公开(公告)号：US20070109011A1

公开(公告)日：2007-05-17

申请号：US11559577

申请日：2006-11-14

申请人： Mike Jun ,  Atila Ersahin ,  Barry McGinley ,  Sabari Sanjeevi

发明人： Mike Jun ,  Atila Ersahin ,  Barry McGinley ,  Sabari Sanjeevi

IPC分类号： G01R31/00

CPC分类号： G09G3/006 ,  G09G3/3648 ,  G09G3/3677 ,  G09G2300/0408 ,  G09G2300/0426

摘要： In accordance with the present invention, a first shorting bar drives the data lines of a TFT array having integrated gate driver circuitry. Another set of shorting bars drive the corresponding terminals of the gate driver circuitry. The pixel voltages are measured after all the pixels are charged by the driving signals applied to the shorting bars. Gate voltages are progressively applied to the gate lines by the gate driver integrated circuit (IC) via the set of shorting bars that, in turn, are driven by clock signals received from one or more pattern generators. Voltages are concurrently applied to the data lines which are connected together by the first shorting bar. The application of voltages generates a display pattern that is subsequently compared to an expected display pattern. By comparing the resulting display pattern and the expected display pattern, possible defects are detected.

摘要翻译： 根据本发明，第一短路棒驱动具有集成栅极驱动器电路的TFT阵列的数据线。 另一组短路棒驱动栅极驱动器电路的相应端子。 在通过施加到短路棒的驱动信号对所有像素进行充电之后，测量像素电压。 栅极电压通过栅极驱动器集成电路（IC）经由一组短路棒逐渐施加到栅极线，该组短路棒又由从一个或多个图案发生器接收的时钟信号驱动。 电压同时施加到由第一短路棒连接在一起的数据线。 电压的应用产生随后与期望的显示图案进行比较的显示图案。 通过比较所得到的显示图案和预期的显示图案，检测到可能的缺陷。

公开(公告)号：US06882899B2

公开(公告)日：2005-04-19

申请号：US09858305

申请日：2001-05-15

申请人： David L. Baldwin ,  Alexander J. Nagy ,  Jeffrey A. Hawthorne ,  Jeffrey P. Sample ,  Thanh V. Dang

发明人： David L. Baldwin ,  Alexander J. Nagy ,  Jeffrey A. Hawthorne ,  Jeffrey P. Sample ,  Thanh V. Dang

IPC分类号： G06F19/00

CPC分类号： G09G3/006

摘要： Methods, apparatuses, and systems are presented for positioning a sensing head relative to a workpiece, involving a control unit operative to provide a plurality of control signals to iteratively control positioning of the sensing head relative to the workpiece, a plurality of air injectors disposed and fixedly connected on a periphery of the sensing head, each of the air injectors capable of being independently controlled to eject a gas between the sensing head and the workpiece to create an air bearing and affect positioning of the sensing head relative to the workpiece in response to at least one of the control signals, and a plurality of sensors providing a plurality of feedback signals to the control unit, the feedback signals containing information relating to positioning of an optical imaging sensing head relative to the workpiece.

摘要翻译： 呈现用于相对于工件定位感测头的方法，装置和系统，涉及控制单元，其操作以提供多个控制信号以迭代地控制感测头相对于工件的定位，多个空气喷射器 固定地连接在感测头的周边上，每个空气喷射器能够被独立地控制，以在感测头和工件之间喷射气体，以产生空气轴承，并且响应于感测头相对于工件的影响而影响感测头相对于工件的定位 所述控制信号中的至少一个以及向所述控制单元提供多个反馈信号的多个传感器，所述反馈信号包含与光学成像感测头相对于所述工件的定位有关的信息。

公开(公告)号：US20050040338A1

公开(公告)日：2005-02-24

申请号：US10637215

申请日：2003-08-08

申请人： Adam Weiss ,  Afsar Saranli ,  Eduardo Ghelman ,  David Baldwin

发明人： Adam Weiss ,  Afsar Saranli ,  Eduardo Ghelman ,  David Baldwin

IPC分类号： G01B21/00 ,  B65G49/06 ,  G01N21/95 ,  G02F1/13 ,  G02F1/1333 ,  G02F1/1362 ,  G02F1/1368 ,  H01L21/677 ,  G01F23/00

