公开(公告)号：US09208553B2

公开(公告)日：2015-12-08

申请号：US14634372

申请日：2015-02-27

Applicant: KLA-Tencor Corporation

Inventor： Kai Cao ,  Dennis G. Emge ,  Zhiqin Wang ,  Jamie M. Sullivan ,  Wenjian Cai ,  Henrik Nielsen

IPC: G06K9/00 ,  G06T7/00 ,  G01N21/95

CPC classification number: G06T7/0004 ,  G01N21/9501

Abstract: An inspection system comprises a beam generator module for deflecting spots across scan portions of a specimen. The system also includes detection channels for sensing light emanating from a specimen in response to an incident beam directed towards such specimen and generating a detected image for each scan portion. The system comprises a synchronization system comprising clock generator modules for generating timing signals for deflectors of the beam generator module to scan the spots across the scan portions at a specified frequency and each of the detection channels to generate the corresponding detected image at a specified sampling rate. The timing signals are generated based on a common system clock and cause the deflectors to scan the spots and the detection channels to generate a detected image at a synchronized timing so as to minimize jitter between the scan portions in the response image.

公开(公告)号：US08995746B2

公开(公告)日：2015-03-31

申请号：US13898736

申请日：2013-05-21

Applicant: KLA-Tencor Corporation

Inventor： Kai Cao ,  Dennis G. Emge ,  Zhiqin Wang ,  Jamie M. Sullivan ,  Wenjian Cai ,  Henrik Nielsen

IPC: G06T9/00 ,  G06T7/00

CPC classification number: G06T7/0004 ,  G01N21/9501

Abstract: An inspection system comprises a beam generator module for deflecting spots across scan portions of a specimen. The system also includes detection channels for sensing light emanating from a specimen in response to an incident beam directed towards such specimen and generating a detected image for each scan portion. The system comprises a synchronization system comprising clock generator modules for generating timing signals for deflectors of the beam generator module to scan the spots across the scan portions at a specified frequency and each of the detection channels to generate the corresponding detected image at a specified sampling rate. The timing signals are generated based on a common system clock and cause the deflectors to scan the spots and the detection channels to generate a detected image at a synchronized timing so as to minimize jitter between the scan portions in the response image.

Abstract translation: 检查系统包括用于偏转样本的扫描部分上的斑点的束发生器模块。 该系统还包括用于响应于朝向这种样本的入射光束感测从样本发出的光的检测通道，并且为每个扫描部分生成检测到的图像。 该系统包括同步系统，其包括用于产生用于波束发生器模块的偏转器的定时信号的时钟发生器模块，以扫描指定频率的扫描部分上的点和每个检测通道，以指定的采样率产生相应的检测到的图像 。 基于公共系统时钟生成定时信号，并且使得偏转器扫描点和检测通道，以在同步定时产生检测图像，以使响应图像中的扫描部分之间的抖动最小化。

公开(公告)号：US20140270471A1

公开(公告)日：2014-09-18

申请号：US13898736

申请日：2013-05-21

Applicant: KLA-Tencor Corporation

Inventor： Kai Cao ,  Dennis G. Emge ,  Zhiqin Wang ,  Jamie M. Sullivan ,  Wenjian Cai ,  Henrik Nielsen

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  G01N21/9501

Abstract: An inspection system comprises a beam generator module for deflecting spots across scan portions of a specimen. The system also includes detection channels for sensing light emanating from a specimen in response to an incident beam directed towards such specimen and generating a detected image for each scan portion. The system comprises a synchronization system comprising clock generator modules for generating timing signals for deflectors of the beam generator module to scan the spots across the scan portions at a specified frequency and each of the detection channels to generate the corresponding detected image at a specified sampling rate. The timing signals are generated based on a common system clock and cause the deflectors to scan the spots and the detection channels to generate a detected image at a synchronized timing so as to minimize jitter between the scan portions in the response image.

Abstract translation: 检查系统包括用于偏转样本的扫描部分上的斑点的束发生器模块。 该系统还包括用于响应于朝向这种样本的入射光束感测从样本发出的光的检测通道，并且为每个扫描部分生成检测到的图像。 该系统包括同步系统，其包括用于产生用于波束发生器模块的偏转器的定时信号的时钟发生器模块，以扫描指定频率的扫描部分上的点和每个检测通道，以指定的采样率产生相应的检测图像 。 基于公共系统时钟生成定时信号，并且使得偏转器扫描点和检测通道，以在同步定时产生检测图像，以使响应图像中的扫描部分之间的抖动最小化。

公开(公告)号：US20150170357A1

公开(公告)日：2015-06-18

申请号：US14634372

申请日：2015-02-27

Applicant: KLA-Tencor Corporation

Inventor： Kai Cao ,  Dennis G. Emge ,  Zhiqin Wang ,  Jamie M. Sullivan ,  Wenjian Cai ,  Henrik Nielsen

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  G01N21/9501

Abstract: An inspection system comprises a beam generator module for deflecting spots across scan portions of a specimen. The system also includes detection channels for sensing light emanating from a specimen in response to an incident beam directed towards such specimen and generating a detected image for each scan portion. The system comprises a synchronization system comprising clock generator modules for generating timing signals for deflectors of the beam generator module to scan the spots across the scan portions at a specified frequency and each of the detection channels to generate the corresponding detected image at a specified sampling rate. The timing signals are generated based on a common system clock and cause the deflectors to scan the spots and the detection channels to generate a detected image at a synchronized timing so as to minimize jitter between the scan portions in the response image.

Abstract translation: 检查系统包括用于偏转样本的扫描部分上的斑点的束发生器模块。 该系统还包括用于响应于朝向这种样本的入射光束感测从样本发出的光的检测通道，并且为每个扫描部分生成检测到的图像。 该系统包括同步系统，其包括用于产生用于波束发生器模块的偏转器的定时信号的时钟发生器模块，以扫描指定频率的扫描部分上的点和每个检测通道，以指定的采样率产生相应的检测图像 。 基于公共系统时钟生成定时信号，并且使得偏转器扫描点和检测通道，以在同步定时产生检测图像，以使响应图像中的扫描部分之间的抖动最小化。