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公开(公告)号：US20170280544A1
公开(公告)日：2017-09-28
申请号：US15613789
申请日：2017-06-05
Applicant: GIGAPHOTON INC.
Inventor： Yoshifumi UENO , Takashi SUGANUMA , Yoshiaki KUROSAWA
CPC classification number: H05G2/008 , G01J1/0238 , G01J1/0403 , G01J1/0411 , G01J1/0448 , G01J1/4257 , G02B17/0892 , G02B17/0896 , G02B19/0095 , G02B26/0816 , H01S3/005
Abstract: A beam delivery system may include: beam adjusters configured to adjust a divergence angle of a pulse laser beam; a beam sampler configured to separate a part of the pulse laser beam outputted from a first beam adjuster provided at the most downstream among the beam adjusters to acquire a sample beam; a beam monitor configured to receive the sample beam and output a monitored diameter; and a beam delivery controller configured to control the beam adjusters based on the monitored diameter. The beam delivery controller may adjust each of beam adjusters other than the first beam adjuster selected one after another from the most upstream so that the monitored diameter at the beam monitor becomes a predetermined value specific to the beam adjuster, and adjust the first beam adjuster so that the pulse laser beam becomes focused at a position downstream of a target position.
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2.发明申请公开(公告)号：US20170299857A1
公开(公告)日：2017-10-19
申请号：US15642745
申请日：2017-07-06
Applicant: Gigaphoton Inc.
Inventor： Yoshiaki KUROSAWA , Takashi SUGANUMA
CPC classification number: G02B26/023 , G02B27/14 , G21K1/06 , H01S3/005 , H01S3/1003 , H01S3/2316 , H05G2/008
Abstract: A beam dump apparatus may include: an attenuator module; a beam dump module; and a control unit. The attenuator module includes: a first beam splitter provided inclined with respect to the optical axis of a laser beam at a first angle; a second beam splitter provided inclined with respect to the optical axis at a second angle; a first beam dumper provided such that the laser beam from the first beam splitter enters thereinto; a second beam dumper provided such that the laser beam from the second beam splitter enters thereinto; and a first stage that causes the beam splitters to advance into and retreat from the optical path. The beam dump module includes: a mirror; a third beam dumper provided such that the laser beam from the mirror enters thereinto; and a second stage that causes the mirror to advance into and retreat from the optical path.
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公开(公告)号：US20170250517A1
公开(公告)日：2017-08-31
申请号：US15590238
申请日：2017-05-09
Applicant: Gigaphoton Inc.
Inventor： Toru SUZUKI , Takashi SUGANUMA , Akihiro TAKAYAMA , Yoshiaki KUROSAWA
Abstract: A beam adjusting apparatus of an extreme ultraviolet light generating apparatus may include: a first pair of mirrors constituted by a first concave mirror and a first convex mirror, provided along the optical path of the pulsed laser beam; a second pair of mirrors constituted by a second concave mirror and a second convex mirror, which are arranged in an order reversed from the order of arrangement of the first concave mirror and the first convex mirror, provided along the optical path of the pulsed laser beam downstream from the first pair of mirrors; and a moving apparatus configured to simultaneously increase or simultaneously decrease the distance between the first concave mirror and the first convex mirror and the distance between the second concave mirror and the second convex mirror.
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公开(公告)号：US20150351208A1
公开(公告)日：2015-12-03
申请号：US14737262
申请日：2015-06-11
Applicant: GIGAPHOTON INC.
Inventor： Takashi SUGANUMA , Toru SUZUKI , Takahisa FUJIMAKI , Yoshiaki KUROSAWA
CPC classification number: H05G2/008 , G02F1/0136 , G02F1/09 , H01S3/005 , H01S3/0078 , H01S3/0085 , H01S3/10023 , H01S3/2232 , H01S3/2316 , H01S2301/02 , H05G2/003
Abstract: There may be included: a master oscillator configured to output pulsed laser light; a power amplifier disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and a wavelength filter disposed between the master oscillator and the power amplifier in the optical path of the pulsed laser light, and configured to allow the pulsed laser light to pass therethrough and suppress transmission of light with a wavelength other than a wavelength of the pulsed laser light.
Abstract translation: 可以包括：主振荡器，被配置为输出脉冲激光; 功率放大器，设置在脉冲激光的光路中，以放大脉冲激光; 以及布置在脉冲激光的光路中的主振荡器和功率放大器之间的波长滤波器，并且被配置为允许脉冲激光通过，并抑制具有除了脉冲激光器的波长以外的波长的光的透射 光。
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公开(公告)号：US20200044407A1
公开(公告)日：2020-02-06
申请号：US16595782
申请日：2019-10-08
Applicant: Gigaphoton Inc.
Inventor： Tsukasa HORI , Yoshifumi UENO , Takayuki YABU , Yoshiaki KUROSAWA
Abstract: A laser apparatus includes: a plurality of envelope blocks each provided with an optical element and a first temperature sensor and covering part of a laser beam path, the optical element being disposed on the laser beam path, the first temperature sensor being configured to measure a first temperature of gas at a position away from the optical element; an envelope body including the envelope blocks and covering the laser beam path; and a control unit connected with each first temperature sensor and configured to specify an envelope block at which increase of the first temperature is measured in the envelope body as an envelope block at which anomaly is occurring.
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Patent Agency Ranking
公开(公告)号：US20160316551A1
公开(公告)日：2016-10-27
申请号：US15202781
申请日：2016-07-06
Applicant: GIGAPHOTON INC.
