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    METHOD OF PRODUCING RAPID HEATING OF A CATHODE INSTALLED IN A THERMIONIC EMISSION ASSEMBLY
    1.
    发明申请
    METHOD OF PRODUCING RAPID HEATING OF A CATHODE INSTALLED IN A THERMIONIC EMISSION ASSEMBLY 审中-公开
    生产安装在THERMONIC排放装置中的阴极的快速加热方法

    公开(公告)号：US20140065918A1

    公开(公告)日：2014-03-06

    申请号：US14077051

    申请日：2013-11-11

    申请人： Applied Physics Technologies, Inc.

    发明人： Gerald Magera ,  William Mackie ,  Larry Southall ,  Gary Cabe ,  Cory Fast

    IPC分类号： H01J9/04

    CPC分类号： H01J9/045 ,  H01J37/065 ,  H01J2237/06308

    摘要： A thermionic emission assembly includes a Wehnelt cap that has a cap beam aperture and a cavity within which a cathode is supported. Electrical energy applied to the cathode causes it to reach a sufficiently high temperature to emit a beam of electrons that propagate through the cap beam aperture. An anode having an anode beam aperture is positioned in spatial alignment with the cap beam aperture to receive the electrons. The anode accelerates the electrons and directs them through the anode beam aperture for incidence on a target specimen. A ceramic base forms a combined interface that electrically and thermally separates the Wehnelt cap and the anode. The thermal isolation of the Wehnelt cap from the anode allows the Wehnelt cap to increase in heat to rapidly reach a stable temperature as the cathode emits the beam of electrons.

    摘要翻译： 热电子发射组件包括具有帽束孔的Wehnelt帽和其中负载阴极的空腔。 施加到阴极的电能使得其达到足够高的温度以发射通过帽光束孔径传播的电子束。 具有阳极光束孔的阳极定位成与帽光束孔径空间对准以接收电子。 阳极加速电子并引导它们穿过阳极光束孔径以入射到目标样品上。 陶瓷底座形成了一个组合的界面，它将Wehnelt帽和阳极电和热分离开。 Wehnelt帽与阳极的热隔离允许Wehnelt帽随着阴极发射电子束而增加热量以迅速达到稳定的温度。