公开(公告)号：US20220236057A1

公开(公告)日：2022-07-28

申请号：US17718418

申请日：2022-04-12

Applicant: Seiko Epson Corporation

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Ryuta NISHIZAWA

IPC: G01C19/5642 ,  B60R16/023 ,  G01C19/5656 ,  G01P15/18 ,  G01C19/5607 ,  G01C19/56

Abstract: A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.

公开(公告)号：US11280613B2

公开(公告)日：2022-03-22

申请号：US16829413

申请日：2020-03-25

Applicant: GEORGIA TECH RESEARCH CORPORATION

Inventor： Farrokh Ayazi ,  Haoran Wen

IPC: G01C19/5747 ,  G01P15/125 ,  G01P15/097 ,  G01C19/5642 ,  G01P15/08 ,  G01D5/241

Abstract: An inertial measurement apparatus has mechanically bendable beams that have an isosceles trapezoid cross-section. The apparatus has a resonant member having a perimeter at least partially defined by a sidewall slanted at a first angular value and at least one electrode disposed adjacent, and parallel, to the sidewall and separated therefrom by a capacitive gap.

公开(公告)号：US10782130B2

公开(公告)日：2020-09-22

申请号：US15988696

申请日：2018-05-24

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Heikki Kuisma

IPC: G01C19/5747 ,  G01C19/5642 ,  G01C19/5712 ,  G01C19/5769

Abstract: The disclosure describes a microelectromechanical gyroscope comprising a substrate and at least one inertial mass suspended from an anchor points by a suspension structure configured to allow the first inertial mass to oscillate rotationally both in the device plane and out of the device plane. The suspension structure comprises a set of first suspenders coated with piezoelectric transducer structures configured drive or detect the oscillating motion of the suspended inertial mass in the device plane, and a set of second suspenders coated with piezoelectric transducer structures configured to drive or detect the oscillating motion of the suspended inertial mass out of the device plane. The set of first suspenders and set of second suspenders are concatenated in the suspension structure.

公开(公告)号：US10408618B2

公开(公告)日：2019-09-10

申请号：US15416341

申请日：2017-01-26

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Satoshi Ohuchi ,  Hiroyuki Aizawa ,  Jiro Terada ,  Takami Ishida ,  Ichirou Satou ,  Hideo Ohkoshi ,  Yohei Ashimori

IPC: G01C19/56 ,  G01C19/5642 ,  G01C19/5607 ,  G01P15/097 ,  G01P15/18 ,  G01C19/574

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

公开(公告)号：US20190195630A1

公开(公告)日：2019-06-27

申请号：US16232112

申请日：2018-12-26

Applicant: SEIKO EPSON CORPORATION

Inventor： Masashi SHIMURA ,  Atsushi MATSUO ,  Shinya AOKI ,  Shiro MURAKAMI ,  Ryuta NISHIZAWA

IPC: G01C19/5642 ,  H01L41/09 ,  G01C19/5607 ,  H01L41/047 ,  H03H9/15 ,  H03B5/32

CPC classification number: G01C19/5642 ,  G01C19/5607 ,  H01L41/047 ,  H01L41/09 ,  H03B5/32 ,  H03H9/15

Abstract: A vibrator device includes a base, a first relay substrate mounted on the base, a second relay substrate mounted on the first relay substrate, and a vibrator element mounted on the second relay substrate, in which the second relay substrate is disposed between the first relay substrate and the vibrator, and the second relay substrate includes a terminal that is electrically coupled to the vibrator element and is positioned in a region overlapping with the first relay substrate and not overlapping the vibrator element in a plan view.

公开(公告)号：US10302431B2

公开(公告)日：2019-05-28

申请号：US15343656

申请日：2016-11-04

Applicant: Seiko Epson Corporation ,  DENSO CORPORATION

Inventor： Takashi Aoyama ,  Naoki Yoshida

IPC: G01C19/5642 ,  G01C19/5614

Abstract: A physical quantity detection circuit includes: a synchronous detection circuit that performs a synchronous detection process on a detection target signal based on a detection signal, the detection target signal including a physical quantity detection signal and a leakage signal from a physical quantity detection element, the physical quantity detection element vibrating based on a drive signal to generate the physical quantity detection signal corresponding to a magnitude of a physical quantity, and the leakage signal of vibrations based on the drive signal; and a phase shift circuit that switches a phase difference between the detection signal and the detection target signal, between a first phase difference and a second phase difference that differs from the first phase difference, so that at least part of the leakage signal is output through the synchronous detection process.

公开(公告)号：US20170234725A1

公开(公告)日：2017-08-17

申请号：US15426614

申请日：2017-02-07

Applicant: SEIKO EPSON CORPORATION

Inventor： Fumio ICHIKAWA

IPC: G01H11/00 ,  G01C19/5642

CPC classification number: G01H11/00 ,  G01C19/5621 ,  G01C19/5642 ,  G01C19/5656 ,  G01H1/00

Abstract: A gyro sensor element includes a base, driving vibrating arms, which extend from the base, have a first surface and a second surface located on an opposite side to the first surface, and make a driving vibration, and detecting vibrating arms, which extend from the base, have a third surface located on a same side as the first surface and a fourth surface located on an opposite side to the third surface, and vibrate in accordance with a physical quantity applied to the driving vibrating arms, wherein the driving vibrating arms have bottomed grooves on at least one of the first surface and the second surface, and driving electrodes disposed on inner surfaces of the bottomed grooves, and the detecting vibrating arms have through holes penetrating the detecting vibrating arms in a direction crossing the third surface and the fourth surface, and detecting electrodes disposed on at least a part of an inner wall surface of the through holes.

