Invention Application
- Patent Title: SEMICONDUCTOR MEMORY DEVICES
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Application No.: US17373539Application Date: 2021-07-12
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Publication No.: US20220189968A1Publication Date: 2022-06-16
- Inventor: Taejin PARK , Kyujin KIM , Chulkwon PARK , Sunghee HAN
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2020-0175837 20201215
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A semiconductor memory device includes a substrate comprising a memory cell region and a dummy cell region surrounding the memory cell region, the memory cell region including a plurality of memory cells, a plurality of active regions in the memory cell region, each of the plurality of active regions extending in a long axis direction, the long axis direction being a diagonal direction with respect to a first horizontal direction and a second horizontal direction orthogonal to the first horizontal direction, each of the plurality of active regions having a first width in a short axis direction orthogonal to the long axis direction, and a plurality of dummy active regions in the dummy cell region, each extending in the long axis direction, each of the plurality of dummy active regions having a second width greater than the first width in the short axis direction.
Public/Granted literature
- US11889682B2 Semiconductor memory devices Public/Granted day:2024-01-30
Information query
IPC分类: