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    Electron microscope
    1.
    发明授权
    Electron microscope 有权
    电子显微镜

    公开(公告)号：US08841615B2

    公开(公告)日：2014-09-23

    申请号：US13637227

    申请日：2011-02-22

    Applicant: Nobuo Tanaka ,  Tsutomu Nakanishi ,  Yoshikazu Takeda ,  Hidefumi Asano ,  Koh Saitoh ,  Toru Ujihara ,  Makoto Kuwahara

    Inventor： Nobuo Tanaka ,  Tsutomu Nakanishi ,  Yoshikazu Takeda ,  Hidefumi Asano ,  Koh Saitoh ,  Toru Ujihara ,  Makoto Kuwahara

    IPC: H01J37/26 ,  H01J37/073

    CPC classification number: H01J37/26 ,  H01J37/073 ,  H01J37/265 ,  H01J37/266 ,  H01J2237/06333 ,  H01J2237/06383 ,  H01J2237/24557

    Abstract: An electron microscope which utilizes a polarized electron beam and can obtain a high contrast image of a sample is provided. The microscope includes: a laser; a polarization apparatus that polarizes a laser beam into a circularly polarized laser beam; a semiconductor photocathode that is provided with a strained superlattice semiconductor layer and generates a polarized electron beam when irradiated with the circularly polarized laser beam; a transmission electron microscope that utilizes the polarized electron beam; an electron beam intensity distribution recording apparatus arranged at a face reached by the polarized electron beam that has transmitted through the sample. An electron beam intensity distribution recording apparatus records an intensity distribution before and after the polarization of the electron beam is reversed, and a difference acquisition apparatus calculates a difference therebetween.

    Abstract translation: 提供了利用偏振电子束并且可以获得样品的高对比度图像的电子显微镜。 显微镜包括：激光; 将激光束偏振成圆偏振激光束的偏振装置; 半导体光电阴极，其设置有应变超晶格半导体层，并且当被圆偏振激光束照射时产生偏振电子束; 利用偏振电子束的透射电子显微镜; 电子束强度分布记录装置，布置在透过样品的偏振电子束所达到的面上。 电子束强度分布记录装置记录电子束的偏振前后的强度分布，差分获取装置计算其间的差。

    System and method for producing and using multiple electron beams with quantized orbital angular momentum in an electron microscope
    2.
    发明授权
    System and method for producing and using multiple electron beams with quantized orbital angular momentum in an electron microscope 有权
    在电子显微镜中产生和使用具有量化轨道角动量的多个电子束的系统和方法

    公开(公告)号：US08680488B2

    公开(公告)日：2014-03-25

    申请号：US13372914

    申请日：2012-02-14

    Applicant: Benjamin McMorran

    Inventor： Benjamin McMorran

    IPC: G02B27/42

    CPC classification number: H01J37/28 ,  H01J2237/06383 ,  H01J2237/24557 ,  H01J2237/2614 ,  H01J2237/2802

    Abstract: A system and method for using electron beams with engineered phase dislocations as scanned probes in electron probe beam instruments such as scanning transmission electron microscopes. These types of electron beams have unique properties and can provide better information about a specimen than conventional electron beams. Phase dislocations may be created based on a pattern disposed on a nanoscale hologram, which may be placed in the electron optical column of the electron probe beam instrument. When an electron beam from the instrument is directed onto the hologram, phase dislocations may be imprinted onto the electron beam when electrons are diffracted from these holograms. For example, electron probe beams with spiral phase dislocations may occur. These spiral phase dislocations are formed using a hologram with a fork-patterned grating. Spiral phase dislocations may be used to provide magnetic contrast images of a specimen.

    Abstract translation: 在扫描透射电子显微镜等电子探针光束仪器中使用具有工程相位错的电子束作为扫描探针的系统和方法。 这些类型的电子束具有独特的性质，并且可以提供比常规电子束更好的关于样品的信息。 可以基于设置在纳米级全息图上的图案来创建相位位错，该图案可以放置在电子探针束仪器的电子光学柱中。 当来自仪器的电子束被引导到全息图上时，当电子从这些全息图衍射出来时，相位错位可以被印在电子束上。 例如，可能发生具有螺旋相位错的电子探针光束。 这些螺旋相位错是使用具有叉形图案的光栅的全息图形成的。 可以使用螺旋相位错来提供样品的磁对照图像。

    ELECTRON MICROSCOPE
    4.
    发明申请
    ELECTRON MICROSCOPE 有权
    电子显微镜

    公开(公告)号：US20130009058A1

    公开(公告)日：2013-01-10

    申请号：US13637227

    申请日：2011-02-22

    Applicant: Nobuo Tanaka ,  Tsutomu Nakanishi ,  Yoshikazu Takeda ,  Hidefumi Asano ,  Koh Saitoh ,  Toru Ujihara ,  Makoto Kuwahara

    Inventor： Nobuo Tanaka ,  Tsutomu Nakanishi ,  Yoshikazu Takeda ,  Hidefumi Asano ,  Koh Saitoh ,  Toru Ujihara ,  Makoto Kuwahara

    IPC: H01J37/06 ,  H01J37/26

    CPC classification number: H01J37/26 ,  H01J37/073 ,  H01J37/265 ,  H01J37/266 ,  H01J2237/06333 ,  H01J2237/06383 ,  H01J2237/24557

    Abstract: An electron microscope which utilizes a polarized electron beam and can obtain a high contrast image of a sample is provided. The microscope includes: a laser; a polarization apparatus that polarizes a laser beam into a circularly polarized laser beam; a semiconductor photocathode that is provided with a strained superlattice semiconductor layer and generates a polarized electron beam when irradiated with the circularly polarized laser beam; a transmission electron microscope that utilizes the polarized electron beam; an electron beam intensity distribution recording apparatus arranged at a face reached by the polarized electron beam that has transmitted through the sample. An electron beam intensity distribution recording apparatus records an intensity distribution before and after the polarization of the electron beam is reversed, and a difference acquisition apparatus calculates a difference therebetween.