CPC分类号： G02F1/136259 ,  B65G49/061 ,  B65G49/063 ,  B65G2249/04 ,  G01N21/896 ,  G01N21/95 ,  G01N2021/8867 ,  G01N2021/9513 ,  H01L21/67721

摘要： A modular split-axis stage is used to inspect and/or repair large flat glass media suitable for LCD/TFT applications. Low-precision air table sections are detachably mounted to a centrally located, high-precision granite inspection/repair section. Glass media held by a vacuum contact is transported on air cushions from the up-web air table to the central inspection/repair section. Vacuum nozzles integrated with porous medium pads precisely control the height of the flexible media above the central section during inspection or repair. Embodiments includes structures in which the media is either stationary or moving during inspection/repair. A first media can be loaded/unloaded while a second media is undergoing inspection or repair in a pipelined operational mode.

摘要翻译： 模块化分裂轴台用于检查和/或修理适用于LCD / TFT应用的大型平板玻璃介质。 低精度空气台部分可拆卸地安装到位于中心的高精度花岗岩检查/修理部分。 由真空接触器保持的玻璃介质通过空气垫从上腹板空气台传送到中央检查/修理部分。 与多孔介质衬垫集成的真空喷嘴在检查或修理期间精确地控制柔性介质在中心部分上方的高度。 实施例包括在检查/修理期间介质静止或移动的结构。 当第二介质正在以流水线操作模式进行检查或修理时，可以装载/卸载第一介质。

公开(公告)号：US20040109598A1

公开(公告)日：2004-06-10

申请号：US10688326

申请日：2003-10-17

申请人： Photon Dynamics, Inc.

发明人： Adam Weiss ,  Afsar Saranli

IPC分类号： G06K009/00

CPC分类号： G01N21/95607 ,  G01N2021/9513 ,  G06T7/001

摘要： A concurrent low resolution/high resolution parallel scanning system and method are provided as an improvement in the scanning process of an inspection system for planar objects, such as large flat plates employed in panel displays, whereby lower resolution defect detection efficiently overlaps and parallels higher resolution defect review and classification stages in which defects are automatically defined and resolved. Although the invention is a valid solution for the more general problem of optically inspecting the surface of a flat article for defects, the invention is particularly useful for detecting pattern defects on large glass plates deposited with integrated-circuits for forming LCD flat panel displays.

摘要翻译： 提供并行的低分辨率/高分辨率并行扫描系统和方法作为平面物体的检查系统的扫描过程的改进，例如在面板显示器中使用的大平板，由此较低分辨率缺陷检测有效地重叠并且并行更高分辨率 缺陷审查和分类阶段，自动定义和解决缺陷。 虽然本发明是用于光学检查扁平制品的表面以获得缺陷的更普遍的问题的有效解决方案，但是本发明特别适用于在沉积有用于形成LCD平板显示器的集成电路的大型玻璃板上检测图案缺陷。

公开(公告)号：US20040086166A1

公开(公告)日：2004-05-06

申请号：US10439991

申请日：2003-05-16

申请人： Photon Dynamics, Inc.

发明人： Adam Weiss ,  Afsar Saranli

IPC分类号： G06K009/00

CPC分类号： G01N21/95607 ,  G01N2021/9513 ,  G06T7/001

摘要： A concurrent low resolution/high resolution parallel scanning system is provided as an improvement in the scanning process of an inspection system for planar objects, such as large flat plates employed in panel displays, whereby lower resolution defect detection efficiently overlaps and parallels higher resolution defect review and classification stages in which defects are automatically defined and resolved. Although the invention is a valid solution for the more general problem of optically inspecting the surface of a flat article for defects, the invention is particularly useful for detecting pattern defects on large glass plates deposited with integrated-circuits for forming LCD flat panel displays.

