公开(公告)号：US10060884B2

公开(公告)日：2018-08-28

申请号：US15184590

申请日：2016-06-16

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N21/88 ,  G01N21/95 ,  G01N29/24 ,  G01N21/956

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

公开(公告)号：US09395340B2

公开(公告)日：2016-07-19

申请号：US13844576

申请日：2013-03-15

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N21/88 ,  G01N21/95 ,  G01N29/24 ,  G01N21/956

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。

公开(公告)号：US20150136948A1

公开(公告)日：2015-05-21

申请号：US14517375

申请日：2014-10-17

Applicant: KLA-Tencor Corporation

Inventor： Derek Mackay ,  Paul Donders ,  Kai Cao ,  Jeongsik Lim

IPC: H01J40/12 ,  H01J40/16

CPC classification number: H01J40/12 ,  H01J40/16 ,  H01J43/20

Abstract: A bias-variant photomultiplier tube (PMT) includes a photocathode that when operating absorbs photons and emit photoelectrons responsive to the absorbed photons. The bias-variant PMTO also includes a plurality of dynodes that receive the photoelectrons emitted by the photocathode. The plurality of dynodes include a first pair of dynodes having a first bias difference and at least a second pair of dynodes having a second bias. The second bias difference is greater than the first bias difference. The bias-variant PMTO also includes an anode to receive photoelectrons directed from the plurality of dynodes.

Abstract translation: 偏置型光电倍增管（PMT）包括光电阴极，当操作时吸收光子并响应于吸收的光子发射光电子。 偏置型PMTO还包括接收由光电阴极发射的光电子的多个倍增电极。 多个倍增电极包括具有第一偏置差的第一对倍增极和具有第二偏压的至少第二对倍增极。 第二偏差差大于第一偏差差。 偏置变型PMTO还包括阳极以接收从多个倍增电极引导的光电子。

公开(公告)号：US20160313256A1

公开(公告)日：2016-10-27

申请号：US15004331

申请日：2016-01-22

Applicant: KLA-Tencor Corporation

Inventor： Jamie M. Sullivan ,  Wenjian Cai ,  Kai Cao

IPC: G01N21/88 ,  G02F1/33 ,  G02B13/00 ,  G01N21/95

CPC classification number: G02B13/0095 ,  G01N21/93 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2201/106 ,  G01N2201/12

Abstract: A spot scanning imaging system with run-time alignment includes a beam scanning device configured to linearly scan a focused beam of illumination across a sample, one or more detectors positioned to receive light from the sample, and a controller communicatively coupled to the beam scanning apparatus, the sample stage, and the one or more detectors. The controller is configured to store a first image, transmit a set of drive signals to at least one of the beam scanning device, the sample stage, or the one or more detectors, compare at least a portion of the second sampling grid to at least a portion of the first sampling grid to determine one or more offset errors, and adjust at least one drive signal in the set of drive signals based on the one or more offset errors such that the second sample grid overlaps the first sample grid.

Abstract translation: 具有运行时间对准的点扫描成像系统包括：束扫描装置，其被配置为线性扫描横跨样本的聚焦光束，一个或多个检测器，定位成接收来自样品的光;以及控制器，其通信地耦合到光束扫描装置 ，样品台和一个或多个检测器。 所述控制器被配置为存储第一图像，将一组驱动信号发送到所述波束扫描设备，所述采样台或所述一个或多个检测器中的至少一个，将所述第二采样网格的至少一部分至少比较 第一采样网格的一部分以确定一个或多个偏移误差，并且基于所述一个或多个偏移误差来调整所述驱动信号集合中的至少一个驱动信号，使得所述第二采样网格与所述第一采样网格重叠。

公开(公告)号：US09389166B2

公开(公告)日：2016-07-12

申请号：US13675687

申请日：2012-11-13

Applicant: KLA-Tencor Corporation

Inventor： Ralph C. Wolf ,  Grace H. Chen ,  Kai Cao ,  Jamie M. Sullivan ,  Paul J. Donders ,  Derek C. Mackay

IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G01B11/24

CPC classification number: G01N21/00 ,  G01B11/24 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956

Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. An incident beam is directed across a plurality of consecutive scan portions of a specimen so that an output beam profile from each scan portion is consecutively collected by a photomultiplier tube (PMT), and the scan portions include at least one or more first scan portions and a next scan portion that is scanned after the one or more first scan portions. After or while the incident beam is directed to the one or more first scan portions of the specimen, an output signal for each first scan portion is obtained based on the output beam profile that is collected by the PMT for each first scan portion. An expected output beam profile for the next scan portion is determined based on the output signal that is obtained for each one or more first scan portions. As the incident beam is directed towards the next scan portion, a gain input to the PMT for the next scan portion is set based on the expected output beam profile so that the gain for such next scan portion results in a measured signal at the PMT that is within a predefined specification of the PMT or other hardware components that receive a measured signal from the PMT.

