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    Electron beam device
    1.
    发明授权
    Electron beam device 有权
    电子束装置

    公开(公告)号：US07923685B2

    公开(公告)日：2011-04-12

    申请号：US12324937

    申请日：2008-11-28

    Applicant: Ken Harada ,  Hiroto Kasai

    Inventor： Ken Harada ,  Hiroto Kasai

    IPC: H01J37/04

    CPC classification number: H01J37/295 ,  H01J37/26 ,  H01J2237/0492 ,  H01J2237/1514 ,  H01J2237/1523 ,  H01J2237/228 ,  H01J2237/2588 ,  H01J2237/2614

    Abstract: A multi-biprism electron interferometer is configured so as to arrange a plurality of biprisms in an imaging optical system of a specimen. An upper electron biprism is arranged upstream of the specimen in the traveling direction of the electron beam, and an image of the electron biprism is formed on the specimen (object plane) using an imaging action of a pre-field of the objective lens. A double-biprism interference optical system is constructed of a lower electron biprism disposed downstream of the objective lens up to the first image plane of the specimen.

    Abstract translation: 多双棱镜电子干涉仪被配置为在样本的成像光学系统中布置多个双棱镜。 在电子束的行进方向上，在样本的上游设置上部电子双棱镜，并且使用物镜的前场的成像动作在被检体（物体面）上形成电子双棱镜的图像。 双二棱镜干涉光学系统由设置在物镜的下游直到样品的第一像面的较低电子双棱镜构成。

    Magnetic domain imaging system
    3.
    发明授权
    Magnetic domain imaging system 有权
    磁畴成像系统

    公开(公告)号：US08158940B2

    公开(公告)日：2012-04-17

    申请号：US12781121

    申请日：2010-05-17

    Applicant: Takeshi Tomita

    Inventor： Takeshi Tomita

    IPC: H01J37/26 ,  H01J37/147 ,  H01J3/14

    CPC classification number: H01J37/266 ,  H01J37/147 ,  H01J2237/1405 ,  H01J2237/2008 ,  H01J2237/2588

    Abstract: A magnetic domain imaging system is offered which permits application of a strong magnetic field to a specimen. The imaging system includes a transmission electron microscope having an objective lens. The specimen that is magnetic in nature is placed in the upper polepiece of the objective lens. An electron beam transmitted through the specimen is imaged and displayed on a display device. A field application coil assembly for applying a magnetic field to the specimen and two deflection coil assemblies for bringing the beam deflected by the field applied to the specimen back to the optical axis are mounted in the upper polepiece.

    Abstract translation: 提供了磁场成像系统，其允许对样本施加强磁场。 成像系统包括具有物镜的透射电子显微镜。 本质上是磁性的样品被放置在物镜的上极片中。 通过试样透射的电子束被成像并显示在显示装置上。 用于向样本施加磁场的场应用线圈组件和用于将由施加到样本的磁场偏转的光束引导到光轴的两个偏转线圈组件安装在上极靴中。

    Electron microscope equipped with magnetic microprobe
    4.
    发明申请
    Electron microscope equipped with magnetic microprobe 有权
    电子显微镜配有磁性微探针

    公开(公告)号：US20050274889A1

    公开(公告)日：2005-12-15

    申请号：US11134090

    申请日：2005-05-20

    Applicant: Daisuke Shindo ,  Yasukazu Murakami ,  Tetsuo Oikawa ,  Masao Inoue

    Inventor： Daisuke Shindo ,  Yasukazu Murakami ,  Tetsuo Oikawa ,  Masao Inoue

    IPC: H01J37/26 ,  G21K7/00

    CPC classification number: H01J37/268 ,  H01J2237/1514 ,  H01J2237/2588

    Abstract: There is disclosed an electron microscope equipped with a magnetic microprobe. The microscope can apply a strong electric field to a local area on a specimen made of a magnetic material. The magnetic flux density per unit area of the microprobe is high. The microscope includes a biprism for producing interference between an electron beam transmitted through the specimen and an electron beam passing through a vacuum. The specimen is held to a holder. The microprobe is made of a magnetic material and has a needle-like tip. The microscope further includes a moving mechanism capable of moving the microprobe toward and away from the specimen.

