- 专利标题: Self-aligned floating gate in a vertical memory structure
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申请号: US15207877申请日: 2016-07-12
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公开(公告)号: US09698022B2公开(公告)日: 2017-07-04
- 发明人: Randy J. Koval
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Compass IP Law PC
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/28 ; H01L29/788 ; G11C16/04 ; H01L27/11556 ; H01L29/78 ; H01L21/02 ; H01L21/311 ; H01L21/3213 ; H01L27/11519 ; H01L27/11521 ; H01L29/04 ; H01L29/10 ; H01L29/16 ; H01L29/49 ; H01L27/11524
摘要:
Methods for building a memory device or electronic system may include a memory cell body extending from a substrate, a self-aligned floating gate separated from the memory cell body by a tunneling dielectric film, and a control gate separated from the self-aligned floating gate by a blocking dielectric film. The floating gate is flanked by the memory cell body and the control gate to form a memory cell, and the self-aligned floating gate is at least as thick as the control gate.
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