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公开(公告)号：US10186406B2
公开(公告)日：2019-01-22
申请号：US15268326
申请日：2016-09-16
Applicant: KLA—Tencor Corporation
Inventor： Derek Mackay
Abstract: A multi-channel photomultiplier tube (PMT) detector assembly includes a photocathode. The detector assembly includes a first dynode channel including a first set of dynode pathways. The first set of dynode pathways include a plurality of dynode stages configured to receive a first portion of the photoelectrons and direct a first amplified photoelectron current onto a first anode. The detector assembly includes an additional dynode channel including an additional set of dynode pathways. The additional set of dynode pathways includes a plurality of dynode stages configured to receive an additional portion of the photoelectrons and direct an additional amplified photoelectron current onto an additional anode. The detector assembly includes a grid configured to direct the first portion of the photoelectrons to one or more of the first set of pathways and an additional portion of the photoelectrons to one or more of the additional set of pathways.
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公开(公告)号：US20150136948A1
公开(公告)日：2015-05-21
申请号：US14517375
申请日：2014-10-17
Applicant: KLA-Tencor Corporation
Inventor： Derek Mackay , Paul Donders , Kai Cao , Jeongsik Lim
Abstract: A bias-variant photomultiplier tube (PMT) includes a photocathode that when operating absorbs photons and emit photoelectrons responsive to the absorbed photons. The bias-variant PMTO also includes a plurality of dynodes that receive the photoelectrons emitted by the photocathode. The plurality of dynodes include a first pair of dynodes having a first bias difference and at least a second pair of dynodes having a second bias. The second bias difference is greater than the first bias difference. The bias-variant PMTO also includes an anode to receive photoelectrons directed from the plurality of dynodes.
Abstract translation: 偏置型光电倍增管（PMT）包括光电阴极，当操作时吸收光子并响应于吸收的光子发射光电子。 偏置型PMTO还包括接收由光电阴极发射的光电子的多个倍增电极。 多个倍增电极包括具有第一偏置差的第一对倍增极和具有第二偏压的至少第二对倍增极。 第二偏差差大于第一偏差差。 偏置变型PMTO还包括阳极以接收从多个倍增电极引导的光电子。
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公开(公告)号：US20170287686A1
公开(公告)日：2017-10-05
申请号：US15268326
申请日：2016-09-16
Applicant: KLA-Tencor Corporation
Inventor： Derek Mackay
CPC classification number: H01J43/20 , G01N21/8806 , G01N21/9501
Abstract: A multi-channel photomultiplier tube (PMT) detector assembly includes a photocathode. The detector assembly includes a first dynode channel including a first set of dynode pathways. The first set of dynode pathways include a plurality of dynode stages configured to receive a first portion of the photoelectrons and direct a first amplified photoelectron current onto a first anode. The detector assembly includes an additional dynode channel including an additional set of dynode pathways. The additional set of dynode pathways includes a plurality of dynode stages configured to receive an additional portion of the photoelectrons and direct an additional amplified photoelectron current onto an additional anode. The detector assembly includes a grid configured to direct the first portion of the photoelectrons to one or more of the first set of pathways and an additional portion of the photoelectrons to one or more of the additional set of pathways.
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公开(公告)号：US09941103B2
公开(公告)日：2018-04-10
申请号：US14517375
申请日：2014-10-17
Applicant: KLA-Tencor Corporation
Inventor： Derek Mackay , Paul Donders , Kai Cao , Jeongsik Lim
Abstract: A bias-variant photomultiplier tube (PMT) includes a photocathode that when operating absorbs photons and emits photoelectrons responsive to the absorbed photons. The bias-variant PMTO also includes a plurality of dynodes that receive the photoelectrons emitted by the photocathode. The plurality of dynodes include a first pair of dynodes having a first bias difference and at least a second pair of dynodes having a second bias difference. The second bias difference is greater than the first bias difference. The bias-variant PMTO also includes an anode to receive photoelectrons directed from the plurality of dynodes.
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