LASER APPARATUS, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
    1.
    发明申请
    LASER APPARATUS, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 审中-公开
    激光装置,激光系统和极光紫外线发光装置

    公开(公告)号:US20140346375A1

    公开(公告)日:2014-11-27

    申请号:US14455669

    申请日:2014-08-08

    Abstract: A laser apparatus includes a master oscillator configured to output a pulse laser beam, at least one amplifier disposed in an optical path of the pulse laser beam, an energy detector that is disposed in the optical path on one of an input side and an output side of the amplifier and that is configured to detect energy of self-oscillating light from the amplifier, a gain adjustment section configured to adjust the gain of the amplifier, and a control unit configured to control the gain adjustment section based on a detection result from the energy detector when a pulse laser beam is not being inputted into the amplifier from the master oscillator.

    Abstract translation: 激光装置包括:主振荡器,被配置为输出脉冲激光束;设置在所述脉冲激光束的光路中的至少一个放大器;能量检测器,设置在所述光路中的输入侧和输出侧之一上 并且被配置为检测来自放大器的自振荡光的能量;增益调整部,被配置为调整放大器的增益;以及控制单元,被配置为基于来自所述放大器的检测结果来控制所述增益调整部 当脉冲激光束未从主振荡器输入到放大器中时,能量检测器。

    REGENERATIVE AMPLIFIER, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
    4.
    发明申请
    REGENERATIVE AMPLIFIER, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 审中-公开
    再生放大器,激光装置和极光超紫外光发生系统

    公开(公告)号:US20130315272A1

    公开(公告)日:2013-11-28

    申请号:US13956282

    申请日:2013-07-31

    Abstract: A regenerative amplifier according to one aspect of this disclosure is used in combination with a laser device, and the regenerative amplifier may include: a pair of resonator mirrors constituting an optical resonator; a slab amplifier provided between the pair of the resonator mirrors for amplifying a laser beam with a predetermined wavelength outputted from the laser device; and an optical system disposed to configure a multipass optical path along which the laser beam is reciprocated inside the slab amplifier, the optical system transferring an optical image of the laser beam at a first position as an optical image of the laser beam at a second position.

    Abstract translation: 根据本公开的一个方面的再生放大器与激光装置组合使用,再生放大器可以包括:构成光谐振器的一对谐振器镜; 设置在所述一对所述谐振器镜之间用于放大从所述激光装置输出的预定波长的激光束的平板放大器; 以及光学系统,被配置为配置多个光路,激光束沿着该光路在所述平板放大器内部往复运动,所述光学系统将所述激光束的光学图像在第一位置处作为所述激光束的光学图像在第二位置 。

    SLAB AMPLIFIER, AND LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS INCLUDING SLAB AMPLIFIER
    5.
    发明申请
    SLAB AMPLIFIER, AND LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS INCLUDING SLAB AMPLIFIER 有权
    SLAB放大器,激光装置和超大型紫外线发光装置,包括SLAB放大器

    公开(公告)号:US20150188277A1

    公开(公告)日:2015-07-02

    申请号:US14657640

    申请日:2015-03-13

    Abstract: There is provided a slab amplifier including an optical system (48, 51) provided in a chamber (47) to allow a seed beam having entered from a first window into the space between a pair of electrodes (42, 43) to be repeatedly reflected between the space so that the seed beam is amplified to be an amplified beam; a first aperture plate (61) provided between the first window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the seed beam and equal to or smaller than a dimension of the first window; and a second aperture plate (62) provided between the second window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the amplified beam and equal to or smaller than a dimension of the second window.

    Abstract translation: 提供了一种平板放大器,包括设置在室(47)中的光学系统(48,51),以允许从第一窗口进入的种子束进入一对电极(42,43)之间的空间中,以反复反射 在空间之间,使得种子束被放大为放大的光束; 设置在所述第一窗口和所述电极之间并且具有等于或大于所述种子束的横截面的尺寸的开口并且等于或小于所述第一窗口的尺寸的第一孔板(61) 以及设置在第二窗口和电极之间并具有等于或大于放大光束的横截面的尺寸的开口并且等于或小于第二窗口的尺寸的第二孔板(62)。

    LASER APPARATUS
    6.
    发明申请
    LASER APPARATUS 审中-公开
    激光装置

    公开(公告)号:US20140348189A1

    公开(公告)日:2014-11-27

    申请号:US14455576

    申请日:2014-08-08

    Abstract: A laser apparatus may include a master oscillator configured to output a laser beam, at least one amplifier provided in a beam path of the laser beam, at least one saturable absorber gas cell provided downstream from the at least one amplifier and configured to contain a saturable absorber gas for absorbing a part of the laser beam, the part having a beam intensity equal to or lower than a predetermined beam intensity, and a cooling unit for cooling the saturable absorber gas.

    Abstract translation: 激光装置可以包括被配置为输出激光束的主振荡器,设置在激光束的光束路径中的至少一个放大器,设置在至少一个放大器的下游的至少一个饱和吸收器气体单元,并且被配置为包含可饱和 用于吸收一部分激光束的吸收气体,具有等于或低于预定光束强度的光束强度的部分,以及用于冷却可饱和吸收剂气体的冷却单元。

    LASER APPARATUS
    7.
    发明申请
    LASER APPARATUS 审中-公开
    激光装置

    公开(公告)号:US20140300950A1

    公开(公告)日:2014-10-09

    申请号:US14310845

    申请日:2014-06-20

    Abstract: A laser apparatus includes at least one oscillator configured to output a first laser beam; a filter device provided in a beam path of the first laser beam, the filter device including either an optical element having transmittance properties depending on a polarization direction and a wavelength and a filter device including a wavelength dispersive element; and at least one amplifier configured to amplify a second laser beam from the filter device and output as a third laser beam.

    Abstract translation: 激光装置包括至少一个被配置为输出第一激光束的振荡器; 设置在第一激光束的光束路径中的滤光器装置,滤光器装置包括具有取决于偏振方向和波长的透射特性的光学元件和包括波长色散元件的滤光器件; 以及至少一个放大器,被配置为放大来自所述滤波器装置的第二激光束并作为第三激光束输出。

    LASER BEAM AMPLIFIER AND LASER APPARATUS USING THE SAME
    8.
    发明申请
    LASER BEAM AMPLIFIER AND LASER APPARATUS USING THE SAME 审中-公开
    使用激光束放大器和激光装置

    公开(公告)号:US20130250402A1

    公开(公告)日:2013-09-26

    申请号:US13895242

    申请日:2013-05-15

    Abstract: A laser beam amplifier with high optical axis stability is provided. The laser beam amplifier includes: a container for accommodating a laser medium; a pair of electrodes for performing discharge in the laser medium to form an amplification region for a laser beam in the laser medium; and an optical system for forming an optical path between a first point, upon which the laser beam is incident, and a second point, from which the laser beam is outputted, such that the amplification region is located in the optical path between the first point and the second point, wherein the first point and the second point are conjugate to each other, and the laser beam incident upon the first point is amplified while passing through the amplification region at least twice and then transferred to the second point.

    Abstract translation: 提供了具有高光轴稳定性的激光束放大器。 激光束放大器包括:用于容纳激光介质的容器; 一对电极,用于在激光介质中进行放电,以在激光介质中形成用于激光束的放大区域; 以及光学系统,用于在激光束入射的第一点和从其输出激光束的第二点之间形成光路,使得放大区域位于第一点之间的光路中 以及第二点,其中第一点和第二点彼此共轭,并且入射在第一点上的激光束在通过放大区域至少两次时被放大,然后被传送到第二点。

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