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公开(公告)号:US20240114676A1
公开(公告)日:2024-04-04
申请号:US18525187
申请日:2023-11-30
Applicant: Samsung Electronics Co., Ltd.
Inventor: Taejin PARK , Taehoon KIM , Kyujin KIM , Chulkwon PARK , Sunghee HAN , Yoosang HWANG
IPC: H10B12/00
CPC classification number: H10B12/34 , H10B12/053 , H10B12/315 , H10B12/482
Abstract: An integrated circuit device includes a substrate having an active region and a word line trench therein. The word line trench includes a lower portion having a first width, and an upper portion, which extends between the lower portion and a surface of the substrate and has a second width that is greater than the first width. A word line is provided, which extends in and adjacent a bottom of the word line trench. A gate insulation layer is provided, which extends between the word line and sidewalls of the lower portion of the word line trench. An electrically insulating gate capping layer is provided in the upper portion of the word line trench. An insulation liner is provided, which extends between the gate capping layer and sidewalls of the upper portion of the word line trench. The gate insulation layer extends between the insulation liner and a portion of the gate capping layer, which extends within the upper portion of the word line trench.
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公开(公告)号:US20230313365A1
公开(公告)日:2023-10-05
申请号:US18332638
申请日:2023-06-09
Inventor: Kyung-Eun BYUN , Hyoungsub KIM , Taejin PARK , Hyeonjin SHIN , Hoijoon KIM , Wonsik AHN , Mirine LEEM
IPC: C23C16/30 , B22F7/00 , C23C16/46 , C23C16/448 , C23C16/455 , H01L21/02 , H01L21/285 , H01L31/032
CPC classification number: C23C16/305 , B22F7/008 , C23C16/46 , C23C16/448 , C23C16/45502 , C23C16/45514 , H01L21/02568 , H01L21/02581 , H01L21/28568 , H01L31/0324 , B22F2207/01 , B22F2302/45
Abstract: Provided are a metal chalcogenide thin film and a method and device for manufacturing the same. The metal chalcogenide thin film includes a transition metal element and a chalcogen element, and at least one of the transition metal element and the chalcogen element having a composition gradient along the surface of the metal chalcogenide thin film, the composition gradient being an in-plane composition gradient. The metal chalcogenide thin film may be prepared by using a manufacturing method including providing a transition metal precursor and a chalcogen precursor on a substrate by using a confined reaction space in such a manner that at least one of the transition metal precursor and the chalcogen precursor forms a concentration gradient according to a position on the surface of the substrate; and heat-treating the substrate.
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公开(公告)号:US20240290868A1
公开(公告)日:2024-08-29
申请号:US18404607
申请日:2024-01-04
Applicant: Samsung Electronics Co., Ltd.
Inventor: Taejin PARK , Bongsoo KIM , Huijung KIM
CPC classification number: H01L29/6656 , H01L29/0649 , H10B12/315
Abstract: A semiconductor device includes a first structure including a first impurity region, a second impurity region, and an isolation region, a second structure on the first structure and including a contact opening penetrating through the second structure and exposing the first impurity region, a pattern structure including a contact portion connected to the first impurity region in the contact opening, and a line portion on the contact portion and the second structure, and a spacer structure between a side surface of the contact opening and the contact portion. The spacer structure includes a first spacer layer on the side surface of the contact opening, and a second spacer layer between the first spacer layer and the contact portion. A lower end of the second spacer layer is at a higher level than a lower surface of the contact portion.
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公开(公告)号:US20240365531A1
公开(公告)日:2024-10-31
申请号:US18768714
申请日:2024-07-10
Applicant: Samsung Electronics Co., Ltd.
Inventor: Taejin PARK , Hui-Jung KIM , Sangho LEE
IPC: H10B12/00
CPC classification number: H10B12/315 , H10B12/0335 , H10B12/053 , H10B12/34 , H10B12/482
Abstract: A semiconductor memory device includes active regions including first impurity regions and second impurity regions, word lines on the active regions and extended in a first direction, bit lines on the word lines and extended in a second direction crossing the first direction, the bit lines being connected to the first impurity regions, first contact plugs between the bit lines, the first contact plugs being connected to the second impurity regions, landing pads on the first contact plugs, respectively, and gap-fill structures filling spaces between the landing pads, top surfaces of the gap-fill structures being higher than top surfaces of the landing pads.
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公开(公告)号:US20240268101A1
公开(公告)日:2024-08-08
申请号:US18471900
申请日:2023-09-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: SangJae PARK , Seung-Bo KO , Keunnam KIM , Jongmin KIM , Hui-Jung KIM , Taejin PARK , Chan-Sic YOON , Kiseok LEE , Myeong-Dong LEE , Hongjun LEE
IPC: H10B12/00
CPC classification number: H10B12/482 , H10B12/05 , H10B12/34 , H10B12/485 , H10B12/488
Abstract: A semiconductor device includes first and second active patterns extending in a first direction and being adjacent to each other in a second direction, the first and second active patterns, each of which includes first and second edges spaced apart from each other in the first direction, a first storage node pad and a first storage node contact sequentially provided on the first edge of the first active pattern, a second storage node pad and a second storage node contact sequentially provided on the second edge of the second active pattern, and a fence pattern between the first and the second storage node contacts. Bottom and top surfaces of the first storage node contact are located at first and second levels, respectively. In a third direction, a width of the fence pattern at the first level is less than a width of the fence pattern at the second level.