Inventor： Yoshiaki KUROSAWA
CPC classification number: H05G2/008 , H01S3/0071 , H01S3/034 , H01S3/1003 , H01S3/115 , H01S3/2232 , H01S3/2316 , H01S3/2325 , H05G2/003
Abstract: An example laser apparatus of the disclosure may include an oscillator capable of outputting a laser beam, a slab optical amplifier capable of amplifying the laser beam outputted by the oscillator by passing the laser beam through an optical amplification region shaped like a slab and outputting the amplified laser beam, and a mirror disposed on an optical path of the laser beam to enter the slab optical amplifier or the amplified laser beam outputted from the slab optical amplifier, the mirror being movable in a direction parallel to a plane where the laser beam travels in the slab optical amplifier.
Abstract translation: 本公开的示例性激光装置可以包括能够输出激光束的振荡器，能够通过使激光束通过形状像平板的光放大区域来放大由振荡器输出的激光束的平板光学放大器，并输出放大的 激光束和设置在激光束的光路上的反射镜进入板式光放大器或从平板光放大器输出的放大激光束，反射镜可以在平行于激光束行进的平面的方向上移动 板式光放大器。
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公开(公告)号：US20160156150A1
公开(公告)日：2016-06-02
申请号：US15016961
申请日：2016-02-05
Applicant: GIGAPHOTON INC.
Inventor： Yoshiaki KUROSAWA , Yasufumi KAWASUJI
CPC classification number: H01S3/2316 , G03F7/70041 , H01S3/005 , H01S3/034 , H01S3/10061 , H01S3/107 , H01S3/2232 , H01S2301/02 , H05G2/003 , H05G2/005 , H05G2/008
Abstract: An example of the disclosure is a laser apparatus including a master oscillator capable of outputting a pulse laser beam, a plurality of optical amplifiers disposed on an optical path of the pulse laser beam outputted from the master oscillator and configured to sequentially amplify the pulse laser beam, an optical reflector capable of passing the pulse laser beam therethrough and reflecting a self-oscillation beam generated in one of the plurality of optical amplifiers, and an optical absorber capable of receiving and absorbing the self-oscillation beam reflected by the optical reflector.
Abstract translation: 本公开的一个实例是一种激光装置，其包括能够输出脉冲激光束的主振荡器，设置在从主振荡器输出的脉冲激光束的光路上的多个光放大器，并且被配置为顺序地放大脉冲激光束 能够使脉冲激光束通过并反射在多个光放大器之一中产生的自振荡光束的光反射器，以及能够接收和吸收由光反射器反射的自振荡光束的光吸收体。
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公开(公告)号：US20190288478A1
公开(公告)日：2019-09-19
申请号：US16429090
申请日：2019-06-03
Applicant: Gigaphoton Inc.
Inventor： Yoshiaki KUROSAWA
Abstract: A laser apparatus according to an aspect of the present disclosure includes: a master oscillator; at least one amplifier disposed on an optical path of a first pulse laser beam output from the master oscillator; a sensor disposed on an optical path of a second pulse laser beam output from the at least one amplifier; and a laser controller. The laser controller causes the laser apparatus to perform burst oscillation based on a burst signal from an external device, and performs processing of controlling a beam parameter based on a sensor output signal obtained from the sensor in a burst duration, and processing of detecting self-oscillation light from the amplifier based on a sensor output signal obtained from the sensor in a burst stop duration.
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公开(公告)号：US20180375283A1
公开(公告)日：2018-12-27
申请号：US16052658
申请日：2018-08-02
Applicant: Gigaphoton Inc.
Inventor： Yoshiaki KUROSAWA
IPC: H01S3/23 , H01S3/10 , H01S5/0683 , H01S3/134 , G03F7/20
Abstract: The laser apparatus includes a master oscillator, an amplifier, a power source, and a controller to control the power source. The controller controls the power source such that an excitation intensity of the amplifier in a burst oscillation period performing the burst oscillation is a first excitation intensity, controls the power source such that, if the predetermined repetition frequency is a first repetition frequency, an excitation intensity of the amplifier in a suspension period suspending the burst oscillation is a second excitation intensity equal to or lower than the first excitation intensity, and controls the power source such that, if the predetermined repetition frequency is a second repetition frequency higher than the first repetition frequency, the excitation intensity of the amplifier in the suspension period is a third excitation intensity lower than the second excitation intensity.
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公开(公告)号：US20180351322A1
公开(公告)日：2018-12-06
申请号：US16055656
申请日：2018-08-06
Applicant: GIGAPHOTON INC.
Inventor： Yoshiaki KUROSAWA , Takashi SUGANUMA
CPC classification number: H01S3/134 , G01N21/5907 , G01N33/004 , G01N33/0063 , G03F7/70033 , H01S3/005 , H01S3/0071 , H01S3/034 , H01S3/036 , H01S3/1305 , H01S3/1306 , H01S3/2232 , H01S3/2316
Abstract: A laser apparatus according to one aspect of the present disclosure includes a master oscillator configured to output laser light, a plurality of amplifiers each configured to include carbon dioxide as a laser medium and amplify the laser light, a first optical path pipe configured to cover a laser optical path between the amplifiers, a gas supply port configured to supply, into the first optical path pipe, gas having lower carbon dioxide concentration than that of the air, a first carbon dioxide densitometer configured to measure carbon dioxide concentration in the first optical path pipe, and an alarm device configured to issue an alarm when the carbon dioxide concentration measured by the first carbon dioxide densitometer exceeds a preset prescribed value.
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