial size or distance d desired to be observed by the operator, calculates high contrast of an image based on this value and an observing condition which can reduce the influence of a false image superimposed, and desirably modulates an accelerating voltage of the electron microscope based thereon.

    摘要翻译: 透射电子显微镜具有用于输入操作者希望观察的空间尺寸或距离d的装置,基于该值计算图像的高对比度和可以减少叠加的虚假图像的影响的观察条件,并且期望地 基于此,调制电子显微镜的加速电压。

    Transmission electron microscope
    15.
    发明申请
    Transmission electron microscope 失效
    透射电子显微镜

    公开(公告)号:US20060255273A1

    公开(公告)日:2006-11-16

    申请号:US11356169

    申请日:2006-02-17

    IPC分类号: G21K7/00

    摘要: A transmission electron microscope has a means for inputting a spatial size or distance d desired to be observed by the operator, calculates high contrast of an image based on this value and an observing condition which can reduce the influence of a false image superimposed, and desirably modulates an accelerating voltage of the electron microscope based thereon.

    摘要翻译: 透射电子显微镜具有用于输入操作者希望观察的空间尺寸或距离d的装置,基于该值计算图像的高对比度和可以减少叠加的虚假图像的影响的观察条件,并且期望地 基于此,调制电子显微镜的加速电压。

    Electron Beam Interference Device and Electron Beam Interferometry
    16.
    发明申请
    Electron Beam Interference Device and Electron Beam Interferometry 有权
    电子束干涉仪和电子束干涉仪

    公开(公告)号:US20140332684A1

    公开(公告)日:2014-11-13

    申请号:US13810934

    申请日:2012-02-03

    摘要: There is a limit in range and distance in which an electron beam can interfere and electron interference is implemented within a range of a coherence length. Therefore, interference images are consecutively recorded for each interference region width from an interference image of a reference wave and an observation region adjacent to the reference wave by considering that a phase distribution regenerated and observed by an interference microscopy is a differential between phase distributions of two waves used for interference and a differential image between phase distributions of a predetermined observation region and a predetermined reference wave is acquired by acquiring integrating phase distributions acquired by individually regenerating the interference images. This work enables a wide range of interference image which is more than a coherence length by arranging phase distribution images performed and acquired in the respective phase distributions in a predetermined order.

    摘要翻译: 电子束可能干扰的范围和距离有限制,并且在相干长度的范围内实现电子干扰。 因此,通过考虑到由干涉显微镜再生和观测到的相位分布是两相的相位分布之间的差分,从参考波的干涉图像和与参考波相邻的观察区域的每个干涉区域宽度连续记录干涉图像 通过获取通过单独再生干涉图像获得的积分相位分布来获取用于干扰的波和预定观察区域和预定参考波的相位分布之间的差分图像。 通过以预定的顺序排列在各个相位分布中执行和获取的相位分布图像,能够实现大于相干长度的宽范围的干涉图像。

    HEAT TRANSPORT DEVICE MANUFACTURING METHOD AND HEAT TRANSPORT DEVICE
    18.
    发明申请
    HEAT TRANSPORT DEVICE MANUFACTURING METHOD AND HEAT TRANSPORT DEVICE 审中-公开
    热运输装置制造方法和热运输装置

    公开(公告)号:US20110005724A1

    公开(公告)日:2011-01-13

    申请号:US12867967

    申请日:2009-12-11

    IPC分类号: F28D15/02 B32B37/02

    摘要: [Object] To provide a heat transport device manufacturing method and a heat transport device that has a high hermeticity and is manufactured without increasing a load applied at a time of performing diffusion bonding.[Solving Means] A bonding surface (1a) of an upper member (1) that is subjected to diffusion bonding to a bonding surface (21) of a frame member (2) is formed into a convex shape, which can make a contact area of the bonding surface (1a) and the bonding surface (21) small. Therefore, a pressure (load per unit area) applied to the bonding surfaces (1a and 21) is increased, and thus the diffusion bonding of the bonding surfaces (1a and 21) is performed by a high pressure. Similarly, a bonding surface (3a) of a lower member (3) and a bonding surface (23) of the frame member (2) are also subjected to the diffusion bonding by a high pressure. As a result, a heat transport device (100) having a high hermeticity can be manufactured without increasing an entire load (F) applied at the time of the diffusion bonding.

    摘要翻译: 本发明提供一种具有高气密性并且在不增加在进行扩散接合时施加的负荷的情况下制造的传热装置的制造方法和传热装置。 [解决方案]将与框架构件(2)的接合面(21)进行扩散接合的上部构件(1)的接合面(1a)形成为凸状,能够形成接触面积 的接合面(1a)和接合面(21)较小。 因此,施加到接合面(1a,21)的压力(单位面积的负荷)增加,因此,通过高压进行接合面(1a,21)的扩散接合。 类似地,下部构件(3)的接合表面(3a)和框架构件(2)的接合表面(23)也经受高压扩散接合。 结果,可以在不增加在扩散接合时施加的整体负载(F)的情况下制造具有高密封性的热传输装置(100)。