- 专利标题: 3D semiconductor device and structure with metal layers and a connective path
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申请号: US18215631申请日: 2023-06-28
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公开(公告)号: US11881443B2公开(公告)日: 2024-01-23
- 发明人: Zvi Or-Bach , Deepak C. Sekar , Brian Cronquist
- 申请人: Monolithic 3D Inc.
- 申请人地址: US OR Klamath Falls
- 专利权人: Monolithic 3D Inc.
- 当前专利权人: Monolithic 3D Inc.
- 当前专利权人地址: US OR Klamath Falls
- 代理机构: PowerPatent
- 代理商 Bao Tran
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L27/06 ; H01L27/088 ; H01L29/66 ; H01L23/544 ; H01L29/732 ; H01L27/118 ; H01L29/10 ; H01L29/808 ; H01L27/02 ; H01L29/78 ; H01L21/74 ; H10B12/00 ; H10B41/20 ; H10B41/40 ; H10B43/20 ; H10B43/40 ; H01L23/34 ; H01L23/50 ; H10B63/00
摘要:
A 3D semiconductor device, the device including: a first level including a plurality of first metal layers; a second level, where the second level overlays the first level, where the second level includes at least one single crystal silicon layer, where the second level includes a plurality of transistors, where each transistor of the plurality of transistors includes a single crystal channel, where the second level includes a plurality of second metal layers, where the plurality of second metal layers include interconnections between the transistors of the plurality of transistors, and where the second level is overlaid by a first isolation layer; and a connective path from the plurality of transistors to the plurality of first metal layers, where the connective path includes a via disposed through at least the single crystal silicon layer, and where at least one of the via includes a contact to at least one of the transistors.
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