Invention Grant
- Patent Title: Electron microscope
- Patent Title (中): 电子显微镜
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Application No.: US13637227Application Date: 2011-02-22
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Publication No.: US08841615B2Publication Date: 2014-09-23
- Inventor: Nobuo Tanaka , Tsutomu Nakanishi , Yoshikazu Takeda , Hidefumi Asano , Koh Saitoh , Toru Ujihara , Makoto Kuwahara
- Applicant: Nobuo Tanaka , Tsutomu Nakanishi , Yoshikazu Takeda , Hidefumi Asano , Koh Saitoh , Toru Ujihara , Makoto Kuwahara
- Applicant Address: JP Nagoya
- Assignee: National University Corporation Nagoya University
- Current Assignee: National University Corporation Nagoya University
- Current Assignee Address: JP Nagoya
- Agency: Oliff PLC
- Priority: JP2010-074008 20100329
- International Application: PCT/JP2011/053790 WO 20110222
- International Announcement: WO2011/122171 WO 20111006
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/073

Abstract:
An electron microscope which utilizes a polarized electron beam and can obtain a high contrast image of a sample is provided. The microscope includes: a laser; a polarization apparatus that polarizes a laser beam into a circularly polarized laser beam; a semiconductor photocathode that is provided with a strained superlattice semiconductor layer and generates a polarized electron beam when irradiated with the circularly polarized laser beam; a transmission electron microscope that utilizes the polarized electron beam; an electron beam intensity distribution recording apparatus arranged at a face reached by the polarized electron beam that has transmitted through the sample. An electron beam intensity distribution recording apparatus records an intensity distribution before and after the polarization of the electron beam is reversed, and a difference acquisition apparatus calculates a difference therebetween.
Public/Granted literature
- US20130009058A1 ELECTRON MICROSCOPE Public/Granted day:2013-01-10
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