    Abstract translation: 公开了一种配备有磁性微探针的电子显微镜。 显微镜可以将强电场施加到由磁性材料制成的试样上的局部区域。 微探针单位面积的磁通密度高。 显微镜包括用于产生透射通过样品的电子束与通过真空的电子束之间的干涉的双棱镜。 标本被固定在一个支架上。 微探针由磁性材料制成并具有针状尖端。 显微镜还包括能够将微探针朝向和远离样品移动的移动机构。

    Magnetic Domain Imaging System
    5.
    发明申请
    Magnetic Domain Imaging System 有权
    磁畴成像系统

    公开(公告)号：US20100294932A1

    公开(公告)日：2010-11-25

    申请号：US12781121

    申请日：2010-05-17

    Applicant: Takeshi Tomita

    Inventor： Takeshi Tomita

    IPC: H01J37/26 ,  H01J37/147

    CPC classification number: H01J37/266 ,  H01J37/147 ,  H01J2237/1405 ,  H01J2237/2008 ,  H01J2237/2588

    Abstract: A magnetic domain imaging system is offered which permits application of a strong magnetic field to a specimen. The imaging system includes a transmission electron microscope having an objective lens. The specimen that is magnetic in nature is placed in the upper polepiece of the objective lens. An electron beam transmitted through the specimen is imaged and displayed on a display device. A field application coil assembly for applying a magnetic field to the specimen and two deflection coil assemblies for bringing the beam deflected by the field applied to the specimen back to the optical axis are mounted in the upper polepiece.

    Abstract translation: 提供了磁场成像系统，其允许对样本施加强磁场。 成像系统包括具有物镜的透射电子显微镜。 本质上是磁性的样品被放置在物镜的上极片中。 通过试样透射的电子束被成像并显示在显示装置上。 用于向样本施加磁场的场应用线圈组件和用于将由施加到样本的磁场偏转的光束引导到光轴的两个偏转线圈组件安装在上极靴中。

    Electron microscope equipped with magnetic microprobe
    6.
    发明授权
    Electron microscope equipped with magnetic microprobe 有权
    电子显微镜配有磁性微探针

    公开(公告)号：US07241995B2

    公开(公告)日：2007-07-10

    申请号：US11134090

    申请日：2005-05-20

    Applicant: Daisuke Shindo ,  Yasukazu Murakami ,  Tetsuo Oikawa ,  Masao Inoue

    Inventor： Daisuke Shindo ,  Yasukazu Murakami ,  Tetsuo Oikawa ,  Masao Inoue

    IPC: G21K7/00

    CPC classification number: H01J37/268 ,  H01J2237/1514 ,  H01J2237/2588

    Abstract: There is disclosed an electron microscope equipped with a magnetic microprobe. The microscope can apply a strong electric field to a local area on a specimen made of a magnetic material. The magnetic flux density per unit area of the microprobe is high. The microscope includes a biprism for producing interference between an electron beam transmitted through the specimen and an electron beam passing through a vacuum. The specimen is held to a holder. The microprobe is made of a magnetic material and has a needle-like tip. The microscope further includes a moving mechanism capable of moving the microprobe toward and away from the specimen.

