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公开(公告)号：US20230366668A1
公开(公告)日：2023-11-16
申请号：US18354635
申请日：2023-07-18
IPC分类号： G01B9/02015 , G01B9/02001
CPC分类号： G01B9/0203 , G01B9/02007 , G01B9/02024 , G01B2290/45
摘要： A three-dimensional measurement device includes: an optical system including an optical device that splits an incident light, irradiates a measurement object with a measurement light, irradiates a reference plane with a reference light, and combines at least part of the reflected measurement light with at least part of the reflected reference light to emit a combined light; a first light emitter that emits a first light that has a first wavelength; a second light emitter that emits a second light that has a second wavelength; a first imaging device that takes an image of an output light output from the optical device in which the first light enters; a second imaging device that takes an image of an output light output from the optical device in which the second light enters; and a control device that executes three-dimensional measurement of the measurement object.
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公开(公告)号：US20190178625A1
公开(公告)日：2019-06-13
申请号：US16279297
申请日：2019-02-19
申请人： CKD CORPORATION
发明人： Hiroyuki Ishigaki , Takahiro Mamiya
摘要： A measurement device includes: an optical system that splits incident light into two lights to emit one light as measurement light to a measurement object and the other light as reference light to a reference surface, and recombines the two lights to emit combined light; a light emitter that emits light entering the optical system; an imaging system that takes an image of output light emitted from the optical system; and a processor that executes measurement with regard to a predetermined measurement area of the measurement object, based on an interference fringe image taken by the imaging system, wherein the processor: obtains complex amplitude data at a predetermined position in an optical axis direction at predetermined intervals in at least a predetermined range in the optical axis direction, with regard to a specific area set in advance in the measurement area based on the interference fringe image.
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公开(公告)号：US20190094016A1
公开(公告)日：2019-03-28
申请号：US16194576
申请日：2018-11-19
申请人： CKD Corporation
发明人： Hiroyuki Ishigaki , Takahiro Mamiya
摘要： A three-dimensional measurement device includes: an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measurement object and the other as reference light to a reference surface, and recombines the two lights to emit combined light; a first irradiation unit that emits first light entering the optical system; a second irradiation unit that emits second light entering the optical system; a first imaging unit into which output light that is obtained from the first light and is emitted from the optical system enters; a second imaging unit into which output light that is obtained from the second light and is emitted from the optical system enters; and an image processor that executes three-dimensional measurement of the measurement object, based on interference fringe images taken by the first imaging unit and the second imaging unit.
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公开(公告)号：US20180106590A1
公开(公告)日：2018-04-19
申请号：US15820816
申请日：2017-11-22
申请人： CKD Corporation
发明人： Hiroyuki Ishigaki , Takahiro Mamiya
CPC分类号： G01B9/0203 , G01B9/02007 , G01B9/02011 , G01B9/02018 , G01B9/02024 , G01B9/02027 , G01B9/02057 , G01B9/02079 , G01B9/02081 , G01B11/2441 , G01B2290/45 , G01B2290/70 , G01J3/0205 , H01L22/12 , H05K3/00
摘要： A three-dimensional measurement device includes an optical system that: splits an incident light into two lights; radiates one light to a measurement object and the other light to a reference surface; and emits the combined light; a first irradiator that emits a first light that comprises a polarized light of a first wavelength and enters a first element of the optical system; a second irradiator that emits a second light that comprises a polarized light of a second wavelength and enters a second element of the optical system; a first camera that takes an image of the first light emitted from the second element when the first light enters the first element; a second camera that takes an image of the second light emitted from the first element when the second light enters the second element; and an image processor that performs measurement based on the images.
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公开(公告)号：US20230243643A1
公开(公告)日：2023-08-03
申请号：US18295845
申请日：2023-04-05
申请人： CKD CORPORATION
发明人： Hiroyuki Ishigaki , Tomoru Okada , Ikuo Futamura
IPC分类号： G01B11/24 , G01B9/02015 , G01B9/02 , G01B9/02001
CPC分类号： G01B11/2441 , G01B9/0203 , G01B9/02024 , G01B9/02083 , G01B9/02007 , G01B2290/70
摘要： A three-dimensional measurement device includes: a light emitter; an optical system that splits an incident light, irradiates a measurement object with an object light and irradiates a reference plane with a reference light, and recombines the object and reference lights and emits a combined light; an imaging device that takes an image of a light emitted from the optical system; a storage device that stores transmission axis absolute angle data each obtained by a previous actual measurement of an absolute angle of a transmission axis of each polarizer; and a control device that calculates a phase difference between the reference and object lights based on luminance data of each pixel in luminance image data and the transmission axis absolute angle data of each polarizer corresponding to the pixel, and measures a height of the measurement object at the measurement position.