Abstract translation: 公开了用于检查或测量样本的装置和方法。 入射光束穿过样本的多个连续的扫描部分，使得来自每个扫描部分的输出光束轮廓由光电倍增管（PMT）连续收集，并且扫描部分包括至少一个或多个第一扫描部分和 在所述一个或多个第一扫描部分之后被扫描的下一个扫描部分。 在入射光束被引导到样本的一个或多个第一扫描部分之后或之后，基于由PMT针对每个第一扫描部分收集的输出光束轮廓，获得每个第一扫描部分的输出信号。 基于对于每个一个或多个第一扫描部分获得的输出信号来确定用于下一扫描部分的预期输出光束轮廓。 当入射光束被引导到下一个扫描部分时，基于预期的输出光束分布来设置输入到下一个扫描部分的PMT的增益，使得这样的下一扫描部分的增益导致PMT处的测量信号， 在接收来自PMT的测量信号的PMT或其他硬件组件的预定义规范内。

公开(公告)号：US09941103B2

公开(公告)日：2018-04-10

申请号：US14517375

申请日：2014-10-17

Applicant: KLA-Tencor Corporation

Inventor： Derek Mackay ,  Paul Donders ,  Kai Cao ,  Jeongsik Lim

IPC: H01J40/14 ,  H01J40/12 ,  H01J40/16 ,  H01J43/20

CPC classification number: H01J40/12 ,  H01J40/16 ,  H01J43/20

Abstract: A bias-variant photomultiplier tube (PMT) includes a photocathode that when operating absorbs photons and emits photoelectrons responsive to the absorbed photons. The bias-variant PMTO also includes a plurality of dynodes that receive the photoelectrons emitted by the photocathode. The plurality of dynodes include a first pair of dynodes having a first bias difference and at least a second pair of dynodes having a second bias difference. The second bias difference is greater than the first bias difference. The bias-variant PMTO also includes an anode to receive photoelectrons directed from the plurality of dynodes.

公开(公告)号：US09864173B2

公开(公告)日：2018-01-09

申请号：US15004331

申请日：2016-01-22

Applicant: KLA-Tencor Corporation

Inventor： Jamie M. Sullivan ,  Wenjian Cai ,  Kai Cao

IPC: G01B11/00 ,  G02B13/00 ,  G01N21/95 ,  G01N21/956

CPC classification number: G02B13/0095 ,  G01N21/93 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2201/106 ,  G01N2201/12

Abstract: A spot scanning imaging system with run-time alignment includes a beam scanning device configured to linearly scan a focused beam of illumination across a sample, one or more detectors positioned to receive light from the sample, and a controller communicatively coupled to the beam scanning apparatus, the sample stage, and the one or more detectors. The controller is configured to store a first image, transmit a set of drive signals to at least one of the beam scanning device, the sample stage, or the one or more detectors, compare at least a portion of the second sampling grid to at least a portion of the first sampling grid to determine one or more offset errors, and adjust at least one drive signal in the set of drive signals based on the one or more offset errors such that the second sample grid overlaps the first sample grid.

公开(公告)号：US20160290971A1

公开(公告)日：2016-10-06

申请号：US15184590

申请日：2016-06-16

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N29/24 ,  G01N21/95 ,  G01N21/956 ,  G01N21/88

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 预定间隔可以是扫描长度或整数倍的扫描长度。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。

公开(公告)号：US09208553B2

公开(公告)日：2015-12-08

申请号：US14634372

申请日：2015-02-27

Applicant: KLA-Tencor Corporation

Inventor： Kai Cao ,  Dennis G. Emge ,  Zhiqin Wang ,  Jamie M. Sullivan ,  Wenjian Cai ,  Henrik Nielsen

IPC: G06K9/00 ,  G06T7/00 ,  G01N21/95

CPC classification number: G06T7/0004 ,  G01N21/9501

Abstract: An inspection system comprises a beam generator module for deflecting spots across scan portions of a specimen. The system also includes detection channels for sensing light emanating from a specimen in response to an incident beam directed towards such specimen and generating a detected image for each scan portion. The system comprises a synchronization system comprising clock generator modules for generating timing signals for deflectors of the beam generator module to scan the spots across the scan portions at a specified frequency and each of the detection channels to generate the corresponding detected image at a specified sampling rate. The timing signals are generated based on a common system clock and cause the deflectors to scan the spots and the detection channels to generate a detected image at a synchronized timing so as to minimize jitter between the scan portions in the response image.

公开(公告)号：US08995746B2

公开(公告)日：2015-03-31

申请号：US13898736

申请日：2013-05-21

Applicant: KLA-Tencor Corporation

Inventor： Kai Cao ,  Dennis G. Emge ,  Zhiqin Wang ,  Jamie M. Sullivan ,  Wenjian Cai ,  Henrik Nielsen

IPC: G06T9/00 ,  G06T7/00

CPC classification number: G06T7/0004 ,  G01N21/9501

Abstract: An inspection system comprises a beam generator module for deflecting spots across scan portions of a specimen. The system also includes detection channels for sensing light emanating from a specimen in response to an incident beam directed towards such specimen and generating a detected image for each scan portion. The system comprises a synchronization system comprising clock generator modules for generating timing signals for deflectors of the beam generator module to scan the spots across the scan portions at a specified frequency and each of the detection channels to generate the corresponding detected image at a specified sampling rate. The timing signals are generated based on a common system clock and cause the deflectors to scan the spots and the detection channels to generate a detected image at a synchronized timing so as to minimize jitter between the scan portions in the response image.

Abstract translation: 检查系统包括用于偏转样本的扫描部分上的斑点的束发生器模块。 该系统还包括用于响应于朝向这种样本的入射光束感测从样本发出的光的检测通道，并且为每个扫描部分生成检测到的图像。 该系统包括同步系统，其包括用于产生用于波束发生器模块的偏转器的定时信号的时钟发生器模块，以扫描指定频率的扫描部分上的点和每个检测通道，以指定的采样率产生相应的检测到的图像 。 基于公共系统时钟生成定时信号，并且使得偏转器扫描点和检测通道，以在同步定时产生检测图像，以使响应图像中的扫描部分之间的抖动最小化。