    Abstract translation: 公开了一种配备有磁性微探针的电子显微镜。 显微镜可以将强电场施加到由磁性材料制成的试样上的局部区域。 微探针单位面积的磁通密度高。 显微镜包括用于产生透射通过样品的电子束与通过真空的电子束之间的干涉的双棱镜。 标本被固定在一个支架上。 微探针由磁性材料制成并具有针状尖端。 显微镜还包括能够将微探针朝向和远离样品移动的移动机构。

    ELECTRON BEAM DEVICE
    7.
    发明申请
    ELECTRON BEAM DEVICE 有权
    电子束装置

    公开(公告)号：US20090206256A1

    公开(公告)日：2009-08-20

    申请号：US12324937

    申请日：2008-11-28

    Applicant: Ken HARADA ,  Hiroto Kasai

    Inventor： Ken HARADA ,  Hiroto Kasai

    IPC: G01N23/00 ,  A61N5/00

    CPC classification number: H01J37/295 ,  H01J37/26 ,  H01J2237/0492 ,  H01J2237/1514 ,  H01J2237/1523 ,  H01J2237/228 ,  H01J2237/2588 ,  H01J2237/2614

    Abstract: A multi-biprism electron interferometer is configured so as to arrange a plurality of biprisms in an imaging optical system of a specimen. This generally requires a plurality of ports for the electron biprisms in a magnifying optical system from an objective lens onward and also requires electromagnetic lenses, which are combined with the respective electron biprisms and operated in association therewith, to provide the interference optical system with a degree of freedom. As a result, not only the electron biprism ports but also electromagnetic lenses need to be additionally configured in the imaging optical system of a conventional electron microscope so as to display the performance as the multi-biprism electron interferometer. The present invention arranges an upper electron biprism upstream of the specimen in the traveling direction of the electron beam and forms an image of the electron biprism on the specimen (object plane) using an imaging action of a pre-field of the objective lens. A double-biprism interference optical system is constructed of a lower electron biprism disposed downstream of the objective lens up to the first image plane of the specimen. No new electromagnetic lens needs to be added in this optical system.

    Abstract translation: 多双棱镜电子干涉仪被配置为在样本的成像光学系统中布置多个双棱镜。 这通常需要用于来自物镜的放大光学系统中的电子双棱镜的多个端口，并且还需要电磁透镜，其与相应的电子双棱镜组合并且与其相关联地操作，以提供具有一定程度的干涉光学系统 的自由。 结果，不仅需要在常规电子显微镜的成像光学系统中另外配置电子双棱镜端口，而且还需要电磁透镜，以显示作为多双棱镜电子干涉仪的性能。 本发明在电子束的行进方向上将样品上游的上电子双棱镜布置，并使用物镜的前场的成像动作在样本（物体面）上形成电子双棱镜的图像。 双二棱镜干涉光学系统由设置在物镜的下游直到样品的第一像面的较低电子双棱镜构成。 在该光学系统中不需要添加新的电磁透镜。

    Technique to quantitatively measure magnetic properties of thin structures at <10 NM spatial resolution
    9.
    发明授权
    Technique to quantitatively measure magnetic properties of thin structures at <10 NM spatial resolution 失效
    在<10 NM空间分辨率下定量测量薄结构的磁性能的技术

    公开(公告)号：US06590209B1

    公开(公告)日：2003-07-08

    申请号：US09516878

    申请日：2000-03-01

    Applicant: Sasa Bajt

    Inventor： Sasa Bajt

    IPC: G01N2304

    CPC classification number: G01R33/10 ,  G01N23/04 ,  H01J2237/2588

    Abstract: A highly sensitive and high resolution magnetic microscope images magnetic properties quantitatively. Imaging is done with a modified transmission electron microscope that allows imaging of the sample in a zero magnetic field. Two images from closely spaced planes, one in focus and one slightly out of focus, are sufficient to calculate the absolute values of the phase change imparted to the electrons, and hence obtain the magnetization vector field distribution.

    Abstract translation: 高灵敏度和高分辨率的磁性显微镜对磁性能进行定量成像。 用改进的透射电子显微镜进行成像，其允许在零磁场中成像样​​品。 来自紧密间隔的平面的两个图像，一个聚焦，一个略微偏离焦​​距，足以计算给予电子的相变的绝对值，因此获得磁化矢量场分布。

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