    Abstract translation: 提供了利用偏振电子束并且可以获得样品的高对比度图像的电子显微镜。 显微镜包括：激光; 将激光束偏振成圆偏振激光束的偏振装置; 半导体光电阴极，其设置有应变超晶格半导体层，并且当被圆偏振激光束照射时产生偏振电子束; 利用偏振电子束的透射电子显微镜; 电子束强度分布记录装置，布置在透过样品的偏振电子束所达到的面上。 电子束强度分布记录装置记录电子束的偏振前后的强度分布，差分获取装置计算其间的差。

    Spin polarized ion beam generation apparatus and scattering spectroscopy apparatus using the spin polarized ion beam and specimen processing apparatus
    9.
    发明授权
    Spin polarized ion beam generation apparatus and scattering spectroscopy apparatus using the spin polarized ion beam and specimen processing apparatus 有权
    旋转极化离子束产生装置和使用自旋极化离子束和样品处理装置的散射光谱装置

    公开(公告)号：US08017920B2

    公开(公告)日：2011-09-13

    申请号：US12516351

    申请日：2007-11-29

    Applicant: Taku Suzuki ,  Yasushi Yamauchi

    Inventor： Taku Suzuki ,  Yasushi Yamauchi

    IPC: H01J37/08 ,  H01J37/252

    CPC classification number: H01J27/24 ,  G01R33/282 ,  H01J27/18 ,  H01J37/08 ,  H01J2237/0815 ,  H01J2237/24557 ,  H01J2237/25

    Abstract: A spin polarized ion beam generation apparatus (30) can efficiently generate a spin polarized ion by using a pumping light generator (33) to an ion in a high frequency discharge tube (15) to irradiate optical pumping (33,34) by circularly polarized light and linearly polarized light orthogonal to each other to a metastable atom. For example, a polarized helium ion beam having a spin polarization rate that exceeds 18% and that is as high as 25% can be generated. The spin polarized ion beam generation apparatus (30) also can be applied to a processing apparatus and an analysis apparatus that can irradiate a polarized ion beam to a specimen. According to the spin polarized ion scattering spectroscopy apparatus, the spin status in a region at a depth of about 2 to 3 atomic layers from the surface of the specimen can be measured while discriminating the elements from the atomic layer with a reduced measurement time and with a high accuracy impossible in the conventional technique.

    Abstract translation: 自旋极化离子束产生装置（30）可以通过使用泵送光发生器（33）对高频放电管（15）中的离子来有效地产生自旋极化离子，以通过圆偏振来照射光泵浦（33,34） 与亚稳原子相互正交的光和线偏振光。 例如，可以产生自旋极化率超过18％，高达25％的极化氦离子束。 自旋极化离子束产生装置（30）也可以应用于能够将极化离子束照射到试样的处理装置和分析装置。 根据自旋极化离子散射光谱装置，可以测量从样品表面开始在约2至3个原子层深度的区域中的自旋状态，同时以较小的测量时间来区分元素与原子层，并且与 在常规技术中不可能达到高准确度。

    Charged particle spin polarimeter, microscope, and photoelectron spectroscope
    10.
    发明授权
    Charged particle spin polarimeter, microscope, and photoelectron spectroscope 有权
    带电粒子自旋旋光仪，显微镜和光电子分光镜

    公开(公告)号：US07985952B2

    公开(公告)日：2011-07-26

    申请号：US12028996

    申请日：2008-02-11

    Applicant: Teruo Kohashi

    Inventor： Teruo Kohashi

    IPC: G01N23/00

    CPC classification number: G01N23/2251 ,  H01J37/244 ,  H01J37/285 ,  H01J49/288 ,  H01J2237/24557

    Abstract: A charged particle spin polarimeter that is capable of resolving with high efficiency the magnetic moment of a charged particle. The charged particle spin polarimeter has a pair of convex and concave magnetic poles to apply a magnetic field with gradient to an incident charged particle and a pair of plain plate electrodes to apply, to a charged particle, an electric field for canceling a Lorentz force that the charged particle receives from the magnetic field. The magnetic moment in the magnetic field direction of a charged particle is resolved by the interaction between the gradient of the magnetic field and the magnetic moment of the charged particle.

    Abstract translation: 一种带电粒子旋转偏振计，能够高效率地分辨带电粒子的磁矩。 带电粒子旋转偏振计具有一对凸和凹磁极，以向入射带电粒子和一对平板电极施加梯度的磁场，以向带电粒子施加用于抵消洛伦兹力的电场， 带电粒子从磁场接收。 带电粒子的磁场方向的磁矩通过磁场的梯度和带电粒子的磁矩之间的相互作用来解决。

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