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318 条记录 (耗时 0.017 秒)

    Situ clean for bevel and edge ring
    1.
    发明授权
    Situ clean for bevel and edge ring 有权

    公开(公告)号：US12068153B2

    公开(公告)日：2024-08-20

    申请号：US17829288

    申请日：2022-05-31

    申请人： Applied Materials, Inc.

    发明人： Kaushik Alayavalli ,  Andrew Nguyen ,  Edward Haywood ,  Lu Liu ,  Malav Kapadia

    IPC分类号： H01J21/02 ,  H01J37/32 ,  H01L21/02

    CPC分类号： H01L21/02087 ,  H01J37/3244 ,  H01J2237/335

    摘要： Embodiments disclosed herein include a method for cleaning a bevel area of a substrate support disposed within a plasma processing chamber. In one example the method begins by placing a cover substrate on a substrate support disposed in an interior volume of a processing chamber. A cleaning gas is provided into the interior volume of the processing chamber. A plasma is struck in the interior volume of the processing chamber. A cleaning gas is provided through the substrate support to a bevel edge area defined between an outer diameter of the cover substrate and an edge ring disposed on the substrate support.

    Wide band grid circuit coaxial tube
    3.
    发明授权
    Wide band grid circuit coaxial tube 失效
    宽带电网同轴管

    公开(公告)号：US3909658A

    公开(公告)日：1975-09-30

    申请号：US46334274

    申请日：1974-04-23

    申请人： INSTR FOR INDUSTRY

    发明人： SWANSON ELSTON H

    IPC分类号： H01J21/02 ,  H03F1/20 ,  H01J7/46 ,  H01J19/80

    CPC分类号： H01J21/02 ,  H03F1/20

    摘要： This invention relates to utilizing tubes having a coaxial base in a non-coaxial circuit and more particularly, to a grid line structure, including a trough, constructed to have effect as a coaxial line having shunt discontinuities distributed in the form of tubes.

    摘要翻译： 本发明涉及利用在非同轴电路中具有同轴基底的管，更具体地说，涉及包括槽的网格线结构，其被构造成具有作为具有以管的形式分布的分流不连续性的同轴线的作用。

    Electron device incorporating a microchannel secondary emitter
    4.
    发明授权
    Electron device incorporating a microchannel secondary emitter 失效
    包含微通道二次发射器的电子装置

    公开(公告)号：US3854066A

    公开(公告)日：1974-12-10

    申请号：US41800173

    申请日：1973-11-21

    申请人： US ARMY

    发明人： PAYNE W

    IPC分类号： H01J3/02 ,  H01J21/02 ,  H01J43/02

    CPC分类号： H01J3/023 ,  H01J21/02

    摘要： An electron device incorporating a microchannel plate as a secondary emission electron source which in addition to the primary current provided by an electron emitter, such as a thermionic emitter, will provide high gains. By impressing the proper voltages thereon, the entrance and exit surfaces of the microchannel plate serve respectively as equivalents to the control grid and screen grid in a conventional type tube.

    摘要翻译： 结合微通道板作为二次发射电子源的电子器件除了由诸如热离子发射器的电子发射器提供的初级电流之外，将提供高增益。 通过在其上施加适当的电压，微通道板的入射和出射表面分别作为常规型管中的控制栅格和筛网的等同物。

    Electrode structure for controlling electron flow with high transmission efficiency
    5.
    发明授权
    Electrode structure for controlling electron flow with high transmission efficiency 失效
    用于控制高传输效率的电子流的电极结构

    公开(公告)号：US3660712A

    公开(公告)日：1972-05-02

    申请号：US3660712D

    申请日：1970-12-09

    申请人： ATOMIC ENERGY COMMISSION

    发明人： MANCEBO LIOYD

    IPC分类号： H01J19/34 ,  H01J21/02 ,  H01J35/22 ,  H01J1/46 ,  H01J21/10

    CPC分类号： H01J35/22 ,  H01J19/34 ,  H01J21/02 ,  H01J2893/0004

    摘要： Electrode structure for controlling flow of electrons from a cathode to an anode, characterized by the absence of electrodes in the flow path whereby electron flow is substantially unimpeded by physical structure and proceeds with high transmission efficiency. The structure is such as to establish an electron accelerating field and associated flow path between cathode and anode which bulges outwardly about an interposed control electrode and is thus not physically intercepted by same. By virtue of the high efficiency of electron transmission, the electrode structure may be advantageously incorporated in an Xray tube to provide X-ray pulses of increased intensity. In addition, the transmission characteristic in conjunction with the capability of the bulging field to enable the use of relatively small control voltages to govern electron flow render the electrode structure particularly well suited to the attainment of a high amplification factor in a high power amplifier tube for voltage regulation or switching applications.

    摘要翻译： 用于控制电子从阴极到阳极的流动的电极结构，其特征在于流动路径中不存在电极，由此电子流基本上不受物理结构的阻碍，并且以高传输效率进行。 该结构使得在阴极和阳极之间建立电子加速场和相关联的流动路径，其在插入的控制电极周围向外凸出，并且因此不被物理地截留。 由于电子传输的高效率，电极结构可以有利地结合在X射线管中以提供强度增加的X射线脉冲。 此外，传输特性结合凸起场的能力能够使用相对较小的控制电压来控制电子流，使得电极结构特别适合于在高功率放大管中实现高放大系数 电压调节或开关应用。

    High vacuum electron tube with magnetically isolated control electrode
    6.
    发明授权
    High vacuum electron tube with magnetically isolated control electrode 失效
    具有磁性隔离控制电极的高真空电子管

    公开(公告)号：US3610996A

    公开(公告)日：1971-10-05

    申请号：US3610996D

    申请日：1969-05-20

    申请人： BEATRIX A ELSASSER RUSTERHOLZ ,  PATELHOLD PATENTVERWERTUNG

    发明人： RUSTERHOLZ ALEXANDER

    IPC分类号： H01J21/02 ,  H01J21/18 ,  H01J1/46 ,  H01J1/50

    CPC分类号： H01J21/18 ,  H01J21/02

    摘要： In a high vacuum electron control tube, a cathode comprised of a plurality of spaced parallel cathode wires or filaments arranged upon a generally cylindrical surface parallel to the cylinder axis cooperates with a common generally cylindrical anode concentric with the cathode structure and a control electrode composed of a plurality of planar loop-shaped control elements each arranged radially between adjacent pairs of cathode wires. Suitable oriented U-shaped metallic screens surrounding each of the cathode wires and a homogeneous magnetic field extending parallel to said wires coact to cause the electrons emitted from each cathode wire to follow cycloidal paths towards said anode with a minimum of electrons reaching said control electrode even in case of relatively high positive control voltages, while at the same time ensuring a high amplification factor of the tube.