Invention Application
- Patent Title: Vibrator Device, Electronic Apparatus, And Vehicle
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Application No.: US17718418Application Date: 2022-04-12
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Publication No.: US20220236057A1Publication Date: 2022-07-28
- Inventor: Seiichiro OGURA , Keiichi YAMAGUCHI , Ryuta NISHIZAWA
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2019-139663 20190730
- Main IPC: G01C19/5642
- IPC: G01C19/5642 ; B60R16/023 ; G01C19/5656 ; G01P15/18 ; G01C19/5607 ; G01C19/56

Abstract:
A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.
Public/Granted literature
- US11940275B2 Vibrator device, electronic apparatus, and vehicle Public/Granted day:2024-03-26
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