摘要翻译： 提供并行的低分辨率/高分辨率并行扫描系统作为用于平面物体的检查系统的扫描过程的改进，例如面板显示器中使用的大平板，其中较低分辨率缺陷检测有效地重叠并且并行更高分辨率缺陷检查 以及自动定义和解决缺陷的分类阶段。 虽然本发明是用于光学检查扁平制品的表面以获得缺陷的更普遍的问题的有效解决方案，但是本发明特别适用于在沉积有用于形成LCD平板显示器的集成电路的大型玻璃板上检测图案缺陷。

公开(公告)号：US5917935A

公开(公告)日：1999-06-29

申请号：US651417

申请日：1996-05-22

申请人： Jeffrey A. Hawthorne ,  Joseph Setzer

发明人： Jeffrey A. Hawthorne ,  Joseph Setzer

IPC分类号： G01R31/00 ,  G02F1/13 ,  G06T1/00 ,  G09G3/00 ,  G06K9/00

CPC分类号： G09G3/006 ,  G02F1/1303 ,  G02F1/1309 ,  G02F1/136259 ,  G02F2001/136254

摘要： A method and apparatus for identifying and classifying pixel defects, and in particular Mura defects using digital processing techniques. The present method includes steps of acquiring an image with a Mura defect, and performing a Laplacian convolution on the image to enhance the Mura defect against background illumination. A step of thresholding the Mura defect against the background illumination is also provided. The thresholded Mura defect is compared against the original Mura defect to define statistical parameters of the original Mura defect. An annular region is defined around the periphery of the Mura defect. Statistics of the annular region defines statistics for background illumination as compared to the original Mura defect. The statistics from the Mura defect are then compared to the background illumination statistics for Mura defect classification and analysis.

摘要翻译： 用于使用数字处理技术来识别和分类像素缺陷，特别是Mura缺陷的方法和装置。 本方法包括以下步骤：获取具有Mura缺陷的图像，以及对图像执行拉普拉斯积分以增强Mura缺陷以抵抗背景照明。 还提供了针对背景照明来限制Mura缺陷的步骤。 将阈值的Mura缺陷与原始Mura缺陷进行比较，以定义原始Mura缺陷的统计参数。 围绕Mura缺陷的周边限定环形区域。 与原始Mura缺陷相比，环形区域的统计定义了背景照明的统计。 然后将Mura缺陷的统计数据与Mura缺陷分类和分析的背景照明统计量进行比较。

公开(公告)号：US5631733A

公开(公告)日：1997-05-20

申请号：US375903

申请日：1995-01-20

申请人： Francois J. Henley

发明人： Francois J. Henley

IPC分类号： G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  G06T7/00 ,  G01N21/00 ,  G06K9/00 ,  H04N7/18

CPC分类号： G01N21/9501 ,  G01N21/8806 ,  G01N21/94

摘要： A method and resulting system for directing generally collimated illumination from a source at an oblique angle to a surface under inspection (SUS) to produce scattered nonspecular energy substantially normal to the SUS and for observing the scattered nonspecular energy in one of a plurality of fractional windows of a viewed image of the SUS via a plurality of focussing elements. Such arrangement results in simultaneous and significant throughput and sensitivity enhancement over existing art. The method can be enhanced further wherein the observing step is performed through suitable relative motion of the scattering image over the imaging plane to permit over sampling. Furthermore, the DMT is significantly simplified because imaging is utilized to electronically scan the wafer instead of using opto-mechanical scanning means. Imaging sensors with an aggregate 2000.times.2000 pixel resolution could image a 200 mm wafer to 100 microns pitch.

摘要翻译： 一种用于将来自源的大致准直照明与来自检查表面（SUS）的倾斜角度引导的方法和结果系统，以产生基本上垂直于SUS的散射非特定能量，并且用于观察多个分数窗中的一个分散窗中的散射的非特定能量 通过多个聚焦元件观察SUS的图像。 这种布置导致与现有技术同时且显着的吞吐量和灵敏度增强。 该方法可以进一步增强，其中观察步骤通过在成像平面上的散射图像的适当的相对运动进行以允许过采样。 此外，DMT被显着简化，因为使用成像来电子扫描晶片，而不是使用光机械扫描装置。 具有聚合2000x2000像素分辨率的成像传感器可以将200 mm晶圆成像到100微米间距。

公开(公告)号：US5432461A

公开(公告)日：1995-07-11

申请号：US722963

申请日：1991-06-28

申请人： Francois J. Henley

发明人： Francois J. Henley

IPC分类号： G01R31/00 ,  G01R31/02 ,  G01R31/28 ,  G01R31/311 ,  G02F1/13 ,  G02F1/1333 ,  G02F1/136 ,  G02F1/1368 ,  G09G3/00 ,  G01R31/302