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公开(公告)号:US20220189968A1
公开(公告)日:2022-06-16
申请号:US17373539
申请日:2021-07-12
Applicant: Samsung Electronics Co., Ltd.
Inventor: Taejin PARK , Kyujin KIM , Chulkwon PARK , Sunghee HAN
IPC: H01L27/108
Abstract: A semiconductor memory device includes a substrate comprising a memory cell region and a dummy cell region surrounding the memory cell region, the memory cell region including a plurality of memory cells, a plurality of active regions in the memory cell region, each of the plurality of active regions extending in a long axis direction, the long axis direction being a diagonal direction with respect to a first horizontal direction and a second horizontal direction orthogonal to the first horizontal direction, each of the plurality of active regions having a first width in a short axis direction orthogonal to the long axis direction, and a plurality of dummy active regions in the dummy cell region, each extending in the long axis direction, each of the plurality of dummy active regions having a second width greater than the first width in the short axis direction.
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公开(公告)号:US20210020438A1
公开(公告)日:2021-01-21
申请号:US16928560
申请日:2020-07-14
Inventor: Kyung-Eun BYUN , Hyoungsub KIM , Taejin PARK , Hoijoon KIM , Hyeonjin SHIN , Wonsik AHN , Mirine LEEM , Yeonchoo CHO
IPC: H01L21/02
Abstract: A method of forming a transition metal dichalcogenide thin film on a substrate includes treating the substrate with a metal organic material and providing a transition metal precursor and a chalcogen precursor around the substrate to synthesize transition metal dichalcogenide on the substrate. The transition metal precursor may include a transition metal element and the chalcogen precursor may include a chalcogen element.
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公开(公告)号:US20200347494A1
公开(公告)日:2020-11-05
申请号:US16861614
申请日:2020-04-29
Inventor: Kyung-Eun BYUN , Hyoungsub KIM , Taejin PARK , Hyeonjin SHIN , Hoijoon KIM , Wonsik AHN , Mirine LEEM
Abstract: Provided are a metal chalcogenide thin film and a method and device for manufacturing the same. The metal chalcogenide thin film includes a transition metal element and a chalcogen element, and at least one of the transition metal element and the chalcogen element having a composition gradient along the surface of the metal chalcogenide thin film, the composition gradient being an in-plane composition gradient. The metal chalcogenide thin film may be prepared by using a manufacturing method including providing a transition metal precursor and a chalcogen precursor on a substrate by using a confined reaction space in such a manner that at least one of the transition metal precursor and the chalcogen precursor forms a concentration gradient according to a position on the surface of the substrate; and heat-treating the substrate.
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公开(公告)号:US20240341089A1
公开(公告)日:2024-10-10
申请号:US18474699
申请日:2023-09-26
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hosang LEE , Taejin PARK , Hyunjin LEE , Heejae CHAE , Yun CHOI
IPC: H10B12/00
CPC classification number: H10B12/485 , H10B12/02 , H10B12/482
Abstract: A semiconductor device according to some example embodiments includes: a substrate that includes an active region between element isolation layers; a word line that overlaps the active region and extends in a first direction; a bit line that overlaps the active region and extends in a second direction crossing the first direction; a buried contact connected to the active region; a first pad between and connecting the active region and the bit line; a second pad between and connecting the active region and the buried contact; and a landing pad connected to the buried contact. Each of the element isolation layers includes a first element isolation layer and a second element isolation layer inside the first element isolation layer, and each of the first pad and the second pad are between the element isolation layers.
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公开(公告)号:US20240315010A1
公开(公告)日:2024-09-19
申请号:US18435198
申请日:2024-02-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Taejin PARK , Jongmin KIM , Huijung KIM , Kiseok LEE , Myeongdong LEE
IPC: H10B12/00
CPC classification number: H10B12/34 , H10B12/03 , H10B12/482 , H10B12/488
Abstract: Provided is a semiconductor device comprising: an active region defined by an element isolation film in a substrate; a word line extending in a first horizontal direction in the substrate; a bit line extending in a second horizontal direction crossing the first horizontal direction on the substrate; an additional pad disposed on the active region; and a buried contact on the additional pad wherein the buried contact is electrically connected to the active region by the additional pad, wherein the additional pad comprises a first surface that overlaps the word line in a vertical direction, and a second surface that is free of overlap with the word line in the vertical direction, and wherein, the first surface meets the second surface at a cusp.
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