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公开(公告)号:CN100580912C
公开(公告)日:2010-01-13
申请号:CN200610073629.4
申请日:2006-04-13
Applicant: 株式会社瑞萨科技
CPC classification number: H01L25/0657 , H01L23/3128 , H01L23/4952 , H01L23/49575 , H01L24/05 , H01L24/06 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/78 , H01L24/85 , H01L2224/04042 , H01L2224/05554 , H01L2224/05624 , H01L2224/06136 , H01L2224/32145 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48137 , H01L2224/48247 , H01L2224/48465 , H01L2224/48471 , H01L2224/48479 , H01L2224/48624 , H01L2224/49171 , H01L2224/49175 , H01L2224/49433 , H01L2224/78301 , H01L2224/85051 , H01L2224/85121 , H01L2224/85205 , H01L2224/85986 , H01L2225/0651 , H01L2225/06575 , H01L2924/00011 , H01L2924/00014 , H01L2924/01005 , H01L2924/01013 , H01L2924/01033 , H01L2924/0105 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/15311 , H01L2924/181 , H01L2924/20752 , H01L2224/85186 , H01L2224/48227 , H01L2924/00 , H01L2924/00015 , H01L2924/00012 , H01L2924/01006 , H01L2224/4554
Abstract: 提供一种半导体装置及其制造方法,可防止键合丝之间的电气短路或者凸块电极剥落,并且可稳定地制造。该半导体装置具有:带有焊盘的芯片;在焊盘上所形成的凸块电极;针脚键合在凸块电极上的键合丝,其中,键合丝满足(弹性系数/每单位面积的断裂强度)≥400的条件。另外,还具有用于密封芯片、凸块电极以及键合丝的密封树脂,优选为密封树脂的螺旋流动性大于等于110cm并且粘度小于10Pa·S。
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公开(公告)号:CN101800182A
公开(公告)日:2010-08-11
申请号:CN200910263609.7
申请日:2009-12-23
Applicant: 株式会社瑞萨科技
IPC: H01L21/50 , H01L21/603
CPC classification number: H01L24/85 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/78 , H01L24/97 , H01L2224/32225 , H01L2224/45015 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/48465 , H01L2224/73265 , H01L2224/7825 , H01L2224/78301 , H01L2224/7865 , H01L2224/78703 , H01L2224/85181 , H01L2224/85447 , H01L2224/97 , H01L2924/00011 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01015 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/12041 , H01L2924/14 , H01L2924/15311 , H01L2924/181 , H01L2924/20752 , Y10S228/904 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
Abstract: 本发明涉及用于制造半导体器件和接线键合器的方法。具体地,通过减小引线框或者布线衬底在接线键合之后的颤动,实现了接线键合质量的改进。在接线键合器的接线键合部分的加热块之上,提供冷却风机,用于冷却经过接线键合的矩阵框,从而使其温度可以逐步降低。在接线键合之后,冷空气从冷却风机吹送到矩阵框,并且执行对矩阵框的温度控制,从而使矩阵框的温度在接线键合之后可以逐步降低。或者,利用诸如框保持部件、引导部件、滚轴装置或者弹性装置的保持工具来固定经过接线键合的矩阵框,直到冷却完成。
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公开(公告)号:CN101261973A
公开(公告)日:2008-09-10
申请号:CN200810082599.2
申请日:2008-03-05
Applicant: 株式会社瑞萨科技
IPC: H01L23/488 , H01L23/495
CPC classification number: H01L23/49541 , H01L23/49558 , H01L23/60 , H01L24/06 , H01L24/48 , H01L24/49 , H01L2223/6638 , H01L2224/05553 , H01L2224/05599 , H01L2224/48247 , H01L2224/48253 , H01L2224/49171 , H01L2224/85399 , H01L2924/00014 , H01L2924/01004 , H01L2924/01006 , H01L2924/01015 , H01L2924/01027 , H01L2924/01033 , H01L2924/01082 , H01L2924/13091 , H01L2924/181 , H01L2924/19043 , H01L2924/30105 , H01L2924/30107 , H01L2924/3011 , H01L2224/45099 , H01L2924/00
Abstract: 本发明的目的在于得到可防止内部引线的表面摩擦而出现伤痕的半导体装置。在下垫板(13)的周围设置多个内部引线(14)。在下垫板(13)与多个内部引线(14)之间的区域设置有接地的GND引线(16)。半导体芯片(17)与多个内部引线(14)分别被多个导线(21)连接。半导体芯片(17)与GND引线(16)被GND导线(22)连接。GND导线(22)配置在多个导线(21)之间。邻接的内部引线(14)的前端的间隔为0.2mm以下。
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公开(公告)号:CN1866505A
公开(公告)日:2006-11-22
申请号:CN200610073629.4
申请日:2006-04-13
Applicant: 株式会社瑞萨科技
CPC classification number: H01L25/0657 , H01L23/3128 , H01L23/4952 , H01L23/49575 , H01L24/05 , H01L24/06 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/78 , H01L24/85 , H01L2224/04042 , H01L2224/05554 , H01L2224/05624 , H01L2224/06136 , H01L2224/32145 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48137 , H01L2224/48247 , H01L2224/48465 , H01L2224/48471 , H01L2224/48479 , H01L2224/48624 , H01L2224/49171 , H01L2224/49175 , H01L2224/49433 , H01L2224/78301 , H01L2224/85051 , H01L2224/85121 , H01L2224/85205 , H01L2224/85986 , H01L2225/0651 , H01L2225/06575 , H01L2924/00011 , H01L2924/00014 , H01L2924/01005 , H01L2924/01013 , H01L2924/01033 , H01L2924/0105 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/15311 , H01L2924/181 , H01L2924/20752 , H01L2224/85186 , H01L2224/48227 , H01L2924/00 , H01L2924/00015 , H01L2924/00012 , H01L2924/01006 , H01L2224/4554
Abstract: 提供一种半导体装置及其制造方法,可防止键合丝之间的电气短路或者凸块电极剥落,并且可稳定地制造。该半导体装置具有:带有焊盘的芯片;在焊盘上所形成的凸块电极;针脚键合在凸块电极上的键合丝,其中,键合丝满足(弹性系数/每单位面积的断裂强度)≥400的条件。另外,还具有用于密封芯片、凸块电极以及键合丝的密封树脂,优选为密封树脂的螺旋流动性大于等于110cm并且粘度小于10Pa·S。
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