公开(公告)号：US09310290B2

公开(公告)日：2016-04-12

申请号：US14745047

申请日：2015-06-19

Applicant: KLA-Tencor Corporation

Inventor： David Y. Wang ,  Klaus Flock ,  Lawrence Rotter ,  Shankar Krishnan ,  Johannes D. de Veer ,  Catalin Filip ,  Gregory Brady ,  Muzammil Arain ,  Andrei Shchegrov

IPC: G01N21/00 ,  G01N21/21 ,  G01N21/95 ,  G01N21/956

CPC classification number: G01N21/211 ,  G01B2210/56 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/214 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

公开(公告)号：US09116103B2

公开(公告)日：2015-08-25

申请号：US14043783

申请日：2013-10-01

Applicant: KLA-Tencor Corporation

Inventor： David Y. Wang ,  Klaus Flock ,  Lawrence Rotter ,  Shankar Krishnan ,  Johannes D. de Veer ,  Catalin Filip ,  Gregory Brady ,  Muzammil Arain ,  Andrei Shchegrov

IPC: G01J4/00 ,  G01N21/21 ,  G01N21/95 ,  G01N21/956

CPC classification number: G01N21/211 ,  G01B2210/56 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/214 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

Abstract translation: 一种装置包括（i）用于提供在从深紫外波长到红外波长的范围内可选择的多个波长的照明光束的明亮光源，（ii）照明光学器件，用于将照明光束以可选择的角度集合 （AOI）或方位角（AZ）和极化状态以提供光谱椭偏仪，其中照明光学器件包括用于控制每个可选AOI / AZ组上样品上的照明光束的光斑尺寸的变迹器，（iii ）收集光学器件，用于响应于在每个可选择的AOI / AZ集合处的照明光束和朝向基于输出光束产生输出信号或图像的检测器的偏振状态来引导来自样品的输出光束，以及（v） 控制器，用于基于输出信号或图像来表征样本的特征。

公开(公告)号：US20170052112A1

公开(公告)日：2017-02-23

申请号：US15344704

申请日：2016-11-07

Applicant: KLA-Tencor Corporation

Inventor： Lawrence Rotter ,  Klaus Flock ,  Muzammil Arain ,  David Y. Wang

IPC: G01N21/23 ,  G01N21/21 ,  G01N21/95 ,  G02B5/30

CPC classification number: G01N21/23 ,  G01N21/211 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2201/068 ,  G02B5/3083 ,  G02B5/3091 ,  G02F1/13363

Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.

Abstract translation: 提供了一种可旋转补偿器，其被配置为在宽范围的波长（包括紫外线）上传输非准直光，并且在整个孔径上具有高程度的延迟均匀性。 在一个实施例中，可旋转补偿器包括光学接触的四个单独板的堆叠。 堆叠中间的两个薄板由双折射材料制成并且被布置成形成复合物，零级双板。 剩余的两个板相对较厚并且由光学各向同性材料制成。 这些板设置在化合物的任一端，为零级双板。 低阶平板将通过光圈的延迟的灵敏度最小化为非准直光。 选择材料以确保紫外线的透射。 光学各向同性的端板最小化在薄板的光学界面处引起的相干效应。

公开(公告)号：US20150285735A1

公开(公告)日：2015-10-08

申请号：US14745047

申请日：2015-06-19

Applicant: KLA-Tencor Corporation

Inventor： David Y. Wang ,  Klaus Flock ,  Lawrence Rotter ,  Shankar Krishnan ,  Johannes D. de Veer ,  Catalin Filip ,  Gregory Brady ,  Muzammil Arain ,  Andrei Shchegrov

IPC: G01N21/21 ,  G01N21/95

CPC classification number: G01N21/211 ,  G01B2210/56 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/214 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

Abstract translation: 一种装置包括（i）用于提供在从深紫外波长到红外波长的范围内可选择的多个波长的照明光束的明亮光源，（ii）照明光学器件，用于将照明光束以可选择的角度集合 （AOI）或方位角（AZ）和极化状态以提供光谱椭偏仪，其中照明光学器件包括用于控制每个可选AOI / AZ组上样品上的照明光束的光斑尺寸的变迹器，（iii ）收集光学器件，用于响应于在每个可选择的AOI / AZ集合处的照明光束和朝向基于输出光束产生输出信号或图像的检测器的偏振状态来引导来自样品的输出光束，以及（v） 控制器，用于基于输出信号或图像来表征样本的特征。

公开(公告)号：US09857292B2

公开(公告)日：2018-01-02

申请号：US15344704

申请日：2016-11-07

Applicant: KLA-Tencor Corporation

Inventor： Lawrence Rotter ,  Klaus Flock ,  Muzammil Arain ,  David Y. Wang

IPC: G01J4/00 ,  G01N21/23 ,  G02B5/30 ,  G01N21/21 ,  G02F1/13363 ,  G01N21/95

CPC classification number: G01N21/23 ,  G01N21/211 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2201/068 ,  G02B5/3083 ,  G02B5/3091 ,  G02F1/13363

Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.