CPC分类号： G09G3/006 ,  G01R31/311 ,  G01N2021/9513 ,  G02F1/1309 ,  Y10S345/904

摘要： A testing method for active matrix liquid crystal display substrates having thin film transistors provided with a plurality of pixel electrodes, a plurality of source lines, and a plurality of gate lines formed on a substrate. A high resolution electro-optical element whose optical properties change when an electrical field is impressed on it is disposed above the active matrix liquid crystal display substrate and separated therefrom by an extremely small gap. Electric current is caused to flow between the pixel electrodes on the active matrix liquid crystal display substrate and the transparent thin film electrodes on the surface of the electro-optical element, creating an electrical field in the electro-optical element. By detecting local changes in the optical properties of the electro-optical element, defects in the pixels of the active matrix liquid crystal display substrate can be detected.

摘要翻译： 一种具有薄膜晶体管的有源矩阵液晶显示基板的测试方法，该薄膜晶体管设置有形成在基板上的多个像素电极，多个源极线和多个栅极线。 当在其上施加电场时光学特性改变的高分辨率电光元件设置在有源矩阵液晶显示器基板上方并且以非常小的间隙与其分离。 使电流在有源矩阵液晶显示基板上的像素电极和电光元件的表面上的透明薄膜电极之间流动，从而在电光元件中产生电场。 通过检测电光元件的光学特性的局部变化，可以检测有源矩阵液晶显示器基板的像素缺陷。

公开(公告)号：US5391985A

公开(公告)日：1995-02-21

申请号：US847556

申请日：1992-03-06

申请人： Francois J. Henley

发明人： Francois J. Henley

IPC分类号： G01R31/308 ,  G02F1/13 ,  G09G3/00 ,  G01R31/28

CPC分类号： G09G3/006 ,  G01R31/308 ,  G02F1/1309

摘要： An array of circuit elements which when excited produces voltages is analyzed by examining successive voltage images produced by the circuit elements. Specifically, the array of circuit elements is repeatedly excited at high speed while the voltage image produced by the array is electro-optically sampled at a succession of clock times using a relatively slow-speed electro-optic image sampling technique using a burst clock, thereby to capture a succession of voltage images. The successive voltage images can be viewed on a display device directly individually, or they can be processed by an image processor which compares the successive voltage images with stored representations of voltage images to yield information regarding the condition of the array. Maximum permissible device operating speed can also be determined without examination of individual cells.

摘要翻译： 通过检查由电路元件产生的连续电压图像来分析当激励产生电压时的电路元件阵列。 具体地，电路元件的阵列以高速重复激发，同时阵列产生的电压图像使用相对较慢的电光图像采样技术，使用脉冲串时钟在一连串的时钟时间采样，从而 捕获一连串的电压图像。 连续的电压图像可以直接单独地在显示设备上观看，或者它们可以由图像处理器来处理，图像处理器将连续的电压图像与电压图像的存储表示进行比较，以产生关于阵列条件的信息。 也可以在不检查单个电池的情况下确定最大允许的设备工作速度。

公开(公告)号：US5285150A

公开(公告)日：1994-02-08

申请号：US618183

申请日：1990-11-26

申请人： Francois J. Henley ,  Michael J. Miller

发明人： Francois J. Henley ,  Michael J. Miller

IPC分类号： G01R31/02 ,  G01R31/308 ,  G01R31/317 ,  G02F1/13 ,  G09G3/00 ,  G09G3/36 ,  G01R31/26

CPC分类号： G09G3/006 ,  G01R31/308 ,  G01R31/31724

摘要： A hierarchical testing method is implemented taking advantage of the nature of the most common defects in an LCD panel to achieve fast effective parametric testing of LCD panels and the like. At the first hierarchy of testing, the panel is logically divided into zones and each zone tested in isolation to identify zones having at least one defect. At the next hierarchy, electro-optic assisted zone inspection is performed to identify where within the zone the defects are located. Lastly, every pixel is inspected using a voltage imaging method to determine whether the switching integrity of the pixel is acceptable. The testing apparatus includes a plurality of panel interface devices coupling the panel under test's drive lines and gate lines to a precision measurement unit (PMU). A controller determines the PMU signals and configures the panel interface devices. The PMU monitors select drive lines and gate lines to isolate zones having defects. An electro-optic voltage measurement system is used to identify the location of defects within an isolated zone.