Inspecting a slab of material
    104.
    发明授权

    公开(公告)号:US09915564B1

    公开(公告)日:2018-03-13

    申请号:US15410328

    申请日:2017-01-19

    Abstract: According to an aspect of one or more embodiments, a system for inspecting a slab of material may include a single mode optical fiber, a broadband light source configured to emit light over the optical fiber, a beam assembly configured to receive the light over the optical fiber and direct the light toward a slab of material, a computer-controlled etalon filter configured to receive the light over the optical fiber either before the light is directed toward the slab of material or after the light has been reflected from or transmitted through the slab of material, filter the light, and direct the light over the optical fiber, and a computer-controlled spectrometer configured to receive the light over the optical fiber after the light has been filtered by the etalon filter and after the light has been reflected from or transmitted through the slab of material and spectrally analyze the light.

    MULTICHANNEL SPECTROPHOTOMETER AND DATA PROCESSING METHOD FOR MULTICHANNEL SPECTROPHOTOMETER

    公开(公告)号:US20180031423A1

    公开(公告)日:2018-02-01

    申请号:US15550006

    申请日:2015-02-09

    CPC classification number: G01J3/36 G01J3/12 G01J3/28 G01J3/2803 G01J3/42

    Abstract: A problem addressed by the present invention is to reduce the influence of stray light incident on each light-receiving element in the case of receiving each wavelength of light using a plurality of light-receiving elements. The multichannel spectrophotometer according to the present invention is a detector for simultaneously detecting the entirety of wavelength-dispersed light obtained by introducing light from a sample to a light-dispersing element (16) and dispersing this light into wavelengths by the light-dispersing element (16), including: a multichannel-type detector (17) including a plurality of light-receiving elements arranged in a one-dimensional form in a wavelength-dispersing direction of the light-dispersing element; a light amount calculator (221) for calculating the amount of light from a detection signal of each of the plurality of light-receiving elements (PD); a spectrum creator (222) for creating, from the amounts of light calculated by the light amount calculator (221), a spectrum showing a relationship between wavelength and the amount of light; and a computing section (224) for estimating, from the spectrum, the amount of stray light incident on each light-receiving element (PD) and correcting the spectrum by subtracting, from the amount of wavelength-dispersed light incident on each light-receiving element, the amount of stray light.

    Optical testing system and method
    110.
    发明授权

    公开(公告)号:US09797874B2

    公开(公告)日:2017-10-24

    申请号:US14830365

    申请日:2015-08-19

    Abstract: An optical testing system includes: a testing probe, a collecting unit, and a processing unit, wherein the testing probe includes a plurality of spectrum photodiodes used for emitting and casting monochromatic light to a sample, wherein the wavelength of the light emitted by at least one spectrum photodiode is different from that of any other. The collecting unit collects multi-way signal light obtained after the emitted monochromatic light is reflected by the sample surface. The processing unit includes a photoelectric conversion module, an adding module and a testing module. The photoelectric conversion module converts the collected multi-way signal light respectively to multi-way electrical signals. The adding module performs an adding operation for the multi-way electrical signal to obtain an operation result. The testing module tests a quality parameter of the sample according to the operation result, and outputs a testing result.

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