公开(公告)号：US09519093B2

公开(公告)日：2016-12-13

申请号：US14466369

申请日：2014-08-22

Applicant: KLA-Tencor Corporation

Inventor： Lawrence Rotter ,  Klaus Flock ,  Muzammil Arain ,  David Y. Wang

IPC: G01J4/00 ,  G02B5/30 ,  G01N21/21 ,  G02F1/13363

CPC classification number: G01N21/23 ,  G01N21/211 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2201/068 ,  G02B5/3083 ,  G02B5/3091 ,  G02F1/13363

Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.

Abstract translation: 提供了一种可旋转补偿器，其被配置为在宽范围的波长（包括紫外线）上传输非准直光，并且在整个孔径上具有高程度的延迟均匀性。 在一个实施例中，可旋转补偿器包括光学接触的四个单独板的堆叠。 堆叠中间的两个薄板由双折射材料制成并且被布置成形成复合物，零级双板。 剩余的两个板相对较厚并且由光学各向同性材料制成。 这些板设置在化合物的任一端，为零级双板。 低阶平板将通过光圈的延迟的灵敏度最小化为非准直光。 选择材料以确保紫外线的透射。 光学各向同性的端板最小化在薄板的光学界面处引起的相干效应。

公开(公告)号：US20150055123A1

公开(公告)日：2015-02-26

申请号：US14466369

申请日：2014-08-22

Applicant: KLA-Tencor Corporation

Inventor： Lawrence Rotter ,  Klaus Flock ,  Muzammil Arain ,  David Y. Wang

IPC: G02B5/30 ,  G01N21/21 ,  G01J1/42

CPC classification number: G01N21/23 ,  G01N21/211 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2201/068 ,  G02B5/3083 ,  G02B5/3091 ,  G02F1/13363

Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.

Abstract translation: 提供了一种可旋转补偿器，其被配置为在宽范围的波长（包括紫外线）上传输非准直光，并且在整个孔径上具有高程度的延迟均匀性。 在一个实施例中，可旋转补偿器包括光学接触的四个单独板的堆叠。 堆叠中间的两个薄板由双折射材料制成并且被布置成形成复合物，零级双板。 剩余的两个板相对较厚并且由光学各向同性材料制成。 这些板设置在化合物的任一端，为零级双板。 低阶平板将通过光圈的延迟的灵敏度最小化为非准直光。 选择材料以确保紫外线的透射。 光学各向同性的端板最小化在薄板的光学界面处引起的相干效应。

公开(公告)号：US20140375981A1

公开(公告)日：2014-12-25

申请号：US14043783

申请日：2013-10-01

Applicant: KLA-Tencor Corporation

Inventor： David Y. Wang ,  Klaus Flock ,  Lawrence Rotter ,  Shankar Krishnan ,  Johannes D. de Veer ,  Catalin Filip ,  Gregory Brady ,  Muzammil Arain ,  Andrei Shchegrov

IPC: G01N21/88

CPC classification number: G01N21/211 ,  G01B2210/56 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/214 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

Abstract translation: 一种装置包括（i）用于提供在从深紫外波长到红外波长的范围内可选择的多个波长的照明光束的明亮光源，（ii）照明光学器件，用于将照明光束以可选择的角度集合 （AOI）或方位角（AZ）和极化状态以提供光谱椭偏仪，其中照明光学器件包括用于控制每个可选AOI / AZ组上样品上的照明光束的光斑尺寸的变迹器，（iii ）收集光学器件，用于响应于在每个可选择的AOI / AZ集合处的照明光束和朝向基于输出光束产生输出信号或图像的检测器的偏振状态来引导来自样品的输出光束，以及（v） 控制器，用于基于输出信号或图像来表征样本的特征。

公开(公告)号：US20130245985A1

公开(公告)日：2013-09-19

申请号：US13794337

申请日：2013-03-11

Applicant: KLA-TENCOR CORPORATION

Inventor： Klaus Flock ,  Lawrence Rotter ,  Muzammil Arain

IPC: G05B23/00

CPC classification number: G05B23/00 ,  G03F7/70625

Abstract: Methods and systems for matching critical dimension measurement applications at high precision across multiple optical metrology systems are presented. In one aspect, machine parameter values of a metrology system are calibrated based on critical dimension measurement data. In one further aspect, calibration of the machine parameter values is based on critical dimension measurement data collected by a target measurement system from a specimen with assigned critical dimension parameter values obtained from a reference measurement source. In another further aspect, the calibration of the machine parameter values of a target measurement system is based on measurement data without knowledge of critical dimension parameter values. In some examples, the measurement data includes critical dimension measurement data and thin film measurement data. Calibration of machine parameter values based on critical dimension data enhances application and tool-to-tool matching among systems for measurement of critical dimensions, film thickness, film composition, and overlay.

Abstract translation: 介绍了在多个光学测量系统中以高精度匹配关键尺寸测量应用的方法和系统。 在一个方面，测量系统的机器参数值基于关键尺寸测量数据进行校准。 在另一方面，机器参数值的校准基于由目标测量系统从具有从参考测量源获得的分配的临界尺寸参数值的样本收集的临界尺寸测量数据。 在另一方面，目标测量系统的机器参数值的校准基于测量数据，而不知道关键尺寸参数值。 在一些示例中，测量数据包括临界尺寸测量数据和薄膜测量数据。 基于关键尺寸数据校准机器参数值可增强用于测量关键尺寸，膜厚度，膜成分和覆盖层的系统之间的应用和工具对刀具匹配。