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公开(公告)号：US20180112974A1
公开(公告)日：2018-04-26
申请号：US15849911
申请日：2017-12-21
申请人： CKD Corporation
CPC分类号： G01B11/2513 , G01B11/0608 , G01B11/2527 , G01N21/956 , G01N2021/95646 , G06T7/001 , G06T7/521 , G06T7/60 , G06T2200/04 , G06T2207/10152 , G06T2207/30141 , G06T2207/30148 , G06T2207/30152 , H05K13/08
摘要： A three-dimensional measurement device includes a light source and grid that irradiate a measurement object; a luminance controller that changes luminance levels of the light; a phase controller that changes phase levels of the light pattern; a camera that takes an image of the measurement object; and a processor that three-dimensionally measures a first measurement object area based on different image data taken by radiating a first light pattern in different phases; determines a relationship between a gain and offset determined according to an imaging condition based on the different image data; and three-dimensionally measures a second measurement object area based on two different image data taken by radiating a second light pattern in two different phases by using a gain and offset regarding each pixel determined according to a luminance value of each pixel in the two different image data and the determined relationship.
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公开(公告)号：US10782122B2
公开(公告)日：2020-09-22
申请号：US16194576
申请日：2018-11-19
申请人： CKD Corporation
发明人： Hiroyuki Ishigaki , Takahiro Mamiya
摘要： A three-dimensional measurement device includes: an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measurement object and the other as reference light to a reference surface, and recombines the two lights to emit combined light; a first irradiation unit that emits first light entering the optical system; a second irradiation unit that emits second light entering the optical system; a first imaging unit into which output light that is obtained from the first light and is emitted from the optical system enters; a second imaging unit into which output light that is obtained from the second light and is emitted from the optical system enters; and an image processor that executes three-dimensional measurement of the measurement object, based on interference fringe images taken by the first imaging unit and the second imaging unit.
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公开(公告)号：US10704888B2
公开(公告)日：2020-07-07
申请号：US15820816
申请日：2017-11-22
申请人： CKD Corporation
发明人： Hiroyuki Ishigaki , Takahiro Mamiya
摘要： A three-dimensional measurement device includes an optical system that: splits an incident light into two lights; radiates one light to a measurement object and the other light to a reference surface; and emits the combined light; a first irradiator that emits a first light that comprises a polarized light of a first wavelength and enters a first element of the optical system; a second irradiator that emits a second light that comprises a polarized light of a second wavelength and enters a second element of the optical system; a first camera that takes an image of the first light emitted from the second element when the first light enters the first element; a second camera that takes an image of the second light emitted from the first element when the second light enters the second element; and an image processor that performs measurement based on the images.
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公开(公告)号：US10514253B2
公开(公告)日：2019-12-24
申请号：US15596788
申请日：2017-05-16
申请人： CKD Corporation
摘要： A measurement apparatus includes an illumination device irradiating an object with a first and a second pattern, a camera taking image data of the object, a motor displacing the object, and a processor measuring the object, obtaining a first value of the object based on a first number of image data taken with the first pattern at a first number of phases at a first position, obtaining a gain and/or offset based on the first number of image data, obtaining a second value of the object based on the gain and/or offset and a second number of image data taken with the second pattern at a second number of phases at a second position, obtaining height data of the object based on the first and the second value, and obtaining the second value with an average of the gain and/or offset of pixels adjacent to each pixel.
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公开(公告)号：US11118895B2
公开(公告)日：2021-09-14
申请号：US16874222
申请日：2020-05-14
申请人： CKD CORPORATION
发明人： Hiroyuki Ishigaki , Takahiro Mamiya
摘要： A three-dimensional measurement device includes: an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measured object and the other of the two lights as reference light to a reference surface, and recombines the two lights into combined light to emit the combined light; a light emitter that emits predetermined light entering the predetermined optical system; an imaging system that takes an image of output light emitted from the optical system; and an image processor that performs three-dimensional measurement of a predetermined measurement area of the measured object based on an interference fringe image obtained by the imaging system. The image processor obtains intensity image data at a predetermined position along an optical axis direction at each coordinate position in the measurement area by reconstruction based on an interference fringe image of the measurement area.
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