公开(公告)号：US20170074654A1

公开(公告)日：2017-03-16

申请号：US15260793

申请日：2016-09-09

Applicant: Seiko Epson Corporation

Inventor： Makoto FURUHATA

IPC: G01C19/5642 ,  G01P15/125

CPC classification number: G01C19/574 ,  G01C19/5712

Abstract: An oscillator includes a substrate, a detection flap plate which is disposed facing the substrate, and an elastically deformable beam portion which displaceably supports the detection flap plate in a Z axis direction with respect to the substrate, in which the detection flap plate is displaced to the substrate side in a range in which recovery force of the beam portion is larger than the electrostatic force which is formed between the substrate and the detection flap plate. That is, when a boundary at which electrostatic force and recovery force are equal is a pull in critical point, the detection flap plate is displaced within a region above the pull in critical point.

Abstract translation: 振荡器包括基板，与基板相对设置的检测翼板，以及可弹性变形的梁部分，其可相对于基板沿Z轴方向可移动地支撑检测翼片板，检测翼片板移动到 所述基板侧在所述梁部的恢复力大于形成在所述基板和所述检测翼板之间的静电力的范围内。 也就是说，当静电力和恢复力相等的边界是临界点的拉动时，检测翼板在临界点以上的拉伸区域内移位。

公开(公告)号：US09528830B2

公开(公告)日：2016-12-27

申请号：US14334216

申请日：2014-07-17

Applicant: Ramot at Tel-Aviv University Ltd.

Inventor： Yuval Gerson ,  Viacheslav Krylov ,  Yotam Bar-On

IPC: G01C19/5642 ,  G01C19/574

CPC classification number: G01C19/5642 ,  G01C19/574

Abstract: A rotation sensing device is presented. The device comprises: a proof mass arrangement comprising at least one pair of proof masses spaced-apart from one another along a first axis; a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams; and an actuation mechanism configured and operable to cause the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, thereby generating a sense-mode oscillatory movement of the proof masses during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation.

Abstract translation: 提出了一种旋转感测装置。 该装置包括：证明质量装置，其包括沿着第一轴线彼此间隔开的至少一对检验质量块; 悬架组件，其包括具有可在其基本上直线和弯曲状态之间变形的主轴的柔性悬挂梁，所述悬架组件将所述证明块联接到锚固组件，同时允许所述证明块的驱动模式振荡运动至少沿第二轴线 基本上垂直于梁的主轴线; 以及致动机构，其被配置和可操作以使所述证明质量块沿着所述第二轴线的相反方向的驱动模式振荡运动，从而在所述装置旋转期间产生所述证明质量块的感测模式振荡运动，该运动模式围绕至少一个旋转 垂直于所述第二轴的轴，所述感测模式运动指示旋转速率。

公开(公告)号：US09519004B2

公开(公告)日：2016-12-13

申请号：US15037518

申请日：2014-10-21

Applicant: SAGEM DEFENSE SECURITE

Inventor： Alain Jeanroy

IPC: G01P15/00 ,  G01P15/097 ,  G01P15/08 ,  G01C19/5656 ,  G01C19/5719 ,  G01P15/18 ,  G01P15/14 ,  G01C19/5733 ,  G01C19/5642 ,  G01C19/56 ,  G01P15/125

CPC classification number: G01P15/097 ,  G01C19/56 ,  G01C19/5642 ,  G01C19/5656 ,  G01C19/5719 ,  G01C19/5733 ,  G01P15/0802 ,  G01P15/0888 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/082 ,  G01P2015/0848 ,  G01P2015/0857

Abstract: A sensor comprising: a stand; a first body movable along a sensing axis; two pairs of second bodies arranged symmetrically relative to the first body and along the sensing axis; transducers for detecting a position of the first body relative to the stand, for setting the second bodies into vibration along a vibration axis, and for detecting respective vibration frequencies of the second bodies; and surface electrostatic coupling means connecting each second body to the first body in such a manner that a movement of the first body relative to the stand along the sensing axis gives rise respectively to an increase and to a decrease in the electrostatic coupling for one and the other of the pairs of second bodies. Methods of controlling such a sensor.

Abstract translation: 一种传感器，包括：支架; 沿着感测轴可移动的第一主体; 两对第二主体相对于第一主体并沿传感轴对称地布置; 用于检测第一主体相对于支架的位置的换能器，用于将第二主体沿着振动轴线设置成振动，并且用于检测第二主体的各个振动频率; 以及表面静电耦合装置，其将每个第二主体连接到第一主体，使得第一主体相对于支架沿传感轴的运动分别产生一个和第二主体的静电耦合的增加和减小 其他两对第二体。 控制这种